• Journal of the Semiconductor & Display Technology
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• v.5 no.4 s.17
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• pp.41-45
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• 2006

Micro vibration isolation, typically originated from ground, is always a prime concern for the nano-measurement instruments such as Atomic Force Microscopes. A four mount active vibration isolation system is proposed in this paper. Modeling and control of such a four mount system was analyzed. Combined active-passive isolation principle is used for vibration isolation by mounting the instrument on a passively damped isolation system made of Elastomer along with the active stage in parallel that consists of very soft actuation system, the Voice Coil Motor. The active stage works in combination with the passive stage for working as a very low frequency vibration attenuator.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.151-154
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• 2001

The pneumatic vibration isolation systems have been widely used in industry and laboratories, but the full mathematical analysis and nonlinear modeling techniques have not been reported yet, even while the nonlinear features of the pneumatic vibration isolation system decide the main characteristics. For instance, the orifice in a pneumatic vibration isolator has been traditionally considered as a simple viscous damper, which was too much simplified to explain the performance of the isolation system. In this paper, the nonlinear characteristics are considered for the orifice and chamber, etc. The numerical simulation is carried out by the MATLAB/Simulink software. From the analysis result, a clear trend of the nonlinear features is shown: the vibration transmissibility changes not only due to the excitation frequency but also due to the amplitude of the vibration excitation. Therefore various design parameters are optimally chosen for the vibration isolation system. The proposed methods show good compatibility between the analysis results and the experiments.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.22 no.4
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• pp.377-382
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• 2012

This paper presents a proof-of-concept study on the evaluation of torsional vibration isolation performance through in-situ output torque measurement by using a non-contacting magneto-elastic torque transducer installed in the vehicle driveline system. The de-trending processing is first conducted to extract the torsional vibration from the measured driveline output torque. In order to estimate the transmissibility, primary performance indicator of a vibration isolator, the magnitude of transmitted torsional vibration with different frequencies is compared. From the conservative estimation results, the torsional damper built in a lock-up clutch of a torque converter is identified to be a vibration isolator. The evaluation results show that the fluid damping by torque converter outperforms the vibration isolation function of a torsional damper, and the isolation performance needs to be enhanced.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2012.04a
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• pp.382-387
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• 2012

This paper presents a proof-of-concept study on the evaluation of torsional vibration isolation performance through in-situ output torque measurement by using a non-contacting magneto-elastic torque transducer installed in the vehicle driveline system. The de-trending processing is first conducted to extract the torsional vibration from the measured driveline output torque. In order to estimate the transmissibility, primary performance indicator of a vibration isolator, the magnitude of transmitted torsional vibration with different frequencies is compared. From the conservative estimation results, the torsional damper built in a lock-up clutch of a torque converter is identified to be a vibration isolator. The evaluation results show that the fluid damping by torque converter outperforms the vibration isolation function of a torsional damper, and the isolation performance needs to be enhanced.

• Journal of KSNVE
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• v.2 no.4
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• pp.281-292
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• 1992

Two types of vibration problems are encountered in industrial field: active isolation and passive isolation. In a passive type of vibration isolation, a foundation of a delicated machinery such as TEM, SEM, inspection- probe test, photolithograph, etc. is designed to have a vibration amplitude lower than an acceptable limit. In an active type, the isolation is focused on the vibration reduction caused by the machine itself(pump, motor, press, compressor, etc.). The foundation for such a machine should be so designed as to reduce the transmitted vibration below the permissible level prescribed. At any case, a transmissibility and stability must to be considered. Since an active isolation type is aimed for a vibration source, it is useful to isolate the transmitted vibrations energy from a major vibration source at the specific location. In this paper, a designed methodology of double anti-vibration system has been examined in order to have low transmissibility and reliable stability. Also experiment of scale model behavior has been conducted. Finally, the experiment output of the transfer function is compared to the analytical data.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.12 no.2
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• pp.124-131
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• 2002

This paper presents the design of an active vibration suppression controller for an air-spring type vibration isolation table. Firstly, isolation system model is constructed considering the isolation table, attached equipment and voice-coil actuator. An active control system is designed based on frequency-shaped sliding mode control theory rewarding high frequency uncertainties with respect to attached equipments on the isolation table. Finally. the performance of the active isolation system is evaluated by simulation under some disturbance conditions which are transmitted from base structure of the isolation system.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2014.10a
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• pp.900-903
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• 2014

Fly-wheel, Gimbal antenna, CMG, Spaceborne cyrocooler generate micro-vibration during their on-orbit operation as well as implementing their own function. To comply with the mission requirement of high resolution observation satellite, additional technical efforts have been required to isolate the micro-vibration derived from such payloads by applying the vibration isolator. In this study, we proposed a passive isolator using SMA mesh washer, which guarantees the structural safety of both micro-vibration disturbance source and itself under harsh launch vibration loads without an additional holding mechanism and the micro-vibration isolation performance on orbit environment. To verify the micro-vibration isolation performance of the proposed vibration isolator, we performed the micro-vibration isolation measurement test using the dedicated micro-vibration measurement device proposed in this study.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.21 no.9
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• pp.858-867
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• 2011

As applying an active control technique to a pneumatic vibration isolation system, the settling time for the payload excitation could be remarkably reduced as well as the improvement of isolation performance for the ground vibration. Some previous researches were dealt with the settling time through the simulation or experiment but, the discussion on the simulation or experimental results including moving parts, such as a XY-stage, on the isolation table rarely exists. As considering the moving part, the dynamic model could be time varying system and in such a case the force imposed on pneumatic vibration isolation table could be described by inertial forces of moving parts according to Newton's 3rd law, the action and reaction law. In this paper, the simulation procedure of the 3-DOF active pneumatic vibration isolation system including moving parts by TDC(time delay control) technique is proposed and the effectiveness through simulation results are also shown.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2003.10a
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• pp.227-232
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• 2003

As the most precision equipment requiring very strict vibration environment are vulnerable to the surrounding vibration condition, they adapt the passive or active vibration isolation system. When it comes to the passive isolation system, the resonance of the isolation system causes excessive resonance response, and finally results in the degrade the equipment performance. This paper deals with the active control method to control this resonance induced response, and includes the experiment on the active control for controlling the resonance response on the table against the excitation of the same frequency with the natural frequency of the isolation system. The electromagnetic actuator was designed and the control effect was verified by the experiment. The experiment showed that the electromagnetic actuator is effective for controlling the low frequency isolation resonance response of the precision equipment.

• Structural Engineering and Mechanics
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• v.51 no.4
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• pp.643-650
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• 2014

A chaotic vibration isolation system is designed according to the chaotic vibration theory in this paper. The strong nonlinearity is generated by the system. Line spectra in the radiated noise maybe easily detected caused by marine vessels. It is Important to reduce the line spectra by improving the acoustic stealth of marine vessels. A multi-degree-freedom (MDF) nonlinear vibration isolation system (NVIS) system is setup by the experiment and finite element method. The model is established with finite element method. The results show that the behavior of the device gradually varies from period bifurcation into chaotic state and the line spectrum is changed from single spectral structure into broadband spectral structure. It is concluded that chaotic vibration isolation is preferable contrasted on line spectra isolation.