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Formation of a MnSixOy barrier with Cu-Mn alloy film deposited using PEALD

  • Moon, Dae-Yong;Hwang, Chang-Mook;Park, Jong-Wan
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.229-229
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    • 2010
  • With the scaling down of ultra large integrated circuits (ULSI) to the sub-50 nm technology node, the need for an ultra-thin, continuous and conformal diffusion barrier and Cu seed layer is increasing. However, diffusion barrier and Cu seed layer formation with a physical vapor deposition (PVD) method has become difficult as the technology node is reduced to 30 nm and beyond. Recent work on self-forming barrier processes using PVD Cu alloys have attracted great attention due to the capability of conformal ultra-thin barrier formation using a simple technique. However, as in the case of the conventional barrier and Cu seed layer, PVD of the Cu alloy seed layer will eventually encounter the difficulty in conformal deposition in narrow line trenches and via holes. Atomic layer deposition (ALD) has been known for its good step coverage and precise thickness control, and is a candidate technique for the formation of a thin conformal barrier layer and Cu seed layer. Conformal Cu-Mn seed layers were deposited by plasma enhanced atomic layer deposition (PEALD) at low temperature ($120^{\circ}C$), and the Mn content in the Cu-Mn alloys were controlled form 0 to approximately 10 atomic percent with various Mn precursor feeding times. Resistivity of the Cu-Mn alloy films decreased by annealing due to out-diffusion of Mn atoms. Out-diffused Mn atoms were segregated to the surface of the film and interface between a Cu-Mn alloy and $SiO_2$, resulting in self-formed $MnO_x$ and $MnSi_xO_y$, respectively. No inter-diffusion was observed between Cu and $SiO_2$ after annealing at $500^{\circ}C$ for 12 h, indicating an excellent diffusion barrier property of the $MnSi_xO_y$. The adhesion between Cu and $SiO_2$ was enhanced by the formation of $MnSi_xO_y$. Continuous and conductive Cu-Mn seed layers were deposited with PEALD into 32 nm $SiO_2$ trench, enabling a low temperature process, and the trench was perfectly filled using electrochemical plating (ECD) under conventional conditions. Thus, it is the resultant self-forming barrier process with PEALD Cu-Mn alloy film as a seed layer for plating Cu that has further potential to meet the requirement of the smaller than 30 nm node.

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Comparison of International Guidelines of Dermal Absorption Tests Used in Pesticides Exposure Assessment for Operators

  • So, Jaehwan;Ahn, Junyoung;Lee, Tae-Hee;Park, Kyung-Hun;Paik, Min-Kyoung;Jeong, Mihye;Cho, Myung-Haing;Jeong, Sang-Hee
    • Toxicological Research
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    • v.30 no.4
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    • pp.251-260
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    • 2014
  • The number of farmers who have suffered from non-fatal acute pesticide poisoning has been reported to vary from 5.7% to 86.7% in South Korea since 1975. Absorption through the skin is the main route of exposure to pesticides for farmers who operate with them. Several in vitro tests using the skins of humans or animal and in vivo tests using laboratory animals are introduced for the assessment of human dermal absorption level of pesticides. The objective of this study is to evaluate and compare international guidelines and strategies of dermal absorption assessments and to propose unique approaches for applications into pesticide registration process in our situation. Until present in our situation, pesticide exposure level to operator is determined just using default value of 10 as for skin absorption ratio because of data shortage. Dermal absorption tests are requested to get exposure level of pesticides and to ultimately know the safety of pesticides for operators through the comparison with the value of AOEL. When the exposure level is higher than AOEL, the pesticide cannot be approved. We reviewed the skin absorption test guidelines recommended by OECD, EFSA and EPA. The EPA recommends assessment of skin absorption of pesticides for humans through the TPA which includes all the results of in vitro human and animal and animal in vivo skin absorption studies. OECD and EFSA, employ a tiered approach, which the requirement of further study depends on the results of the former stage study. OECD guidelines accept the analysis of pesticide level absorbed through skin without radioisotope when the recovery using the non-labeled method is within 80~120%. Various factors are reviewed in this study, including the origin of skin (gender, animal species and sites of skin), thickness, temperature and, etc., which can influence the integrity of results.

