• Title/Summary/Keyword: Vertical progress

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Dry Etching of Polysilicon by the RF Power and HBr Gas Changing in ICP Poly Etcher (ICP Poly Etcher를 이용한 RF Power와 HBr Gas의 변화에 따른 Polysilicon의 건식식각)

  • Nam, S.H.;Hyun, J.S.;Boo, J.H.
    • Journal of the Korean Vacuum Society
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    • v.15 no.6
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    • pp.630-636
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    • 2006
  • Scale down of semiconductor gate pattern will make progress centrally line width into transistor according to the high integration and high density of flash memory semiconductor. Recently, the many researchers are in the process of developing research for using the ONO(oxide-nitride-oxide) technology for the gate pattern give body to line breadth of less 100 nm. Therefore, etch rate and etch profile of the line width detail of less 100 nm affect important factor in a semiconductor process. In case of increasing of the platen power up to 50 W at the ICP etcher, etch rate and PR selectivity showed good result when the platen power of ICP etcher has 100 W. Also, in case of changing of HBr gas flux at the platen power of 100 W, etch rate was decreasing and PR selectivity is increasing. We founded terms that have etch rate 320 nm/min, PR selectivity 3.5:1 and etch slope have vertical in the case of giving the platen power 100 W and HBr gas 35 sccm at the ICP etcher. Also notch was not formed.

Observation Test of Field Surface Reflectance Using Vertical Rotating Goniometer on Tarp Surface and Grass (수직 축 회전형 측각기 제작 및 야외 지표면 반사도 관측 시험: 타프와 잔디에서)

  • Moon, Hyun-Dong;Jo, Euni;Kim, Hyunki;Cho, Yuna;Kim, Bo-Kyeong;Ahn, Ho-Yong;Ryu, Jae-Hyun;Cho, Jaeil
    • Korean Journal of Remote Sensing
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    • v.38 no.6_1
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    • pp.1207-1217
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    • 2022
  • Vegetation indices using the reflectance of selected wavelength, associating with the monitoring purpose such as identifying the progress of crop growth, on the vegetation canopy surface is widely used in the digital agriculture technology. However, the surface reflectance anisotropy can distort the true value of vegetation index related to the condition of surface, even though the surface property be unchanged. That causes difficulty to observe accurately crop growth on the monitoring system. In this study, a simple type goniometer was designed to measure the reflectance from the anisotropic surface according to various zeniths and azimuths of sun and viewing sensor in the field. On the tarp like as Lambertian surface, the reflectance of Blue, Green, Red, Near-Infrared band was similar to the tarps' reflectance properties. However, the reflectance was slightly overestimated in the cloudy day. The relative difference values of vegetation indices on grass were overestimated for the forward viewing and underestimated for the backward viewing. In addition, enhanced vegetation index (EVI) showed less sensitive according to the positions of sun and sensor viewing. Field observation with a goniometer will be helpful to understand the anisotropy characteristics on the vegetation surface.

PASTELS project - overall progress of the project on experimental and numerical activities on passive safety systems

