• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.19 no.9
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• pp.825-831
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• 2006

As an increase of chip complexity and level of chip integration, chip input/output (I/O) pad pitches are also drastically reduced. With arrival of high complexity SoC (System on Chip) and SiP (System in Package) products, conventional horizontal type probe card showed its limitation on probing density for wafer level test. To enhance probing density, we proposed new vertical type probe card that has the $70{\mu}m$ probe needle with tungsten wire in $80{\mu}m$ micro-drilled hole in ceramic board. To minimize alignment error, micro-drilling conditions are optimized and epoxy-hardening conditions are also optimized to minimize planarity changes. To apply wafer level test for target devices (T5365 256M SDRAM), designed probe card was characterized by probe needle tension for test, contact resistance measurement, leakage current measurement and the planarity test. Compare to conventional probe card with minimum pitch of $50{\sim}125{\mu}m\;and\;2\;{\Omega}$ of average contact resistance, designed probe card showed only $22{\mu}$ of minimum pitch and $1.5{\Omega}$ of average contact resistance. And also, with the nature of vertical probing style, it showed comparably small contact scratch and it can be applied to bumping type chip test.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.21 no.7
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• pp.831-841
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• 2010

The conventional vertical probe has the thin and long signal path that makes transfer characteristic of probe worse because of the S-shaped structure. So we propose the new vertical probe structure that has branch springs in the S-shaped probe. It makes closed loop when the probe mechanically connects to the electrode on a wafer. We fabricated the proposed vertical probe and measured the transfer characteristic and mechanical properties. Compared to the conventional S-shaped vertical probe, the proposed probe has the overdrive that is 1.2 times larger and the contact force that is 2.5 times larger. And we got the improved transfer characteristic by 1.4 dB in $0{\sim}10$ GHz. Also we developed the simulation model of the probe card by using full-wave simulator and the simulation result is correlated with measurement one. As a result of this simulation model, the cantilever probe and PCB have the worst transfer characteristic in the probe card.

• KIEE International Transactions on Electrophysics and Applications
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• v.4C no.4
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• pp.149-154
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• 2004

This paper presents a silicon probe tip for vertical probe card application. The silicon probe tip was fabricated using MEMS technology such as porous silicon micromachining and deep- RIE (reactive ion etching). The thickness of the silicon epitaxial layers was 5 ${\mu}{\textrm}{m}$ and 7 ${\mu}{\textrm}{m}$, respectively. The width and length were 40 ${\mu}{\textrm}{m}$ and 600 ${\mu}{\textrm}{m}$, respectively. The probe structure was a multilayered structure and was composed of Au/Ni-Cr/Si$_3$N$_4$/n-epi layers. The height of the curled probe tip was measured as a function of the annealing temperature and time. Resistance characteristics of the probe tip were measured using a touchdown test.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2017.05a
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• pp.120.1-120.1
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• 2017

최근 첨단 기능화 되고 있는 반도체의 회로는 증가하고 칩의 브릿지도 점점 증가하고 있다. 반면에 제품은 소형화되고 회로폭은 미세화 하고, 피치는 감소하고 있다. 이에 회로의 정확한 검사를 위해서는 Probe Pin의 신뢰성을 중요시하게 되면서 도금기술의 고품질화가 요구되는 실정이다. 본연구에서는 Probe Pin과 내구성과 금도금 피막의 두께를 확보하여 국산 반도체 검사장비 시장을 선도 할 수 있도록 금도금피막의 두께와 밀착성 확보와 함께 굽힘시험시 박리와 크랙방지를 위한 기초연구를 수행하고자 하였다.

• Journal of radiological science and technology
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• v.29 no.2
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• pp.63-69
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• 2006

In diagnostic ultrasound, the quality of image affect to diagnose. To maintain suboptimal imaging uniformly, Quality Assurance of Ultrasound equipment should take periodically. This is article about examination the quality of image in diagnostic ultrasound to understand conditions of probes in hospitals. There is comparative study of convex and linear probes on ultrasound using tissue-mimicking phantom included simulated cysts, echogenic structures. The ultrasonic attenuation coefficient versus frequency of 0.5 dB is representative of normal liver and 0.7 dB is representative of fatty liver condition in ultrasound phantom. There are results of convex probe, 0.5 dB, vertical group, cystic masses, high contrast masses are mostly shown but 0.7 dB, mid level in vertical group, cystic masses and high contrast masses are nearly visible. In linear probe, 0.5 dB, mid level in vertical group, two or four of them are shown in cystic masses and high contrast masses but there are not visible in 11 of cases. 0.7 dB, there are mostly appear under 6 in vertical group, two or four of them show in cystic masses and high contrast masses and there are not shown in 40 of cases, besides. Linear probes in fatty liver condition of ultrasound instrument are not good in the quality of image practically. So there needs to be replace and fix of probes. Actually management of ultrasound probes is inadequate in hospitals. So if there are program of evaluation to check probes periodically in hospitals from establishment of the ultrasound equipment, there will get better image and have a suitable condition of instruments further more.