ErbB2 kinase domain is required for ErbB2 association with β-catenin (ErbB2의 kinase 영역이 β-catenin과 ErbB2의 결합에 필요하다)

  • Ha, Nam-Chul;Xu, Wanping;Neckers, Len;Jung, Yun-Jin
    • Journal of Life Science
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    • v.17 no.3 s.83
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    • pp.356-361
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    • 2007
  • To investigate the region of ErbB2 for the $ErbB2-{\beta}-catenin$ interaction, a proteasome $resistant-{\beta}-catenin$ and various ErbB2 constructs were transfected in COS7 cells. ErbB2 proteins were immunoprecipitated, and coimmunoprecipitated ${\beta}-catenin$ was examined by Western blotting. ${\beta}-catenin$ coimmunoprecipitated with full length ErbB2. Of the truncated ErbB2 proteins DT (1-1123), DHC (1-1031) and DK (1-750), the ErbB2 constructs containing the kinase domain, DT and DHC, precipitated together with ${\beta}-catenin$ but DK containing no kinase domain did not. To further test the requirement of the kinase domain for ${\beta}-catenin-ErbB2$ interaction, the presence of ${\beta}-catenin$ in the immunocomplex was examined following transfection with an ErbB2 mutant (${\triangle}750-971$) whose kinase domain is internally deleted and subsequent immunoprecipitation of the ErbB2 mutant. ${\beta}-catenin$ was not detected in the immunocomplex. These results suggest that the ErbB2 kinase domain comprises a potential site for ${\beta}-catenin$ binding to the receptor tyrosine kinase.

Biological Function of Carcinoembryonic Antigen-Related Cell Adhesion Molecule 6 for the Enhancement of Adipose-Derived Stem Cell Survival against Oxidative Stress (지방유래 줄기세포의 생존능 향상을 위한 CEACAM 6의 생물학적 기능에 대한 연구)

  • Koh, Eun-Young;You, Ji-Eun;Jung, Se-Hwa;Kim, Pyung-Hwan
    • Korean Journal of Clinical Laboratory Science
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    • v.51 no.4
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    • pp.475-483
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    • 2019
  • The use of stem cells in cell-based therapy has attracted extensive interest in the field of regenerative medicine, and it has been applied to numerous incurable diseases due to the inherent abilities of self-renewal and differentiation. However, there still exist some severe obstacles, such as requirement of cell expansion before the treatment, and low survival at the treated site. To overcome these disadvantages of stem cells, we used the carcinoembryonic antigen-related cell adhesion molecule 6 (CEACAM 6) gene, which functions to increase cell-cell interaction as well as anti-apoptosis. We first confirmed whether CEACAM 6 is expressed in various cell lines at the protein level (including in stem cells), followed by evaluating and selecting the optimal transfection conditions into stem cells. The CEACAM 6 gene was transfected into stem cells to prolong cell survival and preserve from damage by oxidative stress. After confirming the CEACAM 6 expression in transfected stem cells, the cell survival was assessed under oxidative condition by exposing to hydrogen peroxide (H2O2) to mimic the chronic environment-induced cellular damage. CEACAM 6 expressing stem cells show increased cell viability compared to the non-CEACAM 6 expressing cells. We propose that the application of the CEACAM 6 gene is a potential option, capable of expanding and enhancing the therapeutic effects of stem cells.

Development of Empowerment Scale Instrument and Needs Assessment of Home Economics Teachers' Empowerment (가정과교사의 임파워먼트 측정도구 개발 및 인식과 요구도 분석)

  • Park, Mi-Jeong
    • Journal of Korean Home Economics Education Association
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    • v.20 no.3
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    • pp.131-143
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    • 2008
  • The purpose of this study was to develop the empowerment scale instrument and to investigate the perception and needs regarding to the empowerment as home economics(HE) teacher. Respondents in this study were 234 HE teachers. questionnaires were collected by e-mail in the integrating online computer system. SPSS(Statistical Package for the Social Science) 10.0 package and AMOS 6.0 were used to analyze the data. Factor analysis and reliability analysis were used to develop the empowerment scale instrument. Means and Borich requirement analysis were used to describe the perception and needs regarding to the empowerment as HE teacher. The outcome and conclusion of this study after going through the above process were as follows. When classifying the empowerment in 6 factors of class operation capability, influence, specialization, ethics, belief and self-regulation, the HE teachers recognized the ethics and self-regulation as high in the current empowerment, and had high demand on influence and class operation capability in the future empowerment. In other words, influence was to heighten the status and influence in HE education by participating in various local community activities, and the class operation capability was the capability to manage the class for bring out the interests of students, that these requirements could be considered as the expression of desire to recover the price for HE teachers as the professionals before students without the negative social recognition on the HE education. In the same context, most of the HE teachers recognized the execution of the education process as the situational practitioners, and for practicing better HE education at the actual classroom situation.

