• 한국진공학회지
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• 제4권S2호
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• pp.79-82
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• 1995

$N^+$ beam modified diffusion barriers have been proposed for Cu metallization . The crystalline phases of W and Ti thin films change from polycrytalline to amorphous phase by the N ion implantation of 1~$3\times 10^{17}$atoms/$\textrm{cm}^2$. The comparison between these amorphized diffusion barriers and the conventional W and TiN films shows that the amorphized W and Ti diffusion barriers are superior to the conventional w and TiN for protecting the Cu diffusion barriers are superior to the conventional W and TiN for protecting the Cu diffusion at the annealing temperature range $600^{\circ}C$~$800^{\circ}C$ for 30min. This is a worldwidely new and excellent result on the high temperature thermal stability of diffusion barrier.

• 한국재료학회지
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• 제3권5호
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• pp.466-475
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• 1993

전면증착법에 의한 W공정에서 부착특성고양층으로 사용되는 TiN막에 대한 CVD W막의 부착특성을 인장법(pulling method)과 스크래치법(scratch method)을 사용하여 조사하고, 주사전자현미경과 반사도측정에 의한 표면거칠기측정, 응력측정 및 SIMS depth profiling 등에 의하여 그 원인을 분석하였다. 스퍼터링법으로 형성한 TiN막상에 바로 W막을 증착한 경우와 TiN막을 열처리한 후에 W막을 증착한 경우 간에 두 막간의 부착특성은 큰 차이를 보였다. 전자의 경우가 후자의 경우보다 부착특성이 더 우수한 것으로 나타났는데, 이것은 열처리하지 않은 TiN막이 열처리한 TiN막에 비해 표면이 더 거칠고, 응력수준이 더 낮으며, 열처리한 TiN막내에는 산소성분이 존재하는 반면, 열처리 하지 않은 TiN막내에는 산소성분이 거의 들어있지 않기 때문이다. 또한 TiN막 두께가 증가함에 따라 응력의 증가로 인하여 TiN막에 대한 W막의 부착강도가 저하되었다.

• 한국분말재료학회지
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• 제11권2호
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• pp.165-170
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• 2004

Growth behavior of two different types of grains, faceted and rounded, in a liquid matrix has been studied in the (75WC-25TiCN)-30Co system. Powder samples were sintered above the eutectic temperature for various times under a carbon saturated condition. (Ti,W)(C,N) grains with a rounded shape and WC grains with a faceted shape coexisted in the same Co based liquid. With increasing sintering time, the average size of (Ti.W)(C,N) grains increased continuously and very large WC grains appeared. The growth of rounded (Ti,W)(C,N) grains followed a cubic law, r^3-r^3_0$=kt, where r is the average size of the grains, $r_0$ the initial average size, k the proportionality constant and t the sintering time. indicating a diffusion-controlled growth. On the other hand, the growth of the faceted WC grains resulted in a bimodal grain size distribution, showing an abnormal grain growth. These observations show that the growth behavior of different types of grains is governed by their shape, faceted or rounded, even in the same liquid matrix.

• 한국세라믹학회지
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• 제22권2호
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• pp.17-24
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• 1985

In the composition of $Pb(Mg_{0.15} W_{0.15})Ti_{0.35}-Zr_{0.35}O_3$ the effect of particle size on PbO vaporization were measured, . The initial step of discontinuous vaporization of unreated PbO during the calcining process was depended on the particle size. All additives $La_2O_3Nb_2O_5$ and $Al_2O_3$ inhibited the grain growth of the composition $Pb(Mg_{0.15} W_{0.15})Ti_{0.35}-Zr_{0.35}O_3$ +2wt% excess PbO. The dielectric and piezoelectric properties of the composition $Pb(Mg_{0.15} W_{0.15})Ti_{0.35}-Zr_{0.35}O_3$ were improved by the addition of 2wt% excess PbO and proper additive. The electromechanical planar coupling factor of 0.65 and mechnical quality factor of 390 could be obtained by adding 5wt% $Nb_2O_5$ to the composition 2wt% excess PbO+$Pb(Mg_{0.15} W_{0.15})Ti_{0.35}-Zr_{0.35}O_3$.

• 센서학회지
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• 제15권6호
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• pp.386-390
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• 2006

This paper describes the ohmic contact formation of polycrystalline 3C-SiC films deposited on thermally grown Si wafers. In this work, a TiW (titanium tungsten) film as a contact material was deposited by RF magnetron sputter and annealed with the vacuum process. The specific contact resistance (${\rho}_{c}$) of the TiW contact was measured by using the C-TLM (circular transmission line method). The contact phase and interfacial reaction between TiW and 3C-SiC at high-temperature as also analyzed by XRD (X-ray diffraction) and SEM (scanning electron microscope). All of the samples didn't show cracks of the TiW film and any interfacial reaction after annealing. Especially, when the sample was annealed at $800^{\circ}$ for 30 min., the lowest contact resistivity of $2.90{\times}10{\Omega}cm^{2}$ was obtained due to the improved interfacial adhesion. Therefore, the good ohmic contact of polycrystalline 3C-SiC films using the TiW film is very suitable for high-temperature MEMS applications.

