• 제목/요약/키워드: Vibration Isolation Technology

검색결과 98건 처리시간 0.021초

위치결정 스테이지 베이스 진동 모델링 및 저감기법 개발 (Modeling and Countermeasure for Positioning Stage Base Vibration)

  • 박아영;임재곤;홍성욱
    • 한국생산제조학회지
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    • 제19권4호
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    • pp.476-484
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    • 2010
  • Precise positioning stages are often employed for precise machinery. For the purpose of vibration isolation, these precise positioning stages are mounted on a heavy base structure which is supported by compliant springs. Then the base structure is subjected to residual vibration due to the reactive force and vertical moving load induced by the stage motion. This paper investigates the vibration behavior of a positioning stage base and the associated vibration suppression technique. A dynamic model is developed to investigate the base vibration due to the reactive force and moving load effects by the moving stage. An input shaping technique is also developed to suppress the residual vibrations in base structures. Simulations and experiments show that the developed dynamic model adequately represents the base vibration and that the proposed input shaping technique effectively removes the residual vibrations from the positioning stage base.

MODELING AND PARAMETER IDENTIFICATION FOR A PASSIVE HYDRAULIC MOUNT

  • Zhang, Y.X.;Zhang, J.W.;Shangguan, W.B.;Feng, Q.Sh.
    • International Journal of Automotive Technology
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    • 제8권2호
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    • pp.233-241
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    • 2007
  • A lumped parameter model is proposed for the analysis of dynamic behaviour of a Passive Hydraulic Engine Mount (PHEM), incorporating inertia track and throttle, which is characterized by effective and efficient vibration isolation behaviour in the range of both low and high frequencies. Most of the model parameters, including volume compliance of the throttle chamber, effective piston area, fluid inertia and resistance of inertia track and throttle are identified by an experimental approach. Numerical predictions are obtained through a finite element method for responses of dynamic stiffness of the rubber spring. The experiments are made for the purpose of PHEM validation. Comparison of numerical results with experimental observations has shown that the present PHEM achieves good performance for vibration isolation.

플로팅 슬래브 궤도용 방진시스템 개발 (The Development of a Floating Slab Track to Isolation System)

  • 박상곤;구형욱;한현희;전종균;장승엽
    • 한국소음진동공학회:학술대회논문집
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    • 한국소음진동공학회 2013년도 춘계학술대회 논문집
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    • pp.636-641
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    • 2013
  • Recently the construction of stations under railway lines and railway sections passing through central area of cities are increasing, calling for an urgent establishment of countermeasures against railway vibration and its subsequent second-phase noise. Of technology developed up to now, the most efficient countermeasure is the floating slab track, a track system isolated from the sub-structure by springs. Unfortunately, however, the system design technology and technology for key components have not yet developed in Korea. As such, in this study, the analysis and design technology of floating slab track and its vibration isolator technology can be achieved. In preparation for future demands, it is expected to raise awareness for the need of technology self-support and to make a meaningful contribution to mitigating vibration and noise produced by the next-generation high-speed railway.

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저 회전강성 진동 절연기에 의한 X-밴드 안테나의 고각방향 미소진동 절연 효과 검증 (Verification of Micro-vibration Isolation Performance by using Low Rotational Stiffness Isolator under Elevation Direction Operation of the X-band Antenna)

  • 전수현;이재경;정새한솔;이명재;오현웅
    • 한국소음진동공학회논문집
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    • 제25권4호
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    • pp.238-246
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    • 2015
  • A stepping motor is widely used to operate the elevation and azimuth stage of the X-band antenna with 2-axis gimbal system for effective image data transmission from a satellite to a ground station. However, such stepping motor also generates an undesirable micro-vibration which is one of the main disturbance sources affecting image quality of the high-resolution observation satellite. In order to improve the image quality, the micro-vibration isolation of the X-band antenna system is essential. In this study, the low rotational stiffness isolator has been proposed to reduce the micro-vibration disturbance induced by elevation direction operation of the X-band antenna. In addition, its structural safety was confirmed by the structure analysis based on the derived torque budget. The effectiveness of the design was also verified through the micro-vibration measurement test.

Stability improvement for response attenuation of bridge columns with one dimensional meta-material based isolation systems

  • Saumitra Jain;Sumiran Pujari;Arghadeep Laskar
    • Earthquakes and Structures
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    • 제24권3호
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    • pp.193-204
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    • 2023
  • The concept of meta-material-based isolation systems (MMIS) for structural columns has been revisited in the present study in order to enhance the stability of rubber pads by using steel shim reinforced rubber (SSRR) layers. Analytical calculations have shown a significant improvement in the stability of MMIS with SSRR pads. Finite element analysis has also been conducted to further show the reduced response of a bridge with the modified MMIS under excitations having frequencies within the corresponding attenuation zone (AZ) as compared to the response of a conventional bridge without MMIS. FE analysis further shows the stress generated on the bridge with MMIS systems are within safe limits. Finally, a generalized procedure has been developed to design bridge columns with the proposed modified MMIS.

