• 제목/요약/키워드: X-Y stage

검색결과 1,186건 처리시간 0.026초

성능변수와 대용변수를 이용한 3단계 $\bar{X}$ 관리도의 경제적 설계 (Economic Design of Three-Stage $\bar{X}$ Control Chart Based on both Performance and Surrogate Variables)

  • 곽신석;이주호
    • 품질경영학회지
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    • 제44권4호
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    • pp.751-770
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    • 2016
  • Purpose: Two-stage ${\bar{X}}$ chart is a useful tool for process control when a surrogate variable may be used together with a performance variable. This paper extends the two-stage ${\bar{X}}$ chart to a three stage version by decomposing the first stage into the preliminary stage and the main stage. Methods: The expected cost function is derived using Markov-chain approach. The optimal designs are found for numerical examples using a genetic algorithm combined with a pattern search algorithm and compared to those of the two-stage ${\bar{X}}$ chart. Sensitivity analysis is performed to see the parameter effects. Results: The proposed design outperforms the optimal design of the two-stage ${\bar{X}}$ chart in terms of the expected cost per unit time unless the correlation between the performance and surrogate variables is modest and the shift in process mean is smallish. Conclusion: Three-stage ${\bar{X}}$ chart may be a useful alternative to the two-stage ${\bar{X}}$ chart especially when the correlation between the performance and surrogate variables is relatively high and the shift in process mean is on the small side.

평면 X-Y 스테이지의 초정밀 위치결정을 위한 최적 설계 및 제어시스템 개발 (The Development of Optimal Design and Control System for Ultra-Precision Positioning on Single Plane X-Y Stage)

  • 한재호;김재열;심재기;김창현;조영태;김항우
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2002년도 춘계학술대회 논문집
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    • pp.348-352
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    • 2002
  • a basis such as IT(Information Technology), NT(Nano Technology) and BT(Bio Technology). Recently, NT is applied to various fields that are composed of science, industry, media and semiconductor-micro technology. It has need of IT that is ultra-precision positioning technology with strokes of many hundreds mm and maintenance of nm precision in fields of ultra micro process, ultra precision measurement, photo communication part and photo magnetic memory. This thesis represents optimal design on ultra-precision positioning with single plane X-Y stage and development of artificial control system for adequacy of industrial demand. Also, dynamic simulation on global stage is performed by using ADAMS (Automated Dynamic Analysis of Mechanical System) for the purpose of grasping dynamic characteristic on user designed X-Y global stage. The error between displacements from micro stage and from FEM(Finite Element Method) is 3.53% by verifications of stability on micro stage and control performance. As maximum Von-mises stress on hinge of micro stage is 5.981kg/mm$^2$ that is 1.5% of yield stress, stability on hinge is secured. Preparing previous results, optimal design of micro stage can be possible, and reliance of results with FEM can be secured.

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단계적 연소의 $NO_x$ 저감에 대한 연구 (A Study of $NO_x$ Reduction in Stage Combustion)

  • 채재우;전영남;이운영
    • 대한기계학회논문집
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    • 제17권6호
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    • pp.1556-1571
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    • 1993
  • 본 연구에서는 소규모 실험장치(6.6kW)를 이용하여 $NO_x$ 저감방법 중에 가장 효율적인 방법이라 알려진 공기 및 연료의 단계적 연소법 (air and fuel staged combustion)을 이용하여, Fuel-N을 함유하고 있는 연료의 $NO_x$ 의 배출특성을 규명함 은 물론 최적 저 $NO_x$ 연소기술 향상방안을 제시하고자 한다.

고온 배기가스의 산소농도가 배기가스이용 확산화염의 $NO_{x}$ 발생에 미치는 영향 (The Effect of Oxygen Concentration in Hot Exhaust Gas on the $NO_{x}$ Emission of Diffusion Flame in Exhaust Gas)

  • 손화승;장시웅;최동수;김호영
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2001년도 춘계학술대회논문집D
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    • pp.115-120
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    • 2001
  • The present study examined the possibility of $NO_{x}$ reduction in the high temperature industrial furnaces. duct burner of gas turbine cogeneration and two-stage gas turbine combustor. The experimental study was carried out for the diffusion flame of second stage combustor with the variations of oxygen concentration and supplying rate of hot exhaust gas from first stage combustor. It also examined the flammability range and $NO_{x}$ formation of the second stage combustor in which the fuel is supplying into the mixture of oxygen hot exhaust gas from first stage combustor. The results show that the enrichment of oxygen and increase of exhaust gas lead to increase the $NO_{x}$ up to 50 ppm with 23% $O_{2}$ condition.

