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A STUDY ON THE RELATIONSHIP BETWEEN PLASMA CHARACTERISTICS AND FILM PROPERTIES FOR MgO BY PULSED DC MAGNETRON SPUTTERING

  • Nam, Kyung H.;Chung, Yun M.;Han, Jeon G.
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2001.11a
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    • pp.35-35
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    • 2001
  • agnesium Oxide (MgO) with a NaCI structure is well known to exhibit high secondary electron emission, excellent high temperature chemical stability, high thermal conductance and electrical insulating properties. For these reason MgO films have been widely used for a buffer layer of high $T_c$ superconducting and a protective layer for AC-plasma display panels to improve discharge characteristics and panel lifetime. Up to now MgO films have been synthesized by lE-beam evaporation, Molecular Beam Epitaxy (MBE) and Metalorganic Chemical Vapor Deposition (MOCVD), however there have been some limitations such as low film density and micro-cracks in films. Therefore magnetron sputtering process were emerged as predominant method to synthesis high density MgO films. In previous works, we designed and manufactured unbalanced magnetron source with high power density for the deposition of high quality MgO films. The magnetron discharges were sustained at the pressure of O.lmtorr with power density of $110W/\textrm{cm}^2$ and the maximum deposition rate was measured at $2.8\mu\textrm{m}/min$ for Cu films. In this study, the syntheses of MgO films were carried out by unbalanced magnetron sputtering with various $O_2$ partial pressure and specially target power densities, duty cycles and frequency using pulsed DC power supply. And also we investigated the plasma states with various $O_2$ partial pressure and pulsed DC conditions by Optical Emission Spectroscopy (OES). In order to confirm the relationships between plasma states and film properties such as microstructure and secondary electron emission coefficient were analyzed by X-Ray Diffraction(XRD), Transmission Electron Microscopy(TEM) and ${\gamma}-Focused$ Ion Beam (${\gamma}-FIB$).

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Light and Scanning Electron Microscopic Study on the Pelvic Epithelium of the Sheep Kidney (양(羊)의 신우상피에 대한 광학 및 주사전자현미경적 연구)

  • Kim, J.;Oh, S.J.;Chung, J.W.
    • Applied Microscopy
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    • v.15 no.2
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    • pp.98-110
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    • 1985
  • This study was performed to clarify the morphological structures of the epithelia of the renal papilla, renal pelvis and ureter of the sheep (Ovis aries L.) through the light and scanning electron microscopes, Tissue specimens were taken from the renal papilla (common renal papilla and peripelvic column) and the renal pelvis (pelvis proper and pelvic pouch) of the kidney and the ureter. For the light microscopy, tissue blocks were fixed in 10 % neutral buffered formalin and embedded in paraffin wax, serially sectioned at a thickness of $6{\mu}m$. These sections were stained with hematoxylin-eosin and periodic acid-Schiff reaction. For the scanning electron microscopy, tissue blocks were prefixed in 1% glutaral-dehyde-1.5% paraformaldehyde solution and postfixed in 1% osmium tetroxide solution, dehydrated in graded alcohol, transferred to isoamyl acetate, and then dried by the critical point dryer (Polaron E 3000). These dried tissues were coated with gold and observed with a scanning electron microscope (JSM-35C), The results were as follows: The apex of the common renal papilla was lined with simple columnar epithelium having many microvilli on its luminal surface. Lateral portion of the papilla was lined with stratified epithelium $2{\sim}3$ layers thick, and its superficial cells were microvillar cells having many microvilli. The epithelium lining the peripelvic column was $1{\sim}2$ layers thick. The superficial layer was made of the microvillar cells, but a few microplica cells were appeared in the region near the pelvic pouch. The epithelium of the pelvic pouch was $1{\sim}2$ layered transitional type, and its superficial cells were microplica cells. The epithelia of the pelvis proper and ureter were $4{\sim}6$ layered transitional type, and their superficial cells were typical facet cells existing many round depressions and ridges of cell membranes of the luminal side.

