• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2003년도 춘계학술대회논문집
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• pp.448-451
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• 2003

This study describes a new maskless nano-fabrication technique of Si (100) using the combination of nanometer-scale mechanical forming by nano-indenter XP and KOH wet etching. First the surface of a Si (100) specimen was machined by using the nano-machining system, which utilizes the mechanism of the nano-indenter XP. Next, the specimen was etched by KOH solution. After the etching process, the convex structure or deeper hole is made because of masking or promotion effect of the affected layer generated by nano-machining. On the basis of this interesting fact, some sample structures were fabricated.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2003년도 춘계학술대회
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• pp.1344-1348
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• 2003

It is generally known to be difficult to etch a surface of a transparent material such as fused silica by conventional laser ablation in which the surface is simply irradiated with a laser beam. A lot of studies have been done to provide a method capable of efficiently etching transparent materials without defects such as cracks. One of the promising methods or the micro-machining of optically transparent materials is laser induced etching. In this study, micro-drilling of fused silica by laser induced wet etching was conducted. KrF excimer and YAG laser were used as light sources. Acetone solution pyrene and ethanol solution of rhodamine were used as etchant.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2000년도 춘계학술대회논문집 - 한국공작기계학회
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• pp.34-38
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• 2000

The trend of cutting process today goes toward higher precision and higher efficiency. Many thermal/frictional troubles occur in high-speed machining of die and mold steels.In this paper, the thermal characteristics are evaluated in high sped ball end-milling of hardened steel(HRc42). Experimental work is performed on the effect of cutting environments on tool life and cutting temperature. Cutting environments involve dry, wet(20bar), compressed chilly air at -9$^{\circ}C$, compressed chilly air at -35$^{\circ}C$. The measuring technique of cutting temperature using implanted thermocouple is used. The cutting temperature is about 79$0^{\circ}C$, 35$0^{\circ}C$ and 54$0^{\circ}C$ in dry, wet and compressed chilly air at +9$^{\circ}C$, respectively. The tool life for compressed chilly air at -9$^{\circ}C$ is longer than all other cutting environments in experiment.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2005년도 춘계학술대회 논문집
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• pp.395-400
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• 2005

Nano-scale fabrication of silicon substrate based on the use of atomic force microscopy (AFM) was demonstrated. A specially designed cantilever with diamond tip, allowing the formation of damaged layer on silicon substrate by a simple scratching process, has been applied instead of conventional silicon cantilever for scanning. A thin damaged layer forms in the substrate at the diamond tip-sample junction along scanning path of the tip. The damaged layer withstands against wet chemical etching in aqueous KOH solution. Diamond tip acts as a patterning tool like mask film for lithography process. Hence these sequential processes, called tribo-nanolithography, TNL, can fabricate 2D or 3D micro structures in nanometer range. This study demonstrates the novel fabrication processes of the micro cantilever and diamond tip as a tool for TNL using micro-patterning, wet chemical etching and CVD. The developed TNL tools show outstanding machinability against single crystal silicon wafer. Hence, they are expected to have a possibility for industrial applications as a micro-to-nano machining tool.

• 한국정밀공학회지
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• 제23권8호
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• pp.39-46
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• 2006

Nano-scale fabrication of silicon substrate based on the use of atomic force microscopy (AFM) was demonstrated. A specially designed cantilever with diamond tip, allowing the formation of damaged layer on silicon substrate by a simple scratching process, has been applied instead of conventional silicon cantilever for scanning. A thin mask layer forms in the substrate at the diamond tip-sample junction along scanning path of the tip. The mask layer withstands against wet chemical etching in aqueous KOH solution. Diamond tip acts as a patterning tool like mask film for lithography process. Hence these sequential processes, called tribo-nanolithography, TNL, can fabricate 2D or 3D micro structures in nanometer range. This study demonstrates the novel fabrication processes of the micro cantilever and diamond tip as a tool for TNL using micro-patterning, wet chemical etching and CVD. The developed TNL tools show outstanding machinability against single crystal silicon wafer. Hence, they are expected to have a possibility for industrial applications as a micro-to-nano machining tool.