• Transactions of the Korean Society of Mechanical Engineers
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• v.10 no.6
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• pp.814-822
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• 1986

Flow patterns and its transitions in vertical two phase flow of air-water isothermal flow are identified objectively by void output signals and moments computed from the Probability Density Function which is associated with the statistical measurement for time average local void fractions using conductance probe. It has been shown that the probe output signals, PDF distributions and its moments are deterministic criteria of flow pattern and transition classification.

• Journal of Korean Medicine Rehabilitation
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• v.28 no.1
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• pp.85-96
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• 2018

Objectives This study was performed to compare the electrical methods of motor points mapping using surface EMG and electric probe (Pointer Excel II). Methods 32 healthy adults (male 16, female 16) were selected. and classified into two groups; surface EMG group, electric probe (Pointer Excel II) group. In surface EMG group, motor points were searched by recoding the compound muscle potentials. In electric probe (Pointer Excel II) group, motor points were searched by scanning the skin with Pointer Excel II at low level stimulation. The locations of the motor points were expressed as X and Y values in relation to the reference line. The horizontal reference line was set as elbow crease and the vertical reference line was set as the line connecting coracoid process to the center of the horizontal reference line. The data was analyzed by 'Independent T-test' and 'equivalence test'. Results 1. The motor points of short head and long head of biceps brachii muscle were located at about 2/3 length of the vertical reference line from coracoid process and about 1/5~1/4 length of the half of the horizontal reference line from the vertical reference line in both group. 2. The motor points of the short head were located more distally and close to the vertical reference line (p<0.001). 3. In surface EMG group, the motor points of the long head were located more laterally in the female than male. And the motor points of the long head were located more distally in the left side than right side (p<0.05). In electric probe (Pointer Excel II) group, similar tendency was observed but there was no statistically significant difference (p>0.05). 4. As a result of the equivalence test between surface EMG group and electric probe (Pointer Excel II) group, the confidence intervals of the difference were within the equivalence limit. Therefore, the locations of the motor points searched by two ways are equa l (p>0.05, equivalence interval=3%). Conclusions The results indicate that electric probe (Pointer Excel II) can be used to search the motor points instead of surface EMG. This might improve the clinical efficiency when using the motor points to treat muscle dysfunction.

• Proceedings of the KSME Conference
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• 2007.05a
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• pp.1730-1733
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• 2007

As semiconductor and MEMS devices become smaller, testing process during their production should follow such a high density trend. A circuit inspection tool "probe card" makes contact with electrode pads of the device under test (DUT). Nowadays, electrode pads are irregularly arranged and have height difference. In order to absorb variations in the heights of electrode pads and to generate contact loads, contact probes must have some levels of mechanical spring properties. Contact probes must also yield a force to break the surface native oxide layer or contamination layer on the electrodes to make electric contact. In this research, new vertical micro contact probe with bellows shape is developed to overcome shortage of prior work. Especially, novel bellows shape is used to reduce stress concentration in this design and stopper is used to change the stiffness of micro contact probe. Variable stiffness can be one solution to overcome the height difference of electrode pads.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.402.1-402.1
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• 2014

Photonic force microscopy (PFM) is an optical tweezers-based scanning probe microscopy, which measures the forces in the range of fN to pN. The low stiffness leads proper to measure single molecular interaction. We introduce a novel photonic force microscopy to stably map various chemical properties as well as topographic information, utilizing weak molecular bond between probe and object's surface. First, we installed stable optical tweezers instrument, where an IR laser with 1064 nm wavelength was used as trapping source to reduce damage to biological sample. To manipulate trapped material, electric driven two-axis mirrors were used for x, y directional probe scanning and a piezo stage for z directional probe scanning. For resolution test, probe scans with vertical direction repeatedly at the same lateral position, where the vertical resolution is ~25 nm. To obtain the topography of surface which is etched glass, trapped bead scans 3-dimensionally and measures the contact position in each cycle. To acquire the chemical mapping, we design the DNA oligonucleotide pairs combining as a zipping structure, where one is attached at the surface of bead and other is arranged on surface. We measured the rupture force of molecular bonding to investigate chemical properties on the surface with various loading rate. We expect this system can realize a high-resolution multi-functional imaging technique able to acquire topographic map of objects and to distinguish difference of chemical properties between these objects simultaneously.

• Proceedings of the Optical Society of Korea Conference
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• 2008.07a
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• pp.185-186
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• 2008

In this paper, the nano-grating was measured by Scanning Probe Microscopy (SPM) system using digital Proportion, Integration and Derivative (PID) control. Through this measurement, we could confirm the improvement of the vertical resolution compared with analog Proportion and Integration (PI) control method.