  • Michael Montout;Christophe Herer;Joonas Telkka
    • Nuclear Engineering and Technology
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    • v.56 no.3
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    • pp.803-811
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    • 2024
  • Nuclear accidents such as Fukushima Daiichi have highlighted the potential of passive safety systems to replace or complement active safety systems as part of the overall prevention and/or mitigation strategies. In addition, passive systems are key features of Small Modular Reactors (SMRs), for which they are becoming almost unavoidable and are part of the basic design of many reactors available in today's nuclear market. Nevertheless, their potential to significantly increase the safety of nuclear power plants still needs to be strengthened, in particular the ability of computer codes to determine their performance and reliability in industrial applications and support the safety demonstration. The PASTELS project (September 2020-February 2024), funded by the European Commission "Euratom H2020" programme, is devoted to the study of passive systems relying on natural circulation. The project focuses on two types, namely the SAfety COndenser (SACO) for the evacuation of the core residual power and the Containment Wall Condenser (CWC) for the reduction of heat and pressure in the containment vessel in case of accident. A specific design for each of these systems is being investigated in the project. Firstly, a straight vertical pool type of SACO has been implemented on the Framatome's PKL loop at Erlangen. It represents a tube bundle type heat exchanger that transfers heat from the secondary circuit to the water pool in which it is immersed by condensing the vapour generated in the steam generator. Secondly, the project relies on the CWC installed on the PASI test loop at LUT University in Finland. This facility reproduces the thermal-hydraulic behaviour of a Passive Containment Cooling System (PCCS) mainly composed of a CWC, a heat exchanger in the containment vessel connected to a water tank at atmospheric pressure outside the vessel which represents the ultimate heat sink. Several activities are carried out within the framework of the project. Different tests are conducted on these integral test facilities to produce new and relevant experimental data allowing to better characterize the physical behaviours and the performances of these systems for various thermo-hydraulic conditions. These test programmes are simulated by different codes acting at different scales, mainly system and CFD codes. New "system/CFD" coupling approaches are also considered to evaluate their potential to benefit both from the accuracy of CFD in regions where local 3D effects are dominant and system codes whose computational speed, robustness and general level of physical validation are particularly appreciated in industrial studies. In parallel, the project includes the study of single and two-phase natural circulation loops through a bibliographical study and the simulations of the PERSEO and HERO-2 experimental facilities. After a synthetic presentation of the project and its objectives, this article provides the reader with findings related to the physical analysis of the test results obtained on the PKL and PASI installations as well an overall evaluation of the capability of the different numerical tools to simulate passive systems.

3-Dimensional Verification Technique for Target Point Error (자기공명영상기반 겔 선량측정법을 이용한 3차원적 목표 중심점 점검기술)

  • Lee, Kyung-Nam;Lee, Dong-Joon;Suh, Tae-Suk
    • Progress in Medical Physics
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    • v.22 no.1
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    • pp.35-41
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    • 2011
  • For overall system test, hidden-target test have been used using film which leads to inherent analysis error. The purpose of our study is to quantify this error and to propose gel dosimeter based verification technique for 3-dimensional target point error. The phantom was made for simulation of human head and this has ability to equip 10 gel-dosimeter. $BANGkit^{TM}$ which we are able to manufacture whenever it is needed as well as to easily change the container with different shapes was used as a gel dosimeter. The 10 targets were divided into two groups based on shapes of areas with a planned 50% isodose line. All treatment and analysis was performed three times using Novalis and $BrainSCAN^{TM}$. The target point error is $0.77{\pm}0.15mm$ for 10 targets and directional target point error in each direction is $0.54{\pm}0.23mm$, $0.37{\pm}0.08mm$, $0.33{\pm}0.10mm$ in AP (anterior-posterior), LAT (lateral), and VERT (vertical) direction, respectively. The result of less than 1 mm shows that the treatment was performed through each precise step in treatment procedure. In conclusion, the 3-dimensional target point verification technique can be one of the techniques for overall system test.

A Study on Urban Gardening in Everyday Life toward Sustainable Urban Regeneration - Case of Sujin 2-dong, Seongnam-si in South Korea - (지속가능한 도시재생 모색을 위한 일상적 도시정원 가꾸기 유형 특성 연구 - 성남시 수진2동을 중심으로 -)

  • Park, Jae-min;Choi, Jung-Kwon;Park, Eun-Yeong
    • Journal of the Korean Institute of Landscape Architecture
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    • v.44 no.3
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    • pp.13-24
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    • 2016
  • What are the roles and functions of urban gardening created by citizens in Sujin 2-dong, Seongnam-si? This study has looked into urban gardening in everyday life in a bid to find possible solutions for sustainable urban regeneration. The paper has examined the types, functions, and characteristics of urban gardens in Sujin 2-dong, where the urban restoration project is in progress. This study has conducted primarily on-site inspections and interviews. The research findings are as follows. Most urban gardens in Sujin 2-dong have a vertical structure rather than a regular ground-based one due to lack of land. Six major locations of building a garden include the front of a building, rooftop, top of a gate, stairs, wall, and yard. Rooftop gardens are most common and are built mostly for production purposes. Due to architectural characteristics of this village, there are relatively many stair gardens built mostly for aesthetic purposes. The garden in front of a building has served multiple functions, including formation of entry, privacy protection, and prevention of unauthorized parking. Other than those, detached houses have quality urban gardens built with greater effort and care, while multi-household houses have seen a decrease of stair gardens and an increase of vertical gardens due to their comparatively limited space. By utilizing this research, we hope to show that it is important to understand the local's wisdom and voice for a sustainable urban environment as well as keep these findings in mind during the construction of new buildings. This study would be expected to be useful as primary research for urban gardening in everyday life and alternative ways of urban regeneration.