• 한국정밀공학회지
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• 제21권4호
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• pp.24-31
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• 2004

The objective of this work is to suggest a mastless pattern fabrication technique using the combination of machining by Nanoindenter(equation omitted) XP and HF wet etching. Sample line patterns were machined on a borosilicate surface by constant load scratch (CLS) of the Nanoindenter(equation omitted) XP with a Berkovich diamond tip, and they were etched in HF solution to investigate chemical characteristics of the machined borosilicate surface. All morphological data of scratch traces were scanned using atomic force microscope (AFM).

• 한국기계가공학회지
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• 제14권1호
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• pp.70-77
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• 2015

This paper develops and evaluates a mechanical machining process which involves drilling on PVS material. According to the material, two treatment experiments were conducted, one involving drilling in a wet condition or using a lubricant and one involving drilling in a dry condition with no lubricant. Drilling in a dry condition showed better performance in terms of the cutting time than in the wet condition. Otherwise, the wet condition has several advantages. The lubricant influenced the burr diameter size and minimized the temperature on the surface of the work piece. During the wet condition drilling process, a smaller burr diameter size was noted as compared to the dry condition. The temperature showed a linear correlation with the drill bit size, where a least-square analysis provided an $R^2$valuewhichexceeded 0.95. The wet condition required more cutting time than the dry condition. In this condition, the water provides a lubrication effect. A thin layer between the cutting edges and the surface of the work piece is formed. The chip formation is affected by the drilling depth. The color on the tips of the chips was darker than in the initial condition. No correlation between the drilling depth and the bore roughness was noted, but the variation of the cutting speed or the RPM influenced the roughness of the bore. The optimum cutting speed ranged from 40 RPM to 45 RPM in the condition which provided the finest roughness surface.

• 한국정밀공학회지
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• 제31권1호
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• pp.35-42
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• 2014

Recently, in industry field, many researchers are looking for ways to reduce the use of lubricant because of environmental and economical reasons. MQL lubrication is one of many lubrication technologies. The aim of this study is to evaluate the machinability considering lubrication methods and taper angles of workpieces for turning of SCM440. Workpieces of two shapes such as workpiece with and without taper angle are used. And two lubrication methods such as MQL and Wet have been considered. And cutting force and surface roughness are used as characteristic values. Cutting speed, feed rate, injection angle and distance are used as design parameters. The characteristic values were statistically analyzed by Taguchi method. From the results, main effects plot and importance of each parameter according to conditions are analyzed. Finally, this study has been suggested the optimum machining conditions according to the lubrication methods, machining conditions and shape of workpiece.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 추계학술대회 논문집
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• pp.326-329
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• 2005

As a flexible method to fabricate sub-micrometer patterns, Focused Ion Beam (FIB) instrument and Self-Assembled Monolayer (SAM) resist are introduced in this work. FIB instrument is known to be a very precise processing machine that is able to fabricate micro-scale structures or patterns, and SAM is known as a good etch resistance resist material. If SAM is applied as a resist in FIB processing fur fabricating nano-scale patterns, there will be much benefit. For instance, low energy ion beam is only needed for machining SAM material selectively, since ultra thin SAM is very sensitive to $Ga^+$ ion beam irradiation. Also, minimized beam spot radius (sub-tens nanometer) can be applied to FIB processing. With the ultimate goal of optimizing nano-scale pattern fabrication process, interaction between SAM coated specimen and $Ga^+$ ion dose during FIB processing was observed. From the experimental results, adequate ion dose for machining SAM material was identified.

• 소성∙가공
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• 제13권4호
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• pp.326-333
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• 2004

The nanoprobe based on lithography, mainly represented by SPM based technologies, has been recognized as a potential application to fabricate the surface nanosctructures because of its operational versatility and simplicity. However, nanoprobe based on lithography itself is not suitable for mass production because it is time a consuming method and not economical for commercial applications. One solution is to fabricate a mold that will be used for mass production processes such as nanoimprint, PDMS casting, and others. The objective of this study is to fabricate the silicon stamper for PDMS casting process by a mastless fabrication technique using the combination of nano/micro machining by Nanoindenter XP and KOH wet etching. Effect of the Berkovich tip alignment on the deformation was investigated. Grooves were machined on a silicon surface, which has native oxide on it, by constant load scratch (CLS), and they were etched in KOH solutions to investigate chemical characteristics of the machined silicon surface. After the etching process, the convex structures was made because of the etch mask effect of the mechanically affected layer generated by nanoscratch. On the basis of this fact, some line patterns with convex structures were fabricated. Achieved groove and convex structures were used as a stamper for PDMS casting process.