• Title/Summary/Keyword: Wet Oxidation

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Characteristics of reoxidation of nitried oxide for gate dielectric of charge trapping NVSM (전하트랩형 NVSM의 게이트 유전막을 위한 질화산화막의 재산화특성에 관한 연구)

  • 이상은;한태현;서광열
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.11 no.5
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    • pp.224-230
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    • 2001
  • The characteristics of $NO/N_2O$ annealed reoxidized nitrided oxide being studied as super thin gate oxide and gate dielectric layers of Non-Volatile Semiconductor Memory (NVSM) were investigated by Dynamic Secondary Ion Mass Spectrometry (D-SIMS), Time-of-Flight Secondary Ion Mass Spectrometry (ToF-SIMS), and Auger Electron Spectroscopy (AES). The specimen was annealed by $NO/N_2O$ after initial oxide process and then rcoxidized for nitrogen redistribution in nitrided oxide. Out-diffusion of incorporated nitrogen during the wet oxidation in reoxidation process took place more strongly than that of the dry oxidation. It seems to indicate that hydrogen plays a role in breaking the Si N bonds. As reoxidation proceeds, incorporated nitrogen of $NO/N_2O$ annealed nitrided oxide is obsen-ed to diffuse toward the surface and substrate at the same time. ToF-SIMS results show that SiON species are detected at the initialoxide interface, and Si,NO species near the new $Si_2NO$ interface that formed after reoxidation. These SiON and $Si_2NO$ species most likely to relate to the origin of the state of memory charge traps in reoxidized nitrided oxide, because nitrogen dangling bonds of SiON and silicon dangling bonds of $Si_2NO$ are contained defects associated with memory effect.

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Fabrication of Stress-balanced $Si_{3}N_{4}/SiO_{2}/Si_{3}N_{4}$ Dielectric Membrane (스트레스균형이 이루어진 $Si_{3}N_{4}/SiO_{2}/Si_{3}N_{4}$ 유전체 멤브레인의 제작)

  • Kim, Myung-Gyoo;Park, Dong-Soo;Kim, Chang-Won;Kim, Jin-Sup;Lee, Jung-Hee;Lee, Jong-Hyun;Sohn, Byung-Ki
    • Journal of Sensor Science and Technology
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    • v.4 no.3
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    • pp.51-59
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    • 1995
  • Stress-balanced flat 150 nm-$Si_{3}N_{4}$/300 nm-$SiO_{2}$/150 nm-$Si_{3}N_{4}$ dielectric membrane on silicon substrate has been fabricated. Analyses of stress-deflection and stress-temperature, and visual inspection for the strain diagnostic test patterns were performed in order to characterize stress properties of the membrane. The $SiO_{2}$ layers sandwiched between two $Si_{3}N_{4}$ layers were deposited by three different techniques(PECVD, LPCVD, and APCVD) for the purpose of investigating the dependence of stress on the deposition methods. Some extent of tensile stress in the membrane was always observed regardless of the deposition methods, however it could be balanced against silicon substrate by post-wet oxidation in $1,150^{\circ}C$. Stress-temperature characteristics of the membranes showed that APCVD-LTO was better as mid-$SiO_{2}$ layer than PECVD - or LPCVD - $SiO_{2}$ when there was no oxidation process.

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Developmemt of Rice Husk Pellets as Bio-filter Media of Bio Scrubber Odor Removal System (왕겨펠렛 생물담체 개발 및 이를 이용한 bio scrubber형 악취제거 시스템 성능평가)

