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Modeling and Countermeasure for Positioning Stage Base Vibration  

Park, Ah-Yeong (금오공과대학교 대학원 기전공학과)
Lim, Jae-Gon (금오공과대학교 대학원 기전공학과)
Hong, Seong-Wook (금오공과대학교 기계공학부)
Publication Information
Journal of the Korean Society of Manufacturing Technology Engineers / v.19, no.4, 2010 , pp. 476-484 More about this Journal
Abstract
Precise positioning stages are often employed for precise machinery. For the purpose of vibration isolation, these precise positioning stages are mounted on a heavy base structure which is supported by compliant springs. Then the base structure is subjected to residual vibration due to the reactive force and vertical moving load induced by the stage motion. This paper investigates the vibration behavior of a positioning stage base and the associated vibration suppression technique. A dynamic model is developed to investigate the base vibration due to the reactive force and moving load effects by the moving stage. An input shaping technique is also developed to suppress the residual vibrations in base structures. Simulations and experiments show that the developed dynamic model adequately represents the base vibration and that the proposed input shaping technique effectively removes the residual vibrations from the positioning stage base.
Keywords
Base Structure Vibration; Positioning Stage; Dynamic Model; Input Shaping; Residual Vibration;
Citations & Related Records
Times Cited By KSCI : 3  (Citation Analysis)
연도 인용수 순위
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