• 소성∙가공
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• 제12권7호
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• pp.640-646
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• 2003

The nanoprobe based on lithography, mainly represented by SPM based technologies, has been recognized as potential application to fabricate the surface nanostructures because of its operational versatility and simplicity. The objective of the work is to suggest new mastless pattern fabrication technique using the combination of machining by nanoindenter and KOH wet etching. The scratch option of the nanoindenter is a very promising method for obtaining nanometer scale features on a large size specimen because it has a very wide working area and load range. Sample line patterns were machined on a silicon surface, which has a native oxide on it, by constant load scratch (CLS) of the Nanoindenter with a Berkovich diamond tip, and they were etched in KOH solutions to investigate chemical characteristics of the machined silicon surface. After the etching process, the convex structure was made because of masking effect of the affected layer generated by nano-scratch. On the basis of this fact, some line patterns with convex structures were fabricated. Achieved patterns can be used as a mold that will be used for mass production processes such as nanoimprint or PDMS molding process. All morphological data of scratch traces were scanned using atomic force microscope (AFM).

• 한국정밀공학회지
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• 제28권6호
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• pp.701-708
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• 2011

Although Titanium material has superior properties, it belongs to difficult-to-machine materials. The present research applies magnetic abrasive finishing to precision machining of internal-face of titanium pipes, and analyzed & assessed the influence of grinding conditions on magnetic abrasive effects through the removed amount and surface roughness of materials. There was the influence on grinding properties according to change of rotational speed, a total input of mixed powder and an input of grinding liquid, and when the total input, rotational speed and ratio of electrolytic iron versus magnetic abrasives are 8g and 1000rpm, it was most advantageous in aspects of surface roughness and material removal amount, and the grinding liquid remarkably improved the surface roughness and material removal amount only with addition of trace amounts of light oil rather than dry machining conditions. And a result of considering the influence on grinding properties by using an inert gas (Argon gas) for improving grinding properties of the internal-face of titanium pipe, the present research has obtained improvement effects in the removal amount and surface roughness through utilization of an inert gas.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.351-354
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• 2004

This work presents a simple and cost-effective approach for maskless fabrication of positive-tone silicon master for the replica molding of hyperfine elastomeric channel. Positive-tone silicon masters were fabricated by a maskless fabrication technique using the combination of nanoscratch by Nanoindenter ⓡ XP and XOH wet etching. Grooves were machined on a silicon surface coated with native oxide by ductile-regime nanoscratch, and they were etched in a 20 wt％ KOH solution. After the KOH etching process, positive-tone structures resulted because of the etch-mask effect of the amorphous oxide layer generated by nanoscratch. The size and shape of the positive-tone structures were controlled by varying the etching time (5, 15, 18, 20, 25, 30 min) and the normal loads (1, 5 mN) during nanoscratch. Moreover, the effects of the Berkovich tip alignment (0, 45$^{\circ}$) on the deformation behavior and etching characteristic of silicon material were investigated.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2000년도 춘계학술대회논문집 - 한국공작기계학회
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• pp.441-446
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• 2000

Although the net-shape molding of composites is generally recommended, molded composites frequently required cutting or grinding due to the dimensional inaccuracy for precision machine elements. During the composite machining operations such as cutting and grinding, the temperature at the grinding area may increase beyond the allowed limit due to the low thermal conductivity of composites, which might degrade the matrix of composite. Therefore, in this work, the temperature at the grinding point during surface grinding of carbon fiber epoxy composite was measured. The grinding temperature and surface roughness were also measured to investigate the surface grinding characteristics of the composited. The experiments were performed both under dry and wet grinding conditions with respect to cutting speed, feed speed, depth of cut and stacking angle. From the experimental investigation, the optimal conditions for the composite plain grinding were suggested.