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Flocculation of Fine Particles of Kaolin in Water (고령토 미립자의 수중 응집 특성)

  • Shin, Hong-Jun;Shin, Kang-Ho;Cho, Dong-Sung
    • Resources Recycling
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    • v.5 no.3
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    • pp.3-8
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    • 1996
  • The settling charaderist~aU I flocculation of Dae-mynng kaolin were studicd by measurrng the electropharetic mnhilbty and the light transmittance of suspensions with various concentrations of floccul;mnts, hydragcn inn and ~ I ~ c t r ~ l y t e s . Isoelectric points of kaolin occurred at pH 3.2. The fine particle cnagulation of kaolin \\'as achieved must cffcctivcly a1 the isoelcctric points. The optinurn flocculation of Accofloc was occurred when thc concentration w;o 4 ppm. and thc coagulation became greater in thc order of an~onic,n al>~aniacn d catiomc. The flocculation of Accofloc(C-4S2) \\,as more effective lhan that of Superfloc(C-577) No cffeectiveness was found whcn NaCl was added, hut flocculations oi nonionic and anionic were more effective when NaCl and flacculants werc added.

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Study on working gas ratio dependance of BST thin film (작업가스비에 따른 BST 박막의 특성)

  • Cui, Ming-Lu;Kwon, Hak-Yong;Park, In-Chul;Kim, Hong-Bae
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2004.07a
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    • pp.393-396
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    • 2004
  • 본 논문에서는 완충층용 MgO 박막을 P-type(100)Si 기판위에 작업가스 $Ar:O_2=80:20$, RF 파워 50W, 기판온도 $400^{\circ}C$, 10mtorr의 작업진공에서 $500{\AA}$ 증착하였다. 제작된 MgO/Si 기판위에 RF Magnetron sputtering법으로 작업가스 $Ar:O_2$의 비율을 90:10, 80:20, 70:30으로 변화하면서 $BST(Ba_{0.5}Sr_{0.5}TiO_3)$ 박막을 약 $2000{\AA}$ 증착하였다. XRD 측정결과 작업가스비의 변화에 관계없이(110)BST와 (111)BST 피크만이 관찰되었으며 작업가스 $Ar:O_2=80:20$에서 가장 양호한 결정성을 나타내었다. I-V 측정결과 인가전계 ${\pm}100kV/cm$에서 $10^{-7}A/cm^2$이하의 양호한 누설전류 특성을 보여주고 있으며 C-V 측정결과 작업가스 $Ar:O_2$의 비율 90:10, 80:20, 70:30에서의 비유전율은 각각 283, 305, 296으로서 작업가스비 80:20에서 제작된 박막의 특성이 가장 우수하였다. 작업가스비 80:20에서 제작된 박막의 SEM 측정결과 결정이 성장되었음을 확인할 수 있었고 그레인의 크기는 약 10nm였다.

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Case Study on the Tunnel Collapse at the Shallow Depth (NATM터널 저토피 구간에서의 막장붕락 사례연구)

  • Baek Ki-Hyun;Roh Jong-Ryun;Kim Yong-Il;Cho Sang-Kook;Hwang Nag-Youn
    • Tunnel and Underground Space
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    • v.15 no.2 s.55
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    • pp.102-110
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    • 2005
  • ○ ○ tunnel that is located at Iksan - Jangsu freeway ○ ○, has collapsed during construction at the valley with shallow depth. Although, the site investigations, such as TSP, drilling exploration and so of indicated the presence of discontinuities in this section. The RMR was upgraded and the construction were carried out because that not only actual rock qualities were relatively good during construction but also the tunnel foe was stabilized. However, the tunnel was collapsed at the same time blasting of full face, and surface and underground water was infiltrated due to the settlement of the upper part of the tunnel face. To restore the collapsed section, 3-d tunnel stability analysis was performed and suitable reinforcement methods were chosen. The cavity of the upper tunnel face was stabilized by means of UAM and ALC injection. And the settlement was restored using L.W grouting method.

