Transactions of the Korean Society of Machine Tool Engineers (한국공작기계학회논문집)

The Korean Society of Manufacturing Technology Engineers (한국생산제조학회)
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Development of the disturbance observer for micro-stepping X-Y stage

마이크로 스텝핑 평판 스테이지의 외란 예측기의 개발

  • 김정한 (서울산업대학교 기계설계자동화공학부, 정밀기계기술연구소)
  • Published : 2005.06.01
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Abstract

The purpose of this study is to design a disturbance observer for a micro-stepping stage to eliminate the disturbances from cables, friction, mass unbalance of the moving part, etc. The disturbance observer is designed for air-floating X-Y precision micro-stepping X-Y stage which widely used in stepper machine or semiconductor manufacturing systems. The micro-stepping X-Y stage has a weak point of the variation of characteristics with position locations, which caused by various disturbances. In this study, it will be described that a simple and high throughput disturbance observer algorithm improves the dynamic error and settling time of the micro-stepping stage.

Keywords

References

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