• 한국세라믹학회:학술대회논문집
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• 한국세라믹학회 2003년도 추계총회 및 연구발표회 초록집
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• pp.189.2-189
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• 2003

• Nuclear Engineering and Technology
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• 제51권1호
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• pp.190-197
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• 2019

W-K-TiC alloys with different titanium carbide concentrations (0.05, 0.1, 0.25, 0.5, 1, 2) wt.% were fabricated through Mechanical Alloying and Spark Plasma Sintering. The effects of the addition of nano-scaled TiC particles on the relative density, Vickers micro-hardness, microstructure, crystal information, thermal shock resistance, and tensile strength were investigated. It is revealed that the doped TiC nano-particles located at the grain boundaries. The relative density and Vickers micro-hardness of W-K-TiC alloys was enhanced with TiC addition and the highest Vickers micro-hardness is 731.55. As the TiC addition increased from 0.05 to 2 wt%, the room-temperature tensile strength raised from 141 to 353 MPa. The grain size of the W-K-TiC alloys decreased sharply from $2.56{\mu}m$ to 330 nm with the enhanced TiC doping. The resistance to thermal shock damage of W-K-TiC alloys was improved slightly with the increased TiC addition.

• 한국환경과학회지
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• 제16권6호
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• pp.683-688
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• 2007

In this study, N doped $TiO_2$ (TiO-N) thin film was prepared by DC magnetron sputtering method to show the photocatalytic activity in a visible range. Various gases (Ar, $O_2\;and\;N_2$) were used and Ti target was impressed by 1.2 kW -5.8 kW power range. The hysteresis of TiO-N thin film as a function of discharge voltage wasn't observed in 1.2 and 2.9kW of applied power. Cross sections and surfaces of thin films by FE-SEM were tiny and dense particle sizes of both films with normal cylindrical structures. XRD pattern of $TiO_2$ and TiO-N thin films was appeared by only anatase peak. Red shift in UV-Vis adsorption spectra was investigated TiO-N thin film. Photoactivity was evaluated by removal rate measurement of suncion yellow among reactive dyes. The photodegradation rate of $TiO_2$ thin film on visible radiation was shown little efficiency but TiO-N was about 18%.

• Bulletin of the Korean Chemical Society
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• 제30권1호
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• pp.107-113
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• 2009

This study investigated the decomposition activities of toluene on 10 mol% Al-W-incorporated mesoporous titano (15 mol %) silicates. The mesopore sizes observed in the transmission electron microscopy images ranged from 2.0 to 5.0 nm, and the pores were irregular on the addition of 10 mol% Al or W ions, but changed to regular hexagonal forms with the simultaneous additions of Al and W. The X-ray photon spectroscopy results showed a shift of the special peak for Ti2p in Al-incorporated mesoporous titanosilicates to a stronger binding energy compared to those of mesoporous titanosilicates and Al-incorporated mesoporous titanosilicates. Three O1s peaks in the spectra of the Al and W coexisted samples were observed at 530.5 and 531.7, 533, and 533.7eV, which were assigned to $Ti-Os\;in\;TiO_2\;and\;Ti_2O_3,\;Si-O\;in\;SiO_2\;and\;Al-O\;in\;Al_2O_3$, respectively. The toluene molecules desorbed at lower temperatures over W-incorporated mesoporous titanosilicates, and the amounts of toluene desorbed were also small; however, Al-incorporated mesoporous titanosilicates adsorbed much more toluene, particular over $Al_7.5-W_2.5-Ti_15-Si_75$. The photocatalytic decomposition of toluene was more enhanced over $Al_7.5-W_2.5-Ti_15-Si_75$ than over Al- or W-incorporated mesoporous titanosilicates only.

• 한국분말재료학회지
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• 제24권1호
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• pp.41-45
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• 2017

The effects of the heat treatment temperature and of the atmosphere on the dehydrogenation and hydrogen reduction of ball-milled $TiH_2-WO_3$ powder mixtures are investigated for the synthesis of Ti-W powders with controlled microstructure. Homogeneously mixed powders with refined $TiH_2$ particles are successfully prepared by ball milling for 24h. X-ray diffraction (XRD) analyses show that the powder mixture heat-treated in Ar atmosphere is composed of Ti, $Ti_2O$, and W phases, regardless of the heat treatment temperature. However, XRD results for the powder mixture, heat-treated at $600^{\circ}C$ in a hydrogen atmosphere, show $TiH_2$ and TiH peaks as well as reaction phase peaks of Ti oxides and W, while the powder mixture heat-treated at $900^{\circ}C$ exhibits only XRD peaks attributed to Ti oxides and W. The formation behavior of the reaction phases that are dependent on the heat treatment temperature and on the atmosphere is explained by thermodynamic considerations for the dehydrogenation reaction of $TiH_2$, the hydrogen reduction of $WO_3$ and the partial oxidation of dehydrogenated Ti.