Characteristics of Large Area ITO/PET Fabricated by Vacuum Web Coater (진공 웹코터로 제작된 대면적 ITO/PET의 특성 연구)

  • Kim, Ji-Hwan;Park, Dong-Hee;Kim, Jong-Bin;Byun, Dong-Jin;Choi, Won-Kook
    • Korean Journal of Materials Research
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    • v.17 no.10
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    • pp.516-520
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    • 2007
  • Indium tin oxide, which is used as transparent conducting layer in flexible device, is deposited on PET film by a magnetron sputtering in 300 mm wide roll-to-roll process (vacuum web coating). Sheet resistance, specific resistance and transmittance is differed by sputtering parameters such as working pressures, oxygen partial pressure, and thickness of ITO layer. ITO layer is deposited about 90 nm at roll speed of 0.24 m/min and its sputtering power is 3 kW. From the XRD spectrum deposited ITO layer is verified as amorphous. Under working pressure varied from $3{\times}10^{-4}\;Torr$ to $2{\times}10^{-3}\;Torr$, sheet resistance is lowest at the working pressure of $1{\times}10^{-3}\;Torr$ and its value is from $110\;{\Omega}/{\square}$ to $260\;{\Omega}/{\square}$ at the thickness of 90 nm. Oxygen partial pressure also varies sheet resistance and is optimized at the regime from 0.2% ($1.8{\times}10^{-6}\;Torr$) to 0.6% ($6{\times}10^{-6}\;Torr$). In this oxygen partial pressure sheet resistance is lower than $150\;{\Omega}/{\square}$. As ITO layer thickness increases, sheet resistance decreases down to $21\;{\Omega}/{\square}$ and specific resistance is about $7.5{\times}10.4{\Omega}cm$ in 340 nm thickness ITO layer. Transmittance is measured at the wavelength of 550 nm and is about 90% for 180 nm thickness ITO/PET.

A Study on the Leakage Evaluation for Power Plant Valve Using Infrared Thermography Method (적외선열화상에 의한 발전용 밸브 누설명가 연구)

  • Lee, Sang-Guk
    • Journal of the Korean Society for Nondestructive Testing
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    • v.30 no.2
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    • pp.110-115
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    • 2010
  • This study was conducted to estimate the feasibility using thermal image measurement that is applicable to internal leak diagnosis for the power plant valve. Abnormal heating of valve surface associated with high temperature steam f10w toward valve outlet side in the condition of low temperature is a primary indicator of leakage problems in high temperature and pressure valves. Thermal imaging enables to see the invisible thermal radiation that may portend impending damage before their condition becomes critical. When steam flow in valve outlet side in the condition of low temperature is converted into heat transmitted through the valve body due to the internal leakage in valve. The existence of abnormally increasable leakage rate in the valve will result in abnormally high levels of heat to be generated that can be quickly identified with a thermal image avoiding energy loss or damage of valve component. From the experimental results, it was suggested that the thermal image measurement could be an effective way to precisely diagnose and evaluate internal leak situation of valve.

Development of Pretreatment and Mixed Culture Processes for Plant Originated Lactic Acid to Produce a Functional Lactic acid Beverage (대두 전처리 공정 및 식물 유래 유산균 혼합 배양에 의한 기능성 유산균 음료 생산기술 개발)

  • Cho, Eun-Kyung;Cho, Hyung-Yong;Kim, Byeong-Cheol;Shin, Hae-Hun;Cho, Seok-Cheol;Kook, Moo-Chang;Pyun, Yu-Ryang
    • The Korean Journal of Food And Nutrition
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    • v.24 no.1
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    • pp.117-123
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    • 2011
  • This study was conducted to establish process conditions for plant-originated lactic acid production using a mixed culture of plant originated lactic acid bacteria, Lactobacillus sakei B2-16, and Lactobacillus plantarum P23, which were isolated from kimchi, and Bacillus subtilis, which was TP6 isolated from Denjang. Soybean medium was pretreated for 10 minutes at $110^{\circ}C$ and hydrolyzed with 0.2%(w/v) cellulase at $55\sim60^{\circ}C$ for at least 2 hrs. The quality of the final fermentation product was influenced by the inoculation ratio of the Lactobacillus sakei B2-16, Lactobacillus plantarum P23, and Bacillus subtilis TP6. The optimum microorganism inoculation ratio was 1:0.7:0.3, Lactobacillus sakei B2-16: Lactobacillus plantarum P23: Bacillus subtilis TP6, respectively. The sensory characteristics of the product were a refreshing sourness and a soft flavor.

