• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.1380-1383
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• 2004

The scanning type XY stage is frequently used these days as precision positioning system in equipment for semiconductor or display element. It is requested higher velocity and more precise accuracy for higher productivity and measuring performance. The position accuracy of general stage is primarily affected by the geometric errors caused by parasitic motion of stage, misalignments such as perpendicular error, and thermal expansion of structure. In the case of scanning type stage, H type frame is usually used as base stage which is driven by two actuators such as linear motor. In the point view of scanning process, the stage is used in moving motion. Therefore, dynamic variation is added as significant position error source with other parasitic motion error. Because the scanning axis is driven by two actuators with two position detectors, 2 dimensional position errors have different characteristic compared to general tacked type XY stage. In this study 2D position error of scanning stage is analyzed by 1D heterodyne interferometer calibrator, which can measure 1D linear position error, straightness error, yaw error and pitch error, and perpendicular error. The 2D position error is evaluated by diagonal measurement (ISO230-6). The yaw error and perpendicular error are compensated on the base stage of scanning axis. And, the horizontal straightness error is compensated by cross axis compensation. And, dynamic motion error in scanning motion is analyzed.

• Journal of Ocean Engineering and Technology
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• v.35 no.2
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• pp.99-112
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• 2021

The prediction of maneuverability is very important in the design process of an underwater vehicle. In this study, we predicted the steady turning ability of a symmetrical underwater vehicle while considering interactions between the yaw rate and drift/rudder angle through a simulation-based methodology. First, the hydrodynamic force and moment, including coupled derivatives, were obtained by computational fluid dynamics (CFD) simulations. The feasibility of CFD results were verified by comparing static drift/rudder simulations to vertical planar motion mechanism (VPMM) tests. Turning motion simulations were then performed by solving 2-degree-of-freedom (DOF) equations with CFD data. The turning radius, drift angle, advance, and tactical diameter were calculated. The results show good agreement with sea trial data and the effects on the turning characteristics of coupled interaction terms, especially between the yaw rate and drift angle.

• Proceedings of the Korean Institute of Navigation and Port Research Conference
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• 2000.11a
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• pp.185-195
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• 2000

This pacer studied on the lateral motion and yaw motion of the gantry crane which is used for the automated container terminal with two driving wheel types. Though several problems are occcurred in driving of gantry crane, they are solved by the motion by the operators. But, if the gantry crane is unmanned, it is automatically controlled without any operation. There are two types, cone and flat t y pin driving wheel shape. In cone type, lateral vibration and yaw motion of crane are issued. In flat type, the collision between wheel-flange and rail or the fitting between wheel-flanges and rail is issued. Especially, the collision between wheel-flange and rail is a very critical problem in driving of unmanned gantry crane. To bring a solution to the problems, the lateral and yaw dynamic equations of the driving mechanism of gantry crane with two driving wheel types are derived. Then, we investigate the driving characteristics of gantry crane. And this study used PD(Proportional-Derivative) Controller to control the lateral displacement and yaw angle of the gantry crane. The simulation result of the driving mechanism using the Runge-Kutta Method is presented in this paper.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.545-550
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• 2001

This paper studied on the lateral motion and yaw motion of the gantry crane that is used for the automated container terminal. Though several problems are occurred in driving of the gantry crane, they are solved by the motion by the operators. But, if the gantry crane is unmanned, it is automatically controlled without any operator. There are two types, cone and flat type in driving wheel shape. In cone type, the lateral vibration and yaw motion of crane are issued. In flat type, the collision between wheel-flange and rail or the fitting between wheel-flanges and rail is issued. Especially, the collision between wheel-flange and rail is a very critical problem in driving of unmanned gantry crane. To bring a solution to the problems, the lateral and yaw dynamic equations of the driving mechanism of two driving wheels are derived. Then, we investigate the driving characteristics of gantry crane. In this study, the proposed controller, based on Model Based Controller, is used to control the lateral displacement and yaw angle of the gantry crane. And the availability of the proposed controller is showed through the comparison with the result of the proposed controller and PD controller. The simulation results of the driving mechanism, using the Runge-Kutta Method that is one of the numerical analysis methods, are presented in this paper.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.21 no.11
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• pp.554-560
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• 2020

