• The Journal of the Institute of Internet, Broadcasting and Communication
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• v.20 no.3
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• pp.135-140
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• 2020

Since the process gas that is essential in the semiconductor process is a harmful gas, it is an essential task to solve it in an environmentally friendly manner. Currently, the cleaning technology used in the semiconductor process is mostly a wet cleaning based on hydrogen peroxide developed in the 1970s, and the SC-1 cleaning liquid for removing particles on the surface uses a mixture of ammonia and hydrogen peroxide. Therefore, environmental problems are caused, and economic problems caused by excessive water use are also serious. For this reason, the products developed through this study are used to decompose the process harmful gas from the chamber outlet into a harmless gas before entering the vacuum pump, or by incineration and the gaseous components are deposited on the pump. I want to solve the problem. In this paper, CPS (Confined Plasma Source) is proposed to save environment and improve productivity by replacing harmful gases (N2, CF4, SF6⋯., Etc) which are indispensable in semi-contamination process with innocuous gases or incineration with plasma, to study.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.37 no.10
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• pp.1279-1289
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• 2013

In recent times, turbomolecular pumps (TMPs) have been used frequently to generate and maintain high and clean vacuum. Because of the high-speed rotation of the rotor, its structural safety should be treated as the first design concern. This paper presents the structural analysis and optimization of rotor blades of a TMP. To increase the numerical efficiency in the finite element modeling and analysis, the P-method provided in Pro/ENGINEER was used for simulation. The structural responses for several types of rotor blades were investigated, and the effects of the blade angle, blade length, and round size are thoroughly studied for each type of TMP blade. In addition, structural optimization to reduce and even the maximum stress at each stage of the TMP by changing the size of rounds between the blade and the hub was performed very successfully by using the P-method.

• Journal of Korea Soil Environment Society
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• v.5 no.1
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• pp.13-23
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• 2000

The effects of operating condition of soil vapor extraction system and the characteristics of site on the remediation of oil contaminated soil were investigated. Thorough investigation showed that the site was contaminated with gasoline leaked from underground storage tank and the maximum concentration of BTEX and TPH were 1,081 ppm and 5,548 ppm respectively. The leaked gasoline were diffused to 6m deep and the area and volume of the polluted soil were assumed to 170$m^2$ and 1,000$\textrm{m}^3$respectively. The site were consisted of three different vertitical layers, the top reclaimed sandy soil between the earth surface and 3~4m deep, middle silty sand between 3~4m and 6m deep, and the bottom bedrock below the 6m deep. The air pemeability of soil was measured to 1.058-1.077$\times$10$^{-6}$ $\textrm{mm}^2$ by vacuum pump tests. The groundwater which level was 3~4m deep was observed in some areas of this site. The soil vapor extraction system which had 7.5 HP vacuum pump and 8 extraction wells was constructed in this site and operated at 8 hrs/day for 100 days. The BTEX was removed with above 90% efficiency where no groundwater and silty sand were observed. On the contrary, the efficiency of BTEX and TPH were dramatically decreased where groundwater and silty sand were observed. The flow rate of soil air induced by soil vapor extraction system was reduced in deeper soil.

• Journal of the Korean Institute of Gas
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• v.21 no.6
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• pp.52-60
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• 2017

In diffusion process exhaust line during semiconductor manufacturing process, In order to improve the transportation efficiency in the piping by removing "The reaction by-product, $ZrO_2$ and The unreacted material, TEMAZ, TMA, $O_3$, etc" and "Powder being deposited", the piping temperature was raised to $80^{\circ}C$ or more by using the heater jacket, and the bellows at the rear end of the vacuum pump ruptured. So conducted a case study and try to prevent the similar accidents from occurring through case studies. The causes of the accident were analyzed as follows: the inflow of outside air due to the generation of a gap on the suction side of the vacuum pump and heating the pipe with the heater jacket resulted in the overpressure in the pipe due to the volumetric expansion of the gas generated by decomposition of the unreacted TEMAZ, It can be assumed that the most vulnerable bellows of the piping has been ruptured. In order to prevent such accidents, This study is aimed to identify the cause of pipeline rupture accident and to establish safety measures for the prevention of similar accidents by evaluating physical hazards of TEMAZ, which is assumed to be the cause of pipe rupture accident.