The Effects of Taurine and $\beta$-alanine on Blood Glucose and Blood Lipid Concentrations in Insulin-treated Diabetic Rats (실험적 당뇨쥐의 인슐린 치료시 타우린과 베타알라닌이 혈당 및 혈중 지질대사에 미치는 영향)

  • 장경자
    • Korean Journal of Community Nutrition
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    • v.4 no.1
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    • pp.103-110
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    • 1999
  • The purpose of this study was to determine the effects of taurine supplementation and taurine depletion on blood glucose and blood lipid concentrations in insulin-treated diabetic rats. Four groups of Sprague-Dawley male rats were fed the purified diet for 3 weeks ; nontaurine-supplemented diabetic rats(E0), nontaurine-supplemented diabetic rats with insulin treatment(E0+I), 1% taurine-supplemented diabetic rats with insulin treatment(E1+I) and taurine-depleted diabetic rats with insulin treatment(EA+I). Diabetes was induced by streptozotocin injection(50mg/kg B.W.). Isophane insulin was given subcutaneously into the abdominal wall of the diabetic rats(4 unit/rat/day). E1+I were supplemented with 1% taurine in drinking water. To induce taurine depletion, EA+I were treated with 5% $\beta$-alanine in drinking water. E1+I had significantly higher body weight compared to that of E0. The food intakes of E1+I and E0+I were significantly decreased compared to that of E0. There was no sigfniciant difference in food intake between E1+I and E0+I. The water intake of rats was significantly different among the groups ; E0>E0+I>E1+I>EA+I. The urine volume of E0 was significantly increased compared to those of insulin-treated goups. The blood glucose concentration of E0 was significantly increased compared to those of insulin-treated groups. In the oral glucose tolerance test(OGTT), E0+I and E1+I had significantly lower blood blucose concentrations compared to E0 after 30 min. Also EA+I had significantly lower bloodglucose concentrtion compared to E0 and E0+I. The plasma total cholesterol and LDL-cholesterol concentratons of EA+I were significantly incrased compared to those of other groups. Therefore, it may be suggested that tuarine supplementation is useful for insulin-dependent diabetes in order to prevent diabetic complications suchas cardiac vascular diseases.

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Study on icebreaking performance of the Korea icebreaker ARAON in the arctic sea

  • Kim, Hyun-Soo;Lee, Chun-Ju;Choi, Kyung-Sik;Kim, Moon-Chan
    • International Journal of Naval Architecture and Ocean Engineering
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    • v.3 no.3
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    • pp.208-215
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    • 2011
  • A full-scale field trial in ice-covered sea is one of the most important tasks in the design of icebreaking ships. The first Korean icebreaking research vessel 'ARAON', after her delivery in late 2009, had a sea ice field trial in the Arctic Sea during July-August, 2010. This paper describes the test procedures and data analysis on the icebreaking performance of the IBRV ARAON. The data gathered from the icebreaking performance test in the Chukchi Sea and the Beaufort Sea during the Arctic voyage of ARAON includes the speed and engine power of the ship as well as sea ice thickness and strength data. The air temperature, wind speed and heading of the ship were also measured during each sea ice trial. The ARAON was designed to break 1 m thick level ice with a flexural strength of 630kPa at a continuous speed of 3knots. She is registered as a KR POLAR 10 class ship. The principal dimensions of ARAON are 110 m, 19 m and 6.8 m in length, breadth and draft respectively. She is equipped with four 3,500kW diesel-electric main engines and two Azipod type propulsion motors. Four sea ice trials were carried out to understand the relationship between the engine power and the ship speed, given the Arctic ice condition. The analysis shows that the ARAON was able to operate at 1.5knots in a 2.5m thick medium ice floe condition with the engine power of 5MW, and the speed reached 3.1 knots at the same ice floe condition when the power increased to 6.6MW. She showed a good performance of speed in medium ice floe compared to the speed performance in level ice. More detailed analysis is summarized in this paper.