  • Bae, Jiyeol;Han, Sangjong;Park, Ki Ho;Kim, Kwang-Soo
    • Journal of Korean Society for Atmospheric Environment
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    • v.34 no.4
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    • pp.554-566
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    • 2018
  • The rice husk contains nutrients which can be easily utilized by microorganisms, and also has a water retaining ability, which played a crucial part in enabling it to become a biofilter media. In this study, we evaluated the applicability of rice husk pellet bio-scrubber as a microbiological carrier. The pelletization experiment of rice husk as a biological media was performed using PVA and EVA binder. Also, the feasibility tests of rice husk as a biological media for odor removal were carried out in order to know whether rice-husk contains useful components as a media for microbiological growth or not. Lastly, a combined test for odor gas absorption and biological oxidation was conducted using a lab scale bio-filter set-up packed with rice-husk pellets as wet-scrubber. The major components of the rice husk were carbon, hydrogen, nitrogen, and oxygen, while carbon acted as the main ingredient which comprised up to 23.00%. The C : N : P ratio was calculated as 45 : 1 : 2. Oxygen uptake rate, yield and decay rate of the rice husk eluent was calculated to be $0.0049mgO_2/L/sec$, 0.24 mgSS/mgCOD and 0.004 respectively. The most stable form of rice husk pellets was produced when the weight of the rice husk, EVAc, PVAc, and distilled water was 10 : 2 : 0.2 : 10. The prepared rice husk pellets had an apparent density of 368 g/L and a porosity of 59.00% upon filling. Dry rice husks showed high adsorption capacity for ammonia gas but low adsorption capacity for hydrogen sulfide. The bio-filter odor removal column filled with rice husk pellets showed more than 99.50% removal efficiency for NH3 and H2S gas. Through the analysis of circulation water, the prime removal mechanism is assumed to be the dissolution by water, microbial nitrification, and sulfation. Finally, it was confirmed that the microorganisms could survive well on the rice husk pellets, which provided them a stable supply of nutrients for their activity in this long-term experiment. This adequate supply of nutrients from the rice husk enabled high removal efficiency by the microorganisms.

Supercritical Water Oxidation of Anionic Exchange Resin (초임계수 산화를 이용한 음이온교환수지 분해)

  • Han, Joo-Hee;Han, Kee-Do;Do, Seung-Hoe;Kim, Kyeong-Sook;Son, Soon-Hwan
    • Journal of Korean Society of Environmental Engineers
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    • v.28 no.5
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    • pp.549-557
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    • 2006
  • The characteristics of supercritical water oxidation have been studied to decompose the waste anionic exchange resins which were produced from a power plant. The waste resins from a power plant were mixture of anionic and cationic exchange resins. The waste anionic exchange resins had been separated from the waste resins using a solid-liquid fluidized bed. It was confirmed that the cationic exchange resins were not included in the separated anionic exchange resins by the elemental and thermogravimetric analysis. A slurry of anionic exchange resins which could be fed continuously to a supercritical water oxidation apparatus by a high pressure pump was prepared using a wet ball mill. Although the COD of liquid effluent had been reduced more than 99.9% at 25.0 MPa and $500^{\circ}C$ within 2 min, the total nitrogen content was reduced only 41%. The addition of nitric acid to the slurry could reduce the total nitrogen content in treated water. The central composite design as a statistical desist of experiments had been applied to optimize the conditions of decomposing anionic resin slurry by means of the COD and total nitrogen contents in treated waters as the key process output variables. The COD values of treated waters had been reduced sufficiently to $99.9{\sim}100%$ af the reaction conditions of $500{\sim}540^{\circ}C$, 25.0 MPa within 2 min. The effects of temperature and nitric acid concentration on COD were not significant. However, the effect of nitric acid concentration on the total nitrogen was found to be significant. The regression equation for the total nitrogen had been obtained with nitric acid concentration and the coefficient of determination($r^2$) was 95.8%.

Studies on the Rapid Discrimination of Yellow Pigments Colored on Yellow Croakers and Natural Yellow Pigment of Croakers (참조기의 천연색소와 인위적으로 착색된 황색색소류 판별법에 관한 연구)