• Korean Journal of Ecology and Environment
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• v.54 no.4
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• pp.272-279
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• 2021

A pump-type eDNA filtering system that can control voltage and hydraulic pressure respectively has been developed, and applied a filter case that can filter out without damaging the filter. The filtering performance of the developed system was evaluated by comparing the eDNA concentration with the conventional vacuum-pressured filtering method at the catchment conduit intake reservoir. The developed system was divided into a voltage control (manual pump system) method and a pressure control (automatic pump system) method, and the pressure was measured during filtering and the pressure change of each system was compared. The voltage control method started with 65 [KPa] at the beginning of the filtering, and as the filtering time elapsed, the amount of filtrate accumulated in the filter increased, so the pressure gradually increased. As a result of controlling the pressure control method to maintain a constant pressure according to the designed algorithm, there was a difference in the width of the hydraulic pressure fluctuation during the filtering process according to the feedback time of the hydraulic pressure sensor, and it was confirmed that the pressure was converged to the target pressure. The filtering performance of the developed system was confirmed by measuring the eDNA concentration and comparing the voltage control method and the hydraulic control method with the control group. The voltage control method obtained similar results to the control group, but the hydraulic control method showed lower results than the control group. It is considered that the low eDNA concentration in the hydraulic control method is due to the large pressure deviation during filtering and maintaining a constant pressure during the filtering process. Therefore, rather than maintaining a constant pressure during filtering, it was confirmed that a voltage control method in which the pressure is gradually increased as the filtrate increases with the lapse of filtering time is suitable for collecting eDNA. As a result of comparing the average concentration of eDNA in lentic zone and lotic zone as a control group, it was found to be 96.2 [ng µL^-1] and 88.4 [ng µL^-1l], respectively. The result of comparing the average concentration of eDNA by the pump method was also high in the lentic zone sample as 90.7 [ng µL^-1] and 74.8 [ng µL^-1] in the lentic zone and the lotic zone, respectively. The high eDNA concentration in the lentic zone is thought to be due to the influence of microorganisms including the remaining eDNA.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.139.2-139.2
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• 2016

Electrons and phonons in chalcogenide-based materials play are important factors in the performance of an optical data storage media and thermoelectric devices. However, the fundamental kinetics of carriers in chalcogenide materials remains controversial, and active debate continues over the mechanism responsible for carrier relaxation. In this study, we investigated ultrafast carrier dynamics in an multilayered $\{Sb(3{\AA})/Te(9{\AA})\}n$ thin film during the transition from the amorphous to the crystalline phase using optical pump terahertz probe spectroscopy (OPTP), which permits the relationship between structural phase transition and optical property transitions to be examined. Using THz-TDS, we demonstrated that optical conductance and carrier concentration change as a function of annealing temperature with a contact-free optical technique. Moreover, we observed that the topological surface state (TSS) affects the degree of enhancement of carrier lifetime, which is closely related to the degree of spin-orbit coupling (SOC). The combination of an optical technique and a proposed carrier relaxation mechanism provides a powerful tool for monitoring TSS and SOC. Consequently, the response of the amorphous phase is dominated by an electron-phonon coupling effect, while that of the crystalline structure is controlled by a Dirac surface state and SOC effects. These results are important for understanding the fundamental physics of phase change materials and for optimizing and designing materials with better performance in optoelectronic devices.

• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.102.2-102.2
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• 2015