A Conceptual Review of the Transaction Costs within a Distribution Channel (유통경로내의 거래비용에 대한 개념적 고찰)

  • Kwon, Young-Sik;Mun, Jang-Sil
    • Journal of Distribution Science
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    • v.10 no.2
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    • pp.29-41
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    • 2012
  • This paper undertakes a conceptual review of transaction cost to broaden the understanding of the transaction cost analysis (TCA) approach. More than 40 years have passed since Coase's fundamental insight that transaction, coordination, and contracting costs must be considered explicitly in explaining the extent of vertical integration. Coase (1937) forced economists to identify previously neglected constraints on the trading process to foster efficient intrafirm, rather than interfirm, transactions. The transaction cost approach to economic organization study regards transactions as the basic units of analysis and holds that understanding transaction cost economy is central to organizational study. The approach applies to determining efficient boundaries, as between firms and markets, and to internal transaction organization, including employment relations design. TCA, developed principally by Oliver Williamson (1975,1979,1981a) blends institutional economics, organizational theory, and contract law. Further progress in transaction costs research awaits the identification of critical dimensions in which transaction costs differ and an examination of the economizing properties of alternative institutional modes for organizing transactions. The crucial investment distinction is: To what degree are transaction-specific (non-marketable) expenses incurred? Unspecialized items pose few hazards, since buyers can turn toalternative sources, and suppliers can sell output intended for one order to other buyers. Non-marketability problems arise when specific parties' identities have important cost-bearing consequences. Transactions of this kind are labeled idiosyncratic. The summarized results of the review are as follows. First, firms' distribution decisions often prompt examination of the make-or-buy question: Should a marketing activity be performed within the organization by company employees or contracted to an external agent? Second, manufacturers introducing an industrial product to a foreign market face a difficult decision. Should the product be marketed primarily by captive agents (the company sales force and distribution division) or independent intermediaries (outside sales agents and distribution)? Third, the authors develop a theoretical extension to the basic transaction cost model by combining insights from various theories with the TCA approach. Fourth, other such extensions are likely required for the general model to be applied to different channel situations. It is naive to assume the basic model appliesacross markedly different channel contexts without modifications and extensions. Although this study contributes to scholastic research, it is limited by several factors. First, the theoretical perspective of TCA has attracted considerable recent interest in the area of marketing channels. The analysis aims to match the properties of efficient governance structures with the attributes of the transaction. Second, empirical evidence about TCA's basic propositions is sketchy. Apart from Anderson's (1985) study of the vertical integration of the selling function and John's (1984) study of opportunism by franchised dealers, virtually no marketing studies involving the constructs implicated in the analysis have been reported. We hope, therefore, that further research will clarify distinctions between the different aspects of specific assets. Another important line of future research is the integration of efficiency-oriented TCA with organizational approaches that emphasize specific assets' conceptual definition and industry structure. Finally, research of transaction costs, uncertainty, opportunism, and switching costs is critical to future study.

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Estimation of Internal Motion for Quantitative Improvement of Lung Tumor in Small Animal (소동물 폐종양의 정량적 개선을 위한 내부 움직임 평가)