In the manufacturing process of flat panel displays, a high-precision planar motion stage is used to position a specimen. Stages of this type typically use frictionless linear motors and air bearings, and laser interferometers. Real-time dynamic correction of the yaw motion error is very important because the inevitable yaw motion error of the stage means a change in the specimen orientation. Gantry control is generally used to compensate for yaw motion errors. Flexure units that allow rotational motion are applied to the stage to apply this method to a stage using an air-bearing guide. This paper proposes a method to improve the constant speed motion performance of a H-type XY stage equipped with air bearing and flexure units. When applying the gantry control to the stage, including the flexure units, the cause of the mutual ripple generated from the linear motors is analyzed, and adaptive learning control is proposed to compensate for the mutual ripple. A simulation was performed to verify the proposed method. The speed ripple was reduced to approximately the 22 % level. The ripple reduction was verified by simulating the stage state where yaw motion error occurs.

• Transactions of the Korean Society of Automotive Engineers
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• v.15 no.6
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• pp.120-127
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• 2007

This paper describes the development of a nonlinear observer for four wheel steer (4WS) vehicle. An observer is designed to estimate the vehicle variables difficult to measure directly. A brake yaw motion controller (BYMC), which uses a PID control method, is also proposed for controlling the brake pressure of the rear and inner wheels to enhance lateral stability. It induces the yaw rate to track the reference yaw rate, and it reduces a slip angle on a slippery road. The braking and steering performances of the anti-lock brake system (ABS) and BYMC are evaluated for various driving conditions, including straight, J-turn, and sinusoidal maneuvers. The simulation results show that developed ABS reduces the stopping distance and increases the longitudinal stability. The observer estimates velocity, slip angle, and yaw rate of 4WS vehicle very well. The results also reveal that the BYMC improves vehicle lateral stability and controllability when various steering inputs are applied.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2010.05a
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• pp.725-727
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• 2010

For simulation of Boat motion, pitch, motion element of roll and yaw direction could simulated. The combination of the marine use various multi sensor surveillance system technology with the development of servo motion control algorithm and gyro sensor in six freedom motion is implemented to analyze the movement response. The stabilization of the motion control is developed and Nano driving Precision Pan-Tilt/Gimbal system is obtained from the security positioning cameras with ultra high speed device is used to carry out the exact behavior of the device.

• Journal of Mechanical Science and Technology
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• v.14 no.8
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• pp.836-844
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• 2000

In this research any abnormal motion of a vehicle is detected by utilizing the difference between the reference and actual yaw velocities as sell as the information on vehicle slip angle and slip angular velocity. This information is then used as a criterion for execution of the yaw moment control. A yaw moment control algorithm based on the brake control is proposed for improving the directional stability of the vehicle. The controller executes brake controls to provide each wheel with adequate brake pressures, which generate the needed yaw moment. It is shown that the proposed yaw moment control logic can provide excellent cornering capabilities even on low friction roads. This active control scheme can prevent a vehicle from behaving abnormally, and can assist normal drivers in coping with dangerous situations as well as experienced drivers.

• Proceedings of the KSME Conference
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• 2000.04a
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• pp.487-492
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• 2000

Yaw moment control algorithm for improving stability of a vehicle in cornering is presented in this paper. A change of the yaw moment according to an increment in brake ship at each wheel is examined and reflected in the control algorithm. This control algorithm computes the target yaw velocity as the vehicle motion desired by the driver for directional stability control in cornering and it makes the actual yaw velocity follow the target one. The yaw moment control was achieved by brake slip control and simple brake slip control logic was introduced in this paper.

• International Journal of Automotive Technology
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• v.8 no.1
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• pp.49-57
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• 2007

This paper proposes a traction control system (TCS) that uses a sliding mode wheel slip controller and a PID throttle valve controller. In addition, a yaw motion controller (YMC) is also developed to improve lateral stability using a PID rear wheel steering angle controller. The dynamics of a vehicle and characteristics of the controllers are validated using a proposed full-car model. A driver model is also designed to steer the vehicle during maneuvers on a split ${\mu}$ road and double lane change maneuver. The simulation results show that the proposed full-car model is sufficient to predict vehicle responses accurately. The developed TCS provides improved acceleration performances on uniform slippery roads and split ${\mu}$ roads. When the vehicle is cornering and accelerating with the brake or engine TCS, understeer occurs. An integrated TCS eliminates these problems. The YMC with the integrated TCS improved the lateral stability and controllability of the vehicle.