Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 2011.05a
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- Pages.26.1-26.1
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- 2011
Atomic Layer Deposition of Nitrogen Doped ZnO and Application for Highly Sensitive Coreshell Nanowire Photo Detector
Abstract
We investigated the atomic layer deposition (ALD) process for nitrogen doped ZnO and the application for n-ZnO : N/p-Si (NW) coaxial hetero-junction photodetectors. ALD ZnO:N was deposited using diethylzinc (DEZ) and diluted