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VCM을 이용한 리소그래피용 레티클 스테이지의 설계 및 기구학적 해석 (Design and Kinematic Analysis of the Reticle Stage for Lithography Using VCM)

  • 오민택;김문수;김정한
    • 한국공작기계학회논문집
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    • 제17권3호
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    • pp.86-93
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    • 2008
  • This paper presents a design of the reticle stage for lithography using VCM(Voice Coil Motor) and kinematic analysis. The stage has three axes for X,Y,${\theta}_z$, those actuated by three VCM's individually. The reticle stage has cross coupled relations between X,Y,${\theta}_z$ axes, and the closed solution of the forward/inverse kinematics were solved to get an accurate reference position. The reticle stage for lithography was designed for reaching both high accuracy and long stroke, which was $0.1{\mu}m$ (X,Y)/ $1{\mu}rad({\theta}_z)$ accuracies and relatively long strokes about 2mm (X,Y) and 2 degrees(${\theta}_z$). Also this research presents a rotational compensation algorithm for the precision gap sensor for the stage. Simulation results show the overall performance of the whole algorithm and the improvement quantity of the rotational compensation algorithm.

기상요인에 의한 잎담배 수량예측 (Prediction of Tobacco Yield by Means of Meteorological Factors During Growing Season)

  • 이철환;변주섭
    • 한국연초학회지
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    • 제11권1호
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    • pp.27-39
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    • 1989
  • This study was conducted to determine the time and methods of predicting tobacco yield. by analysis of climatic factors in the period of tobacco season during 8 years from 1979 to 1986 at the Daegu district, south eastern part of Korean peninsular. The results obtained are summarised as follows: 1. Climatic factors of each month which have influence on tobacco yield were the amount of rainfall in May and sunshine hours in July. Among climatic factors at tobacco growth stages, the precipitation yield. But these meteorological factors had different effect on variety. 2. Between tobacco yields and climatic factors by even values of each month, tobacco yield was estimated by equations, flue cured tobacco :Y=190.6-5.230X1+ 0.474$\times$2 + 0.142X3(Xl : Minimum temperature of April, X2: Precipitation during May, X3:Sunshine duration on July), air cured tobacco : Y= 195.3-0.447Xl + 0.363$\times$2 + 0.l12$\times$3(Xl :Maximum temperature of May, X2:Precipitation during May. X3: Sunshine duration on July). While between tobacco yield and climatic factors at different growth stage, predicting equation of yield could be derived, flue cured tobacco : Y=205.8+0.510Xl +0.289$\times$2 + 0.305$\times$3 (Xl :Average temperature during the early growth stage, X2 :Precipitation during the early and maximum growth stage, X3 : Sunshine hours during the leaf and tips maturing stage), air cured tobacco Y=194.T-0.498Xl 10.615$\times$2+0.121$\times$3(Xl ;Maximum temperature during the transplanting time, X2 : Precipitation during the maximum growth stage, X3 : Sunshine hours during the leaf and tips maturing stage).

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기상요소에 따른 호프 (Humulus lupulus L.)의 수량 및 $\alpha$-Acid 함량 예측모형에 관한 연구 I. 생구화 수량 예측모형 (Modeling for Predicting Yield and $\alpha$-Acid Content in Hop (Humulus lupulus L.) from Meteorological Elements I. A Model for Predicting Fresh Cone Yield)