  • Kim, Hee-Yun;Hong, Jin-Hwan;Kim, Dong-Sul;Han, Sang-Bae;Lee, Eun-Ju;Lee, Jeung-Seung;Kang, Kil-Jin;Chung, Hyung-Wook;Song, Kyung-Hee;Park, Hye-Kyung;Park, Jong-Seok;Kwon, Yong-Kwan;Chin, Myung-Shik;Park, Hee-Ok;Oh, Sae-Hwa;Shin, Il-Shik;Lee, Chang-Kook;Park, Hee-Yul;Ha, Sang-Chul;Jo, Jae-Sun
    • Korean Journal of Food Science and Technology
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    • v.34 no.6
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    • pp.977-983
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    • 2002
  • This study was performed to establish the precise and rapid method to distinguish croakers through the pigment analysis of colored imported white croakers for adultration. We surveyed the coloring behaviors, extraction test by water and organic solvent and using pigments such as targeting, curcumine, and azo dye products. The pigment of yellow croaker is not stained on wet cloth or tissue which is rubbed on epidermis of yellow croaker and was not eluted in water extraction test, while adulterated pigments were easily extracted by water and acetone, but edible diluted yellow, Yellow No. 4 and Yellow No. 5 were not extracted. Reactive pigment was detected easily by extraction with water and dispersed pigment was also detected by extraction test. As a result of discoloring characteristics of carotene having similar structure to yellow croaker and azo dye by oxidation and reduction, azo dyes were not discolored by oxidation with sodium percarbonate or peracetic acid but that were discolored by oxidation with Fenton reagent after 1hr and by hypochlorite promptly. On the other hand, carotenes were not discolored by sodium precarbonate and Fenton reagent but discolored by sodium hypochlorite after 2 hr and by peracetic acid promptly. Azo dyes were discolored by reduction with sodium hydrosulfite and sodium carbonate but carotenes were not discolored by these reagents. This discoloring test was applicable to detect adulterated pigments and other marine product.

Optimized ultra-thin tunnel oxide layer characteristics by PECVD using N2O plasma growth for high efficiency n-type Si solar cell

  • Jeon, Minhan;Kang, Jiyoon;Oh, Donghyun;Shim, Gyeongbae;Kim, Shangho;Balaji, Nagarajan;Park, Cheolmin;Song, Jinsoo;Yi, Junsin
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.308-309
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    • 2016
  • Reducing surface recombination is a critical factor for high efficiency silicon solar cells. The passivation process is for reducing dangling bonds which are carrier. Tunnel oxide layer is one of main issues to achieve a good passivation between silicon wafer and emitter layer. Many research use wet-chemical oxidation or thermally grown which the highest conversion efficiencies have been reported so far. In this study, we deposit ultra-thin tunnel oxide layer by PECVD (Plasma Enhanced Chemical Vapor Deposition) using $N_2O$ plasma. Both side deposit tunnel oxide layer in different RF-power and phosphorus doped a-Si:H layer. After deposit, samples are annealed at $850^{\circ}C$ for 1 hour in $N_2$ gas atmosphere. After annealing, samples are measured lifetime and implied Voc (iVoc) by QSSPC (Quasi-Steady-State Photo Conductance). After measure, samples are annealed at $400^{\circ}C$ for 30 minute in $Ar/H_2$ gas atmosphere and then measure again lifetime and implied VOC. The lifetime is increase after all process also implied VOC. The highest results are lifetime $762{\mu}s$, implied Voc 733 mV at RF-power 200 W. The results of C-V measurement shows that Dit is increase when RF-power increase. Using this optimized tunnel oxide layer is attributed to increase iVoc. As a consequence, the cell efficiency is increased such as tunnel mechanism based solar cell application.

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Development of Organic Compound Fertilizer Based on Treated Human Waste (분뇨잔사(糞尿殘渣)를 이용(利用)한 유기종합비료(有機綜合肥料) 개발(開發))

  • Shin, Jae-Sung;Seong, Ki-Seog;Lim, Dong-Kyu
    • Korean Journal of Soil Science and Fertilizer
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    • v.17 no.1
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    • pp.55-59
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    • 1984
  • An organic compound fertilizer was manufactured using wet oxidation human waste as principal source of phosphorus and organic matter. The waste was treated with sulfuric and glutamic acids to increase the available and water-soluble $P_2O_5$ contents. The treatment of 0.1 N sulfuric acid with 24 hours curing was best way in recovering the maximum percentage of $P_2O_5$ originally in the waste. The particle size distribution of trial product varied considerably in the amount of glutamic acid used for granulation. The number of relatively large fertilizer particles was increased as the amount of glutamic acid was increased. The granule crushing strength was generally high in large granules in which 12.5 weight percent of glutamic acid were used for granulation. The trial product showed high moisture absorption due to its porous structure and chemical makeup.

