• Air Cleaning Technology
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• v.17 no.4 s.67
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• pp.39-57
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• 2004

첨단산업으로 불리는 반도체, LCD, PDP, 유기EL(OLED) 등의 생산 공정은 고도의 청정상태를 요구하며, 때문에 이들의 생산공정 중 대부분이 클린룸 내에서 이루어진다. 클린룸 내에서의 주요공정은 크게 박막형성(Layering), 노광(Photo Lithography), 식각(Etching) 등 3가지 공정으로 나눌 수 있으며, 반도체 제조공정의 경우 특별히 도핑(Doping) 공정이 추가된다. 오염물질을 함유하는 클린룸 배기는 일반적으로 산, 알칼리, Toxic(PFCs, Flammable), VOC 등으로 분류하며, 각각의 배기는 각 배기특성에 맞는 오염제어 장치를 통해, 정화된 후, 대기로 방출된다. 산, 알칼리 배기는 일반적으로 최종 단계에서 중앙집중식 습식스크러버에 의해 흡수, 중화 처리되며, VOC의 경우 농축기(Concentrator) & 축열식 열 산화장치(RTO) 설비에 의해 연소 처리된다. 하지만 CVD공정으로부터의 배기가 주를 이루는 Toxic배기의 경우, 다량의 PFCs(과불소화합물) 가스를 함유하고 있는 이유로, 대부분 클린룸 내부에 P.O.U(Point of use) 처리장치가 설치되며, P.O.U에 의해 1차 처리된 후 최종적으로 중앙집중식 습식스크러버를 거쳐 대기로 방출된다. 알칼리배기의 주성분으로는 암모니아($NH_3$), HMDS (Hexa Methyl DiSilazane), TMAH (Tetra Methyl Ammonium Hydroxide), LGL, CD 등이며 흡수액에 황산(Sulfuric Acid)용액을 공급, 중화처리하고 있다. 탄소성분을 먹이로 하는 미생물의 번식에 의한 막힘 문제를 제외하고는 큰 문제가 없다. 하지만 Toxic배기 및 산배기의 경우 처리효율이, 가스흡수 이론에 의한 계산결과와 비교할 때, 매우 저조하게 나타나는 효율부족 현상을 겪고 있으며, 이는 잔여 PFCs 가스성분 및 반응에어로졸, 응축에어로졸 등의 영향으로 추정하고 있다. 최근 Toxic 배기의 경우, P.O.U 설비를 Burn & Wet type으로 변경하여, 배기 중 PFCs 및 반응에 에어로졸($SiO_2$)의 농도를 원천적으로 감소시키는 노력이 진행 중이다. 산배기의 경우, 산결로 현상에 의한, 응축에어로졸이 문제가 되고 있으나 내식열교환기(Anti-Corrosive Heat Exchanger), 하전액적스크러버 시스템(Charged Droplets Scrubber System), Wet ESP(Wet Electrostatic Procipitator) 등의 도입을 통해 문제해결을 위한 노력을 경주하고 있다.

• Journal of Conservation Science
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• v.7 no.2
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• pp.54-59
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• 1998

The purpose of this study was to clarify the performance of mourning clothes from Konggi Provincial Museum, to identify the fiber of these clothes, and investigate the washing effect by wet cleaning. Shapes of mourning clothes were studied, and some ingredients of non fibrous extracted matter were analyzed by FT-IR spectroscopy to clarify the performance of mourning clothes. Microscope examination, melting test, and stain test were used for the identification of the fiber. SEM was used to confirm the effect of washing after mourning clothes washed by wet cleaning added anionic detergent, sodiumdodecylbenzenesulfonate (LAS). The performance of these clothes was mourning cloth, not mummy cloth as results of analyses to the clothes' shapes and extract ingredients. The extract ingredients were carbohydrate, alkyl alcohol, and aldehyde. They didn't have any nitrogen compounds and fatty acids. The fiber identification showed this fiber was hemp. The effect of washing was high as the surface of fiber was clean and linear after wet washing.