  • 박경열
    • 한국작물학회지
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    • 제33권3호
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    • pp.215-221
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    • 1988
  • 본 연구는 호프 주산지인 강원도 횡성에서 기상요소의 변화에 따른 수량 예측 모형식을 작성하고, 수량에 관여하는 주요 기상요소와 호프 생리적 작용관계를 구명하고자 1978년부터 1986년까지 9개년간의 년도별 호프 각 생육단계의 기상요소와 4년생 이상 호프의 년평균 수량을 농촌진흥청 VAX 11/785 전산기 AGRISP에 입력 분석하여 검토한 결과는 다음과 같다. 1. 수량 예측을 위하여 선택된 기상요소는 초기생장기(4월 21일~5월 20일)의 최저기온과 평균기온, 화아분화기(5월 21일~6월 20일)의 최고기온, 개화기(6월 11일~7월 10일)의 최고기온, 구화형성기(7월 1일~7월 31일)의 일조시수, 구솨 성숙기(7월 21일~8월 20일)의 강수량이었다. 2. 초기 생장기의 최고기온( $X_3$)과 개화기의 최고기온( $X_4$)은 수량 감소에 영향을 주었고, 초기 생장기의 평균기온( $X_{5}$ )과 구화형성기의 일조시수( $X_{6}$)는 수량 증가에 영향을 주었다. 3. 수량예측의 중선형 회귀모형식은 Y=6042.846-17.665 $X_1$-0.919 $X_2$-96.538 $X_3$-138.105 $X_4$+86.910 $X_{5}$$X_{6}$로 MS $E_{p}$=25.258, $R_{p}$$^{2}$=0.9991, $R_{ap}$ $^{2}$ =0.9962, $C_{p}$=7.00이었다.00이었다.

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초정밀 평면 X-Y 스테이지의 시뮬레이션 및 제어성능 평가 (Simulation and Control performance evaluation of Ultra-Precision Single Plane X-Y Stage)

  • 곽이구;김재열;한재호;김영석;안재신;노기웅
    • 한국공작기계학회:학술대회논문집
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    • 한국공작기계학회 2002년도 춘계학술대회 논문집
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    • pp.422-428
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    • 2002
  • In this study, actuator, sensor, guide, power transmission element and control method are considered for ultra-precision positioning apparatus. Through previous process, single plane X-Y stage with ultra-precision positioning is manufactured. Global stage for the purpose of materialization with robust system, is combined by using AC servo motor and ball screw and rolling guide. And ultra-precision positioning system is developed by micro stage with elastic hinge type and piezo element. global servo and micro servo for the purpose of materialization positioning accuracy with nm(nanometer) are controlled simultaneously by using incremental encoder and laser interferometer as displacement measurement sensor. Through previous process, ultra-precision positioning system (100mm stroke and ${\pm}$ 10nm positioning accuracy) with single plane X-Y stage are materialized.

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마이크로 스텝핑 평판 스테이지의 외란 예측기의 개발 (Development of the disturbance observer for micro-stepping X-Y stage)

  • 김정한
    • 한국공작기계학회논문집
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    • 제14권3호
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    • pp.23-31
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    • 2005
  • The purpose of this study is to design a disturbance observer for a micro-stepping stage to eliminate the disturbances from cables, friction, mass unbalance of the moving part, etc. The disturbance observer is designed for air-floating X-Y precision micro-stepping X-Y stage which widely used in stepper machine or semiconductor manufacturing systems. The micro-stepping X-Y stage has a weak point of the variation of characteristics with position locations, which caused by various disturbances. In this study, it will be described that a simple and high throughput disturbance observer algorithm improves the dynamic error and settling time of the micro-stepping stage.

초정밀 평면 X-Y 스테이지의 시뮬레이션 및 제어성능 평가 (Simulation and Control performance evaluation of Ultra-Precision Single Plane X-Y Stage)

  • 박기형;김재열;곽이구
    • 한국공작기계학회논문집
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    • 제11권5호
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    • pp.65-72
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    • 2002
  • In this study, actuator, sensor, guide, power transmission element and control method are considered for ultra-precision positioning apparatus. Through previous process, single plane X-Y stage with ultra-precision positioning is manufactured. Global stage for the purpose of materialization with robust system, is combined by using AC servo motor and ball screw and rolling guide. And ultra-precision positioning system is developed by micro stage with elastic hinge type and piezo element. global servo and micro servo for the purpose of materialization positioning accuracy with nm(nanometer) are controlled simultaneously by using incremental encoder and laser interferometer as displacement measurement sensor. Through previous process, ultra-precision positioning system(100mm stroke and $\pm$ l0nm positioning accuracy) with single plane X-Y stage are materialized.