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A review on thermochemical pretreatment in Lignocellulosic bioethanol production (목질계 바이오에탄올 제조공정에서 열화학적 전처리에 관한 고찰)

  • Ko, Jae-Jung;Yun, Sang-Leen;Kang, Sung-Won;Kim, Seog-Ku
    • Journal of the Korea Organic Resources Recycling Association
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    • v.16 no.1
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    • pp.79-88
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    • 2008
  • The production of bioethanol, which is one of the alternative fuel, cause the various problem such as agflation in human society. As a substitute for the feedstock, lignocellulosic biomass have a big potential. However, bioethanol production with cellulosic material is not commercialized due to high cost. Thermochemical pretreatment to improve the rate of enzyme hydrolysis and increase the recovery of fermentable sugar, is required in order to achieve the cost down in bioethanol production. In this study, various problems and technologies for pretreatment is introduced. Acid hydrolysis, alkali hydrolysis, steam explosion, organosolv process, ammonia explosion, and wet oxidation pretreatment remove lignin and hemicellulose, and reduce cellulose crystallinity. Optimization of pretreatment process on various sources of lignocellulosic biomass such as softwood, hardwood, and straw should be performed.

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Photocatalytic removal of NOx using TiO2-coated zeolite

  • Mendoza, Joseph Albert;Lee, Dong Hoon;Kang, Joo-Hyon
    • Environmental Engineering Research
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    • v.21 no.3
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    • pp.291-296
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    • 2016
  • Application of photocatalytic nanoparticles has been recently gaining an increased attention as air purifying material for sustainable urban development. The present work reports the photocatalytic removal of gaseous phase nitrogen oxides ($NO_x$) using $TiO_2$-coated zeolite to be applied as a filter media for the urban green infrastructure such as raingardens. The $TiO_2$-coated zeolite was synthesized by simple wet chemistry method and tested in a continuous-flow photo-reactor for its removal efficiency of $NO_x$ under different conditions of the weight percentage of $TiO_2$ coated on the zeolite, and gas retention time. The removal efficiency of $NO_x$ in general increased as the weight percentage of $TiO_2$ coated on the zeolite increased up to 15-20%. Greater than 90% of $NO_x$ was removed at a retention time of one minute using the $TiO_2$-coated zeolite ($TiO_2$ weight percentage = 20%). Overall, $TiO_2$-coated zeolite showed greater efficiency of $NO_x$ removal compared to $TiO_2$ powder probably by providing additional reaction sites from the porous structure of zeolite. It was presumed that the degradation of $NO_x$ is attributed to both the physical adsorption and photocatalytic oxidation that could simultaneously occur at the catalyst surface.

Effect of Mole Drainage on Soybean Growth in Paddy Field(Jeonbug Series, Aeric Halaquepts) (논의 두더지 배수(排水) 효과(效果)와 콩 재배(栽培))

  • Jun, Jang-Hyeop;Yang, Chang-Hyu;Lee, Kyung-Bo;Nam, Jeong-Kwon
    • Korean Journal of Soil Science and Fertilizer
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    • v.27 no.4
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    • pp.296-302
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    • 1994
  • To alter the paddy field to upland, mole drainages were constructed under 30cm of the surface of(Jeon buk silt loam) which is not appropriate for cultivation of upland crops. Intervals of the moles were 50cm, 100cm and 150cm and diverted to upland for soybean cultivation. By construction of the mole drainage, about 75% to 45% of the rainfall was drained and the ground water level was maintained below 40cm. After a year of drainage, the blocky surface was changed to granular or nutty structure which is common in upland fields. Oxidation was progressed to the deep layer because of soil dryness. Soybean yield were increased by 11% to 22% in the mole drained plots, but wet injury was occurred in the nontreated check plot with relatively poor growth status.

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