  • Yu, Jung-Woo;Woo, Sang-Keun;Lee, Yong-Jin;Kim, Kyeong-Min;Kim, Jin-Su;Lee, Kyo-Chul;Park, Sang-Jun;Yu, Ran-Ji;Kang, Joo-Hyun;Ji, Young-Hoon;Chung, Yong-Hyun;Kim, Byung-Il;Lim, Sang-Moo
    • Progress in Medical Physics
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    • v.22 no.3
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    • pp.140-147
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    • 2011
  • The purpose of this study was to estimate internal motion using molecular sieve for quantitative improvement of lung tumor and to localize lung tumor in the small animal PET image by evaluated data. Internal motion has been demonstrated in small animal lung region by molecular sieve contained radioactive substance. Molecular sieve for internal lung motion target was contained approximately 37 kBq Cu-64. The small animal PET images were obtained from Siemens Inveon scanner using external trigger system (BioVet). SD-Rat PET images were obtained at 60 min post injection of FDG 37 MBq/0.2 mL via tail vein for 20 min. Each line of response in the list-mode data was converted to sinogram gated frames (2~16 bin) by trigger signal obtained from BioVet. The sinogram data was reconstructed using OSEM 2D with 4 iterations. PET images were evaluated with count, SNR, FWHM from ROI drawn in the target region for quantitative tumor analysis. The size of molecular sieve motion target was $1.59{\times}2.50mm$. The reference motion target FWHM of vertical and horizontal was 2.91 mm and 1.43 mm, respectively. The vertical FWHM of static, 4 bin and 8 bin was 3.90 mm, 3.74 mm, and 3.16 mm, respectively. The horizontal FWHM of static, 4 bin and 8 bin was 2.21 mm, 2.06 mm, and 1.60 mm, respectively. Count of static, 4 bin, 8 bin, 12 bin and 16 bin was 4.10, 4.83, 5.59, 5.38, and 5.31, respectively. The SNR of static, 4 bin, 8 bin, 12 bin and 16 bin was 4.18, 4.05, 4.22, 3.89, and 3.58, respectively. The FWHM were improved in accordance with gate number increase. The count and SNR were not proportionately improve with gate number, but shown the highest value in specific bin number. We measured the optimal gate number what minimize the SNR loss and gain improved count when imaging lung tumor in small animal. The internal motion estimation provide localized tumor image and will be a useful method for organ motion prediction modeling without external motion monitoring system.

Dose Distribution of Co-60 Photon Beam in Total Body Irradiation (Co-60에 의한 전신조사시 선량분포)

  • Kang, Wee-Saing
    • Progress in Medical Physics
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    • v.2 no.2
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    • pp.109-120
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    • 1991
  • Total body irradiation is operated to irradicate malignant cells of bone marrow of patients to be treated with bone marrow transplantation. Field size of a linear accelerator or cobalt teletherapy unit with normal geometry for routine technique is too small to cover whole body of a patient. So, any special method to cover patient whole body must be developed. Because such environments as room conditions and machine design are not universal, some characteristic method of TBI for each hospital could be developed. At Seoul National University Hospital, at present, only a cobalt unit is available for TBI because source head of the unit could be tilted. When the head is tilted outward by 90$^{\circ}$, beam direction is horizontal and perpendicular to opposite wall. Then, the distance from cobalt source to the wall was 319 cm. Provided that the distance from the wall to midsagittal plane of a patient is 40cm, nominal field size at the plane(SCD 279cm) is 122cm$\times$122cm but field size by measurement of exposure profile was 130cm$\times$129cm and vertical profile was not symmetric. That field size is large enough to cover total body of a patient when he rests on a couch in a squatting posture. Assuming that average lateral width of patients is 30cm, percent depth dose for SSD 264cm and nominal field size 115.5cm$\times$115.5cm was measured with a plane-parallel chamber in a polystyrene phantom and was linear over depth range 10~20cm. An anthropomorphic phantom of size 25cm wide and 30cm deep. Depth of dose maximum, surface dose and depth of 50% dose were 0.3cm, 82% and 16.9cm, respectively. A dose profile on beam axis for two opposing beams was uniform within 10% for mid-depth dose. Tissue phantom ratio with reference depth 15cm for maximum field size at SCD 279cm was measured in a small polystyrene phantom and was linear over depth range 10~20cm. An anthropomorphic phantom with TLD chips inserted in holes on the largest coronal plane was bilaterally irradiated by 15 minute in each direction by cobalt beam aixs in line with the cross line of the coronal plane and contact surface of sections No. 27 and 28. When doses were normalized with dose at mid-depth on beam axis, doses in head/neck, abdomen and lower lung region were close to reference dose within $\pm$ 10% but doses in upper lung, shoulder and pelvis region were lower than 10% from reference dose. Particulaly, doses in shoulder region were lower than 30%. On this result, the conclusion such that under a geometric condition for TBI with cobalt beam as SNUH radiotherapy departement, compensators for head/neck and lung shielding are not required but boost irradiation to shoulder is required could be induced.