• Korean Chemical Engineering Research
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• v.45 no.2
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• pp.203-207
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• 2007

In this paper efficient method for particle removal from silicon wafers by usage of HF and ozone was studied. It was found that at least 0.3 vol% concentration of HF was required for particle removal and removal efficiency increased with the application of megasonic in ozonated water. Additional cleaning with minute amount of ammonia (0.01 vol%) after HF/Ozone step showed over 99% in removal efficiency. It is proposed that the superior cleaning efficiency of HF-Ozone-ammonia is due to micro-etching of silicon surface and impediment of particle re-adsorption in alkali environment. Compared to SC-1 cleaning method micro roughness has also been slightly improved. Therefore it is expected that HF-ozone-ammonia cleaning method is a viable alternative to the conventional wet cleaning methods.

• Journal of Conservation Science
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• v.33 no.2
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• pp.97-106
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• 2017

The purpose of this study was to investigate the characteristics and detergency of natural surfactants for the cleaning of excavated fabrics. For this purpose, SDS, a synthetic surfactant, was selected as the control, and five types of natural surfactants, namely, LES, apple wash, tea saponin, cornacopa, and coco betaine were selected. The structures of the surfactants were confirmed by FT-IR spectroscopy analysis, and the characteristics of the surfactants were determined by measuring the pH and surface tension. In addition, detergency testing was carried out on four artificially soiled fabrics and fragments of excavated fabrics. From the results, apple wash, tea saponin, and cornacopa were found to be as good as SDS in terms of detergency in the cleaning of artificially soiled fabrics, and the detergency of tea saponin and coco betaine was found to be good for cleaning excavated fabrics. Therefore, considering the safety and detergency of detergents, among natural surfactants, tea saponin is found to be most suitable for the cleaning of excavated fabrics.

• Journal of the Microelectronics and Packaging Society
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• v.28 no.2
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• pp.45-50
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• 2021

As the difficulty of flip chip products increases, there is a growing interest in the material of flux, which is safe from the solder wetting and reliability. In the case of no clean flux, there is merit in terms of process efficiency because there is no cleaning process. But Cu migration and delamination can be occurred if the residue remains after the reflow process. In this study, major element materials, solvent and activator, are changed and confirmed effect of non-wet and reliability in the package environment. Stability of materials were secured through storage stability evaluation, and we found out non-wet zero materials through the application of two types of solvent and activator with different boiling point and the increase of activator content. After reliability test, no delamination was found in the plane analysis, which secured the final composition of low residue flux.

• 보존과학연구
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• s.33
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• pp.125-148
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• 2012

The Octagonal nine storied pagoda of Woljeongsa Temple consists mainly of granite with the rockforming minerals quartz, plagioclase, microcline, and biotite. The surface of the stone stupa is light brown that has been discolored by the rust from the metal ornament and aids. The surface of the stylobate and roof stone is colonized by biological contaminants. Therefore, a comprehensive deterioration diagnosis was carried out in this study, and conservation treatment was conducted. It was proven that the $Fe^{2+}$ yield increases depending on the count of poultice used with oxalic acid, but the $Mg^{2+}$, $Al^{3+}$, and $Ca^{2+}$ yields were marginal following the preliminary test. Therefore, the use of poultice is an effective way of removing the rust, and only marginally influences the rock. The biological contaminants were removed through dry cleaning, and the soil located under the contaminants was removed through wet cleaning. Based on this, the dry and wet cleaning of all the biological contaminants, and the use of poultice with oxalic acid, were done to remove the rust. For the conservation treatment of the metal ornament, the rust was removed through physical cleaning, and anticorrosion treatment was performed on the iron ornament using Renaissance wax and copper ornament by BTA.