• 한국정밀공학회지
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• 제19권9호
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• pp.59-65
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• 2002

Grinding temperature between a grinding wheel and a workpiece surface, rising rapidly during a machining operation, has bad effects on a surface integrity such as the burning, the residual stress and the crack. In this study, the temperature distribution was obtained briefly by the finite element method and the grinding temperature of a workpiece varying with the grinding condition was measured experimentally. For obtaining the grinding temperature, a thermocouple method was applied. Three thermocouples were inserted in a surface of each workpiece. Changed grinding conditions were the depth of cuts, the feedrate, the dry and wet grinding, the up and down grinding and the number of pieces.

• 한국레이저가공학회지
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• 제14권2호
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• pp.13-16
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• 2011

We fabricated the Fresnel zone plate using femtosecond laser lithography-assisted micro-machining, which is a combined process of nonlinear lithography and wet etching. We investigated the focusing properties by launching a 632.8nm wavelength He-Ne laser beam into the zone plate. The spot size of the primary focal point was $27{\mu}m$ and the intensity of focal point was 0.565W/$cm^2$.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2005년도 추계학술대회 논문집
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• pp.182-185
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• 2005

Indentation pattern and line pattern were machined on borosilicate(Pyrex 7740 glass) surface using the combination of mechanical machining by $Nanoi-indenter\circledR$ XP and HF wet etching, and a etch-mask effect of the affected layer of the nano-scratched and indented Pyrex 7740 glass surface was investigated. In this study, effects of indentation and scratch process with etching time on the morphologies of the indented and scratched surfaces after isotropic etching were investigated from an angle of deformation energies.

• 한국생산제조학회지
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• 제9권6호
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• pp.65-70
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• 2000

Although the net-shape molding of composites is generally recommended, molded composites frequently requires cutting or grinding due to the dimensional inaccuracy for precision machine elements. During the composite machining operations such as cutting and grinding, the temperature at the grinding area may increase beyond the allowed limit due to the low thermal conductivity of composites, which might degrade the matrix of composite. Therefore, in this work, the temperature at the grinding point during surface grinding of carbon fiber epoxy composite was measured. The grinding temperature and surface roughness were also measured to investigate the surface grinding characteristics of the composites. The experiments were performed both under dry and wet grinding conditions with respect to cutting speed, feed speed, depth of cut and stacking angle. From the experimental investigation, the optimal conditions for the composite surface grinding were suggested.

• 한국공작기계학회논문집
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• 제18권1호
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• pp.1-12
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• 2009

Presently, the semiconductor industry has the chronic problem. In the semiconductor industry, it has the semiconductor wafer, a package, the optical filter cut by using the saw blade, the mold, a laser etc. The cutting technique has the difficulty due to the rising of the production cost by the wearing of mold, the poor quality problem due to generated heat at the moment of cutting procedure and curve cutting etc. The goal of this time of national research and development project is develop the apparatus for solving the problem that the existing cutting technique has. The technology is so called waterjet abrasive method. This technology will be mainly applied to cut a semiconductor package and a wafer. Two important things to be considered are ripple effect(in other words, the scale of a market) and simplicity of an application.

• 한국음향학회:학술대회논문집
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• 한국음향학회 2002년도 하계학술발표대회 논문집 제21권 1호
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• pp.209-212
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• 2002

The wear process of end mill is a so complicated process that a more reliable technique is required for the monitoring and controling the tool life and its performance. This research presents a new tool wear monitoring method based on the sound signal generated on the machining. The experiment carried out continuous-side-milling for 4 cases using the high-speed steel slot drill under wet condition. The sound pressure was measured at 0.5m from the cutting zone by a dynamic microphone, and was analyzed at frequency domain. The tooth passing frequency appears as a harmonics form, and end mill wear is related with the first harmonic. It can be concluded from the result that the tool wear is correlate with the intensity of the measured sound at tooth passing frequency estimation of end mill wear using sound is possible through frequency analysis at tooth passing frequency under the given circumstances.