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Monte Carlo Simulations of Detection Efficiency and Position Resolution of NaI(TI)-PMT Detector used in Small Gamma Camera (소형 감마카메라 제작에 사용되는 NaI(TI)- 광전자증배관 검출기의 민감도와 위치 분해능 특성 연구를 위한 몬테카를로 시뮬레이션)

  • Kim, Jong-Ho;Choi, Yong;Kim, Jun-Young;Im, Ki-Chun;Kim, Sang-Eun;Choi, Yeon-Sung;Joo, Kwan-Sik;Kim, Young-Jin;Kim, Byung-Tae
    • Progress in Medical Physics
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    • v.8 no.2
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    • pp.67-76
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    • 1997
  • We studied optical behavior of scintillation light generated in NaI(TI) crystal using Monte Carlo simulation method. The simulation was performed for the model of NaI(TI) scintillator (size: 60 mm ${\times}$ 60 mm ${\times}$ 6 mm) using an optical tracking code. The sensitivity as a function of surface treatment (Ground, Polished, Metal-0.95RC, Polished-0.98RC, Painted- 0.98RC) of the incident surface of the scintillator was compared. The effects of NaI(TI) scintillator thickness and the refractive index of light guide optically coupling between the NaI(TI) scintillator and photomultiplier tube (PMT) were simulated. We also evaluated intrinsic position resolution of the system by calculating the spread of scintillation light generated. The sensitivities of the system having the surface treatment of Ground, Polished, Metal-0.95RC, Polished-0.98RC and Painted-0.98RC were 70.9%, 73.9%, 78.6%, 80.1% and 85.2%, respectively, and the surface treatment of Painted-0.98RC allowed the highest sensitivity. As increasing the thickness of scintillation crystal and light guide, the sensitivity of the system was decreased. As the refractive index of light guide increases, the sensitivity was increased. The intrinsic position resolution of the system was estimated to be 1.2 mm in horizontal and vertical directions. In this study, the performance of NaI(TI)-PMT detector system was evaluated using Monte Carlo simulation. Based on the results, we concluded that the NaI(TI)-PMT detector array is a favorable configuration for small gamma camera imaging breast tumor using Tc-99m labeled radiopharmaceuticals.

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Commissioning Experience of Tri-Cobalt-60 MRI-guided Radiation Therapy System (자기공명영상유도 Co-60 기반 방사선치료기기의 커미셔닝 경험)

  • Park, Jong Min;Park, So-Yeon;Wu, Hong-Gyun;Kim, Jung-in
    • Progress in Medical Physics
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    • v.26 no.4
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    • pp.193-200
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    • 2015
  • The aim of this study is to present commissioning results of the ViewRay system. We verified safety functions of the ViewRay system. For imaging system, we acquired signal to noise ratio (SNR) and image uniformity. In addition, we checked spatial integrity of the image. Couch movement accuracy and coincidence of isocenters (radiation therapy system, imaging system and virtual isocneter) was verified. Accuracy of MLC positioing was checked. We performed reference dosimetry according to American Association of Physicists in Medicine (AAPM) Task Group 51 (TG-51) in water phantom for head 1 and 3. The deviations between measurements and calculation of percent depth dose (PDD) and output factor were evaluated. Finally, we performed gamma evaluations with a total of 8 IMRT plans as an end-to-end (E2E) test of the system. Every safety system of ViewRay operated properly. The values of SNR and Uniformity met the tolerance level. Every point within 10 cm and 17.5 cm radii about the isocenter showed deviations less than 1 mm and 2 mm, respectively. The average couch movement errors in transverse (x), longitudinal (y) and vertical (z) directions were 0.2 mm, 0.1 mm and 0.2 mm, respectively. The deviations between radiation isocenter and virtual isocenter in x, y and z directions were 0 mm, 0 mm and 0.3 mm, respectively. Those between virtual isocenter and imaging isocenter were 0.6 mm, 0.5 mm and 0.2 mm, respectively. The average MLC positioning errors were less than 0.6 mm. The deviations of output, PDDs between mesured vs. BJR supplement 25, PDDs between measured and calculated and output factors of each head were less than 0.5%, 1%, 1% and 2%, respectively. For E2E test, average gamma passing rate with 3%/3 mm criterion was $99.9%{\pm}0.1%$.