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Development of the disturbance observer for micro-stepping X-Y stage  

Kim Jung-Han (서울산업대학교 기계설계자동화공학부, 정밀기계기술연구소)
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Transactions of the Korean Society of Machine Tool Engineers / v.14, no.3, 2005 , pp. 23-31 More about this Journal
Abstract
The purpose of this study is to design a disturbance observer for a micro-stepping stage to eliminate the disturbances from cables, friction, mass unbalance of the moving part, etc. The disturbance observer is designed for air-floating X-Y precision micro-stepping X-Y stage which widely used in stepper machine or semiconductor manufacturing systems. The micro-stepping X-Y stage has a weak point of the variation of characteristics with position locations, which caused by various disturbances. In this study, it will be described that a simple and high throughput disturbance observer algorithm improves the dynamic error and settling time of the micro-stepping stage.
Keywords
Disturbance observer; Micro stepping; Sawyer motor;
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