Laser Solutions (한국레이저가공학회지)

Korean Society of Laser Processing (한국레이저가공학회)
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Fabrication of Fresnel zone plate with femtosecond laser lithography technology

펨토초 레이저 리소그라피 기술을 이용한 Fresnel zone plate 제작 연구

  • Sohn, I.B. (Precision Optic Lab., Advanced Photonics Research Institute, GIST) ;
  • Noh, Y.C. (Precision Optic Lab., Advanced Photonics Research Institute, GIST) ;
  • Ko, M.J. (Korea Institute of Industrial Technology)
  • 손익부 (광주과학기술원 고등광기술연구소 미세광학연구실) ;
  • 노영철 (광주과학기술원 고등광기술연구소 미세광학연구실) ;
  • 고명진 (한국생산기술연구원)
  • Received : 2011.04.01
  • Accepted : 2011.06.21
  • Published : 2011.06.30
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Abstract

We fabricated the Fresnel zone plate using femtosecond laser lithography-assisted micro-machining, which is a combined process of nonlinear lithography and wet etching. We investigated the focusing properties by launching a 632.8nm wavelength He-Ne laser beam into the zone plate. The spot size of the primary focal point was $27{\mu}m$ and the intensity of focal point was 0.565W/$cm^2$.

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