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Quantitative Cyber Security Scoring System Based on Risk Assessment Model (위험 평가 모델 기반의 정량적 사이버 보안 평가 체계)

  • Kim, Inkyung;Park, Namje
    • Journal of the Korea Institute of Information Security & Cryptology
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    • v.29 no.5
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    • pp.1179-1189
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    • 2019
  • Cyber security evaluation is a series of processes that estimate the level of risk of assets and systems through asset analysis, threat analysis and vulnerability analysis and apply appropriate security measures. In order to prepare for increasing cyber attacks, systematic cyber security evaluation is required. Various indicators for measuring cyber security level such as CWSS and CVSS have been developed, but the quantitative method to apply appropriate security measures according to the risk priority through the standardized security evaluation result is insufficient. It is needed that an Scoring system taking into consideration the characteristics of the target assets, the applied environment, and the impact on the assets. In this paper, we propose a quantitative risk assessment model based on the analysis of existing cyber security scoring system and a method for quantification of assessment factors to apply to the established model. The level of qualitative attribute elements required for cyber security evaluation is expressed as a value through security requirement weight by AHP, threat influence, and vulnerability element applying probability. It is expected that the standardized cyber security evaluation system will be established by supplementing the limitations of the quantitative method of applying the statistical data through the proposed method.

Cybersecurity Architecture for Reliable Smart Factory (신뢰성 있는 스마트팩토리를 위한 사이버보안 아키텍처)

  • Kim, HyunJin;Kim, SungJin;Kim, Yesol;Kim, Sinkyu;Shon, TaeShik
    • Journal of the Korea Institute of Information Security & Cryptology
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    • v.29 no.3
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    • pp.629-643
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    • 2019
  • In the era of the 4th industrial revolution, countries around the world are conducting projects to rapidly expand smart factory to secure competitiveness in manufacturing industries. However, unlike existing factories where the network environment was closed, smart factories can be vulnerable because internal and external objects are interconnected and various ICT technologies are used. And smart factories are likely to be the subject of cyber-attacks that are designed to cause monetary damage to certain targets because economic damage is so serious when an accident occurs. Therefore, it is necessary to study and apply security for smart factories, but there is no specific smart factory system architecture, so there is no establish for smart factory security requirements. In order to solve these problems, this paper derives the smart factory architecture that can extract and reflect the main characteristics of a smart factory based on the domestic and foreign reference model of smart factories. And this paper identifies the security threats based on the derived smart factory architecture and present the security requirements to cope with them for contributing to the improvement of the security of the smart factory.

An Design of Analyzing Process by Construction Extension of Time (공기연장 분쟁의 공사기간 분석 프로세스 설계에 관한 연구)

  • Kim, Beop-su;Seong, Gi-gang;Bae, In-ho;Bang, Hong-soon;Choi, Hyeong-jin;Kim, Ok-kyue
    • Korean Journal of Construction Engineering and Management
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    • v.20 no.4
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    • pp.104-113
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    • 2019
  • Construction dispute about Extension of Time are complexly intertwined with various issues. The duration delay analysis defines the impact the issue has on the duration variation. And The international court and the arbitrator use the results of the analysis as a basis for reasonable duration judging. However, most of the domestic Construction sites have not established a business process for Extension of Time litigation. Therefore, Analysis data are collected after the occurrence of the dispute, there is not enough basic data of analysis almost. This study sought to improve the management efficiency by organizing information requirement for delay analysis and suggesting a reasonable business process. As a result of applying the proposed process to actual construction duration extension disputes, about 33% of practitioners, 46% of contractors, and 48% of legal advisors were satisfied with the process application site And Matrix validation was 91% identical. This study suggests that it is possible to increase the efficiency of the construction duration analysis work used as a basis in the construction dispute. Finally, the Computer based system design for this process should continue in the future.