• Proceedings of the Materials Research Society of Korea Conference
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• 2003.03a
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• pp.126-126
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• 2003

유기트랜지스터에 관한 연구는 1980년 이후부터 시작되었으나 근래에 들어 전 세계적으로 본격적인 연구가 진행되고 있다. 제작공정이 간단하고 비용이 저렴하며 충격에 의해 깨지지 않고 구부리거나 접을 수 있는 전자 회로 기판이 미래의 산업에 필수적인 요소가 될 것으로 예상되고 있으며 이러한 요구를 충족시킬 수 있는 유기트랜지스터의 개발은 아주 중요한 연구분야로 대두되고 있다. 본 연구에서는 표면처리에 따른 contact angle, I-V 특성곡선, 표면 morphology 등의 결과로부터 dry cleaning 한 것이 wet cleaning한 것보다 왜 좋은지를 논하고자 한다. 먼저 N-type SiO$_2$ 기판을 이용하여 back면의 oxide층을 제거한 후, back gate용으로 사용하기 위하여 sputtering장치로 Au/Cr을 증차하였다. 그리고 기판에 앞면을 photolithography 공정을 이용하여 Au/Cr를 1000$\AA$ 증착 하여 source-, drain-eldctrode를 제조하였다. 그리고 SiO$_2$ 기판의 표면처리를 달리하여 그 위에 유기박막을 증착하여 특성을 비교하였다.

• The Research Journal of the Costume Culture
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• v.11 no.6
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• pp.902-912
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• 2003

The purpose of this research was two-folds; first, to investigate the type of soil contaminated in the Hunsang excavated from the Milchang-gun burial of Mapo for the purpose of proposing the adequate washing method, second, to utilize the chemical degradation result obtained from the previous research to identify the natural dye source used in the Hunsang textile. The application of KS K0251 test showed that the soil was more oleophilic than hydrophilic thus indicating that wet cleaning was more adequate that dry cleaning for the removal of Hunsang soil. The GC-MS result of the Hunsang extraction showed dimethyl phthalate and 2,4-di-tert-butylphenol as its degradation product and these coincided with the degradation products from the alizarin standard data of previous research. The comparison of the two suggested that it is likely that Hunsang was dyed with madder which has alizarin as its major chromophore.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1999.11a
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• pp.617-620
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• 1999

To reduce the consumption of chemicals and ultra pure water(UPW) in cleaning process used in device manufacturing, we proposed wet processes that use electrolytic ionized water(EIW), which is generated by electrolysis of a diluted electrolyte solution or UPW and systemically investicate the EIW\`s characteristics. EIW\`s pH values are increased in cathode chamber and decreased in anode chamber according to the electrolysis time and its varied ratio is reduced with time increasement. The variation of pH and ORP is increased accordin to the applied voltage until critical voltage. But more than that voltage, the variation is decreased because of ion\`s scattering effect. When electrolyte is added, the effects of electrolysis is increased because electrolyte acts as catalyst. But when the density of electrolyte is increased more than critical value, ion\`s flowage is obstructed and the effects of electrolysis is decreased.

• Fibers and Polymers
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• v.6 no.4
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• pp.318-321
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• 2005

Demand for the fabric wipes is growing continuously. Wipes in industry are used for cleaning purpose. Cleaning involves rubbing action, so it is very important to know how much frictional force is encountered during the cleaning action. In this study the effects of normal load, sliding speed on frictional characteristics of nonwoven and woven wipes, both dry and wetted with different liquids, against glass and floor tile surfaces have been reported. With the increase in the normal load the coefficient of friction goes on decreasing for both nonwoven and woven wipes and this trend is observed in both dry and wet wipes. The coefficient of friction of both nonwoven and woven wipes against glass surface is in general higher than the floor tile surface. The wipes wetted with water shows an increase in coefficient of friction as compared to dry sample, but there is reduction in the coefficient of friction when the wipe samples are wetted with vegetable oil. In case of dry wipes, the coefficient of friction in case of nonwoven wipe is higher than the woven wipe. In case of woven wipes, the ranges of coefficient of friction either due to change in liquid type, normal load or sliding speed are in general smaller than that in case of nonwoven fabrics.