플로팅 슬래브 궤도용 방진시스템 개발 (The Development of a Floating Slab Track to Isolation System)

  • 박상곤;전종균;이규섭;장승엽
    • 한국소음진동공학회논문집
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    • 제23권2호
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    • pp.112-122
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    • 2013
  • Recently the construction of stations under railway lines and railway sections passing through central area of cities are increasing, calling for an urgent establishment of countermeasures against railway vibration and its subsequent second-phase noise. Of technology developed up to now, the most efficient countermeasure is the floating slab track, a track system isolated from the sub-structure by springs. Unfortunately, however, the system design technology and technology for key components have not yet developed in Korea. As such, in this study, the analysis and design technology of floating slab track and its vibration isolator technology can be achieved. In preparation for future demands, it is expected to raise awareness for the need of technology self-support and to make a meaningful contribution to mitigating vibration and noise produced by the next-generation high-speed railway.

정밀장비의 진동허용규제치에 미치는 인자에 관한 연구 (A Study on the Effected Factor for Vibration Criteria of Sensitive Equipment)

  • 이홍기;장강석;김두훈;김사수
    • 한국소음진동공학회:학술대회논문집
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    • 한국소음진동공학회 1998년도 춘계학술대회논문집; 용평리조트 타워콘도, 21-22 May 1998
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    • pp.302-307
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    • 1998
  • In the production of semiconductor wafer, optical and electron microscopes, ion-beam, laser device must maintain their alignments within a sub-micrometer. This equipment requires a vibration free environment to provide its proper function. Especially, lithography and inspection devices, which have sub-nanometer class high accuracy and resolution, have come to necessity for producing more improved giga and tera class semiconductor wafers. This high technology equipments require very strict environmental vibration standard, vibration criteria, in proportion to the accuracy of the manufacturing, inspecting devices. The vibration criteria of high sensitive equipment should be represented in the form of exactness and accuracy, because this is used as basic data for the design of building structure and structural dynamics of equipment. The study on the evaluation of the factors affecting the permissible vibration criteria is required to design the efficient isolation system of the semiconductor manufacturing of equipment. This paper deals with the properties of the effected factor for vibration criteria of high sensitive equipment.

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플로팅 슬래브 궤도용 방진시스템 현장성능 평가 (Field performance evaluation of a Floating Slab Track to Isolation System)

  • 박상곤;구형욱;한현희;전종균;장승엽
    • 한국소음진동공학회:학술대회논문집
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    • 한국소음진동공학회 2014년도 춘계학술대회 논문집
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    • pp.352-357
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    • 2014
  • Recently the construction of stations under railway lines and railway sections passing through central area of cities are increasing, calling for an urgent establishment of countermeasures against railway vibration and its subsequent second-phase noise. Of technology developed up to now, the most efficient countermeasure is the floating slab track, a track system isolated from the sub-structure by springs. Developed in this study, anti-vibration device for floating slab track (HLRM-High Load Rubber Mount) Haman station affiliated to the primary measurement was conducted in October 2012, one year after the second measurement after 2013 to be carried out in November and we want to change that. It is expected to raise awareness for the need of technology self-support and to make a meaningful contribution to mitigating vibration and noise produced by the next-generation high-speed railway.

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초정밀 측정/가공 장비의 외부진동에 대한 상대변위의 추출과 진동성능 평가에 관한 연구 (A Study on the Vibrational Reduction Evaluation and the Relative Displacement in the External Vibration of Precision Measuring System)

  • 전종균;엄호성;김강부;원영재
    • 한국소음진동공학회논문집
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    • 제12권1호
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    • pp.65-72
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    • 2002
  • Generally, there are laser operating equipments( aligner, stepper) and electronic microscope( SEM, TEM) as a high precision manufacturing and inspection equipment in semiconductor production companies, precision examination and measuring laboratories. Mostly, these equipments are characterized by projection and target part. The relative displacements between projection and target part are dominant roles in vibrational problem in these precision equipments. These relative displacements are determined by the position of incoming vibration and the difference of vibration response in projection and target part. In this study, the allowable vibrational limits are suggested and the vibrational reduction plans are proposed by measurement and analysis of vibration phenomenon in the Clean Room in PDP(plasma display panel) production building. The vibration performance is evaluated by comparison relative displacements between projection and target part before/after the vibration isolation plan.