A Study on Data Adjustment and Quality Enhancement Method for Public Administrative Dataset Records in the Transfer Process-Based on the Experiences of Datawarehouses' ETT (행정정보 데이터세트 기록 이관 시 데이터 보정 및 품질 개선 방법 연구 - 데이터웨어하우스 ETT 경험을 기반으로)

  • Yim, Jin-Hee;Cho, Eun-Hee
    • The Korean Journal of Archival Studies
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    • no.25
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    • pp.91-129
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    • 2010
  • As it grows more heavily reliant on information system, researchers seek for various ways to manage and utilize of dataset records which is accumulated in public information system. It might be needed to adjust date and enhance the quality of public administrative dataset records during transferring to archive system or sharing server. The purpose of this paper is presenting data adjustment and quality enhancement methods for public administrative dataset records, and it refers to ETT procedure and method of construction of datawarehouses. It suggests seven typical examples and processing method of data adjustment and quality enhancement, which are (1) verification of quantity and data domain (2) code conversion for a consistent code value (3) making component with combinded information (4) making a decision of precision of date data (5) standardization of data (6) comment information about code value (7) capturing of metadata. It should be reviewed during dataset record transfer. This paper made Data adjustment and quality enhancement requirements for dataset record transfer, and it could be used as data quality requirement of administrative information system which produces dataset.

The effect of nanoemulsified methionine and cysteine on the in vitro expression of casein in bovine mammary epithelial cells

  • Kim, Tae-Il;Kim, Tae-Gyun;Lim, Dong-Hyun;Kim, Sang-Bum;Park, Seong-Min;Lim, Hyun-Joo;Kim, Hyun-Jong;Ki, Kwang-Seok;Kwon, Eung-Gi;Kim, Young-Jun;Mayakrishnan, Vijayakumar
    • Asian-Australasian Journal of Animal Sciences
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    • v.32 no.2
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    • pp.257-264
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    • 2019
  • Objective: Dairy cattle nutrient requirement systems acknowledge amino acid (AAs) requirements in aggregate as metabolizable protein (MP) and assume fixed efficiencies of MP used for milk protein. Regulation of mammary protein synthesis may be associated with AA input and milk protein output. The aim of this study was to evaluate the effect of nanoemulsified methionine and cysteine on the in-vitro expression of milk protein (casein) in bovine mammary epithelial cells (MAC-T cells). Methods: Methionine and cysteine were nonionized using Lipoid S 75 by high-speed homogenizer. The nanoemulsified AA particle size and polydispersity index were determined by dynamic light scattering correlation spectroscopy using a high-performance particle sizer instrument. 3-(4,5-Dimethylthiazol-2-yl)-2,5-diphenyltetrazolium bromide assay was performed to determine the cytotoxicity effect of AAs with and without nanoionization at various concentrations (100 to $500{\mu}g/mL$) in mammary epithelial cells. MAC-T cells were subjected to 100% of free AA and nanoemulsified AA concentration in Dulbecco's modified Eagle medium/nutrient mixture F-12 (DMEM/F12) for the analysis of milk protein (casein) expression by the quantitative reverse transcription polymerase chain reaction method. Results: The AA-treated cells showed that cell viability tended to decrease (80%) in proportion to the concentration before nanogenesis, but cell viability increased as much as 90% after nanogenesis. The analysis of the expression of genetic markers related to milk protein indicated that; ${\alpha}_{s2}$-casein increased 2-fold, ${\kappa}$-casein increased 5-fold, and the amount of unchanged ${\beta}$-casein expression was nearly doubled in the nanoemulsified methionine-treated group when compared with the free-nanoemulsified methionine-supplemented group. On the contrary, the non-emulsified cysteine-administered group showed higher expression of genetic markers related to milk protein ${\alpha}_{s2}$-casein, ${\kappa}$-casein, and ${\beta}$-casein, but all the genetic markers related to milk protein decreased significantly after nanoemulsification. Conclusion: Detailed knowledge of factors, such nanogenesis of methionine, associated with increasing cysteine and decreasing production of genetic markers related to milk protein (casein) will help guide future recommendations to producers for maximizing milk yield with a high level of milk protein casein.