• 한국정밀공학회지
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• 제18권4호
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• pp.203-208
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• 2001

In this paper, a novel dual-type positioning mechanism using a voice coil motor(VCM) and a piezoelectric actuator is proposed for optical disk drive or near-field recording type drive. The VCM is used for a coarse motion actuator and the piezoelectric actuator, "S" configuration deflection motion when voltage applied, is used for a fine motion actuator with self-sensing technique, which allows it to sense and actuate simultaneously in a closed loop frame work. When the VCM rotates and stops, a position feedback control algorithm is adopted to further control residu vibration. The performance of the control scheme is confirmed through simulations and experiments.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2000년도 춘계학술대회논문집A
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• pp.475-480
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• 2000

A new positioning mechanism with Parallel type actuator using piezoelectric material and with dual type actuators using voice coil motor (VCM) and piezoactuator is proposed for optical disk drive or near-field recording type drive, and high speed position and vibration control are investigated. Parallel type bimorph piezoactuator is used as a fine motion actuator with self-sensing technique, which allows a piezoelectric material to concurrently sense and actuate in a closed loop frame work, and positive position feedback control algorithm is adopted to further control residual vibration. For positioning control of VCM, PID control algorithm is adopted.

• 한국공작기계학회논문집
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• 제17권3호
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• pp.86-93
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• 2008

This paper presents a design of the reticle stage for lithography using VCM(Voice Coil Motor) and kinematic analysis. The stage has three axes for X,Y,${\theta}_z$, those actuated by three VCM's individually. The reticle stage has cross coupled relations between X,Y,${\theta}_z$ axes, and the closed solution of the forward/inverse kinematics were solved to get an accurate reference position. The reticle stage for lithography was designed for reaching both high accuracy and long stroke, which was $0.1{\mu}m$ (X,Y)/ $1{\mu}rad({\theta}_z)$ accuracies and relatively long strokes about 2mm (X,Y) and 2 degrees(${\theta}_z$). Also this research presents a rotational compensation algorithm for the precision gap sensor for the stage. Simulation results show the overall performance of the whole algorithm and the improvement quantity of the rotational compensation algorithm.

• Journal of Electrical Engineering and Technology
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• 제2권1호
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• pp.50-54
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• 2007

In this paper, a dual-servo type VCM (Voice Coil Motor) for the measuring of nano-level displacement and small thrust is proposed and developed. The shape of VCM for improving the resolution of displacement and ensuring a large displacement are presented. The FEM (finite element method) is utilized to analyze the characteristics of VCM that produces linear driving thrust and satisfies the thrust that the measurement system requires. The Prototype is fabricated and an experiment is performed in order to measure displacement. As a result of simulation and testing, the proposed VCM shows the applicable possibility for a nano-level measurement system.

• 정보저장시스템학회논문집
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• 제6권2호
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• pp.74-78
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• 2010

In this paper, 2-axis driving mechanism, which uses voice coil motor (VCM), is proposed to measure the friction force. The proposed VCM actuator consists of two parts; structural part and magnetic circuit part. Structural part is simplified to perform the friction experiments. Magnetic circuit part is composed of two parts. The experiments are accomplished by changing the mass of moving part. Through the experiments, optimal dimension is selected. Finally, the experimental results are verified and the optimal case is applied to the 2-axis driving mechanism, optical image stabilization actuator.

• 전력전자학회논문지
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• 제22권3호
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• pp.207-215
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• 2017

The superior performance of the spherical actuator is establishing a new trend in the industry. Spherical actuators can perform multiple degrees-of-freedom (DOF) motions by using only one actuator. Therefore, a multi-DOF device using the spherical actuator can reduce weight and simplify the structure. This paper proposes a new spherical actuator that uses the operational principle of a rotational voice coil motor. The effectiveness of the actuator is verified through 3-D finite element method.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2005년도 추계학술대회논문집
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• pp.750-755
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• 2005

This paper proposes a small VCM (Voice coil motor) type actuator using curved suspensions for auto-focusing and zoom motions for mobile information devices. 1'he proposed focusing actuator adopts a nontraditional type of suspension using curved beams in order to extend output displacement within small height restriction. The curved beam is similar to the leaf spring type which is usually used in optical disk drives. In addition, three different materials are considered for the curved suspension model, and Aluminum shows the best dynamic characteristics. The proposed zoom actuator does not use a suspension supporting bobbin but a moving rail and a sloper mechanism by generating rotational force at lens holder. The sensitivity of design parameters on output performance is studied using ANSYS (3D FEM tool). Experiments using a prototype of the proposed actuator model verified the analytical prediction and performance.

• 한국소음진동공학회논문집
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• 제20권7호
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• pp.637-643
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• 2010

The paper is about the development of 6-DOF active vibration isolation systems using VCM. Firstly, formulate the vertical 3-DOF mathematical model under eccentric load, and compare the model with the case in which the center of mass is located at the centroid. And then, complete the 6-DOF mathematical model by formulating the horizontal 3-DOF mathematical model. Find main parameters by comparing the result of the frequency response test with simulation result on the model. Finally, achieve the performance of vibration isolation by applying loop shaping approach & feedforward controller.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2013년도 춘계학술대회 논문집
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• pp.341-342
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• 2013

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2012년도 춘계학술대회 논문집
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• pp.254-255
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• 2012