진공 시스템의 기저상태를 지배하는 것은 대부분의 경우 용기 내면에 수십 단원자 층 정도로 흡착되어 있는 물이다. 용기 압력이 10-9 mbar 대가 될 때까지는 잔류기체의 90% 이상이 수분이고 압력을 10분의 1로 떨어뜨리려면 10배의 시간이 더 필요하다는 소위 1/t 법칙은 광범위한 흡착에너지를 가지는 물분자의 표면방출 특성으로 잘 설명되어진다. 용기가열 등 적극적인 표면처리를 하지 않고 전형적인 압력변화 양상은 그대로 유지하면서 절대적인 시간을 줄이는 가장 직접적인 방법은 물 배기속도를 가능한 한 높이는 것이지만 대부분의 고진공 펌프들에서 물배기속도만 더 증가하도록 만드는 것은 쉽지 않다. 크라이오 워터펌프(CWP: cryo-water pump)는 바로 이런 고민을 제대로 해결할 수 있는 유일한 실용적인 방안이라고 말할 수 있다. 다른 기체분자들의 배기는 일단 염두에 두지 않고 물배기만을 열심히 해서 배기시간을 단축하고 도달 진공도를 낮추는 것을 목표로 하는 장치가 CWP이다. CWP는 모든 기체에 반응하는 정통적인 크라이오 펌프에 비해 훨씬 간단하고 저렴하게 만들 수 있으면서도 진공 시스템에 큰 영향을 미칠 수 있지만 그동안은 물배기의 필요성에 대한 인식이 미흡하고, 또 부수적이고 추가적인 비용이 드는 것으로 생각되어 주목을 받지 못했지만 디스플레이와 반도체 산업을 필두로 물분압을 낮추고 생산수율을 높이는 것에 점점 더 관심이 높아지면서 CWP에 대한 수요도 높아지고 있다. CWP의 물배기는 아주 단순한 응축현상에 의존하므로 물리적으로 이해하고 성능을 예측하는 것이 직관적이지만 사용용도에 따라 물 이외의 기체분자들은 잘 통과시키면서 물배기는 최대화하는 최적설계가 요구되거나 터보분자펌프(TMP)와 같이 이질적인 고진공펌프와 조합하여 사용하는 경우 기체 온도 의존성을 고려해야 하는 등 까다로운 점이 있다. 본 보고에서는 CWP+TMP로 구성된 복합진공배기시스템을 설계하면서 CWP만의 물배기성능과 복합 시스템의 물 및 알곤 배기성능을 예측하고, 두 펌프의 상호관계에 대해 분석하며, 실제 만들어진 복합배기시스템을 사용하여 실험적으로 구한 물 및 알곤 배기속도 측정결과에 대해서도 간단하게 논의하려고 한다.

• Archives of Plastic Surgery
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• v.43 no.5
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• pp.466-469
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• 2016

External volume expansion of the recipient site by suction has been proposed as a way of improving fat graft survival. The objective of this study was to present an innovative and simple intraoperative external expansion system to enhance small-volume autologous fat grafting (40-80 mL) and to discuss its background and its mechanism of action. In this system, expansion is performed using a complete vacuum delivery system known as the Kiwi VAC-6000M with a PalmPump (Clinical Innovations). The recipient site is rapidly expanded intraoperatively 10 times for 30 seconds each with a negative pressure of up to 550 mm Hg before autologous fat injection. During this repetitive stimulation, the tissues become grossly expanded, developing macroscopic swelling that regresses slowly over the course of hours following the cessation of the stimulus. The system sets various mechanisms in motion, including scar release, mechanical stimulation, edema, ischemia, and inflammation, which provide an environment conducive for cell proliferation and angiogenesis. In order to maintain the graft construct in its expansive state, all patients are encouraged postoperatively to use the Kiwi three times daily for one minute per session over the course of three days. The handling of this system is simple for both the patients and the surgeon. Satisfactory clinical outcomes have been achieved without significant complications.

• Journal of the Korean Vacuum Society
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• v.12 no.2
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• pp.144-149
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• 2003

Carbon tips were grown on Si cantilevers by applying an electron beam to them directly with Scanning Electron Microscope. A carbon tip was fabricated by aligning the electron beam directly down the vertical axis of Si cantilever and then irradiating a single spot on the cantilever for a proper time in the dominant atmosphere of residual gases generated by the oil of the diffusion pump. A number of control parameters for SEM, including exposure time, acceleration voltage, emission current, and beam probe current, were allowed to make various aspect ratio feature. The growth of carbon tips was not affected by the surface morphology of substrates. We could acquired the tip whose effective length is 0.5 $\mu\textrm{m}$, bottom diameter is 90 nm and cone half angle $3.5^{\circ}$ The growth technique of the high aspect ratio carbon tips on the tip-free cantilevers is available to reduce the complexities of fabricating sub-micron scale tips on the PZT thin film actuator integrated AFM cantilevers.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.243-243
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• 2010

Low-temperature grown (LTG) InGaAs epilayers were grown by MBE technique for studying a correlation between terahertz (THz) emission and the intrinsic defects. The 1.2-um-thick Be-compensated LTG-InGaAs epilayers were prepared on SI-InP:Fe substrate at $200-250^{\circ}C$, and subsequently in-situ annealed under As environment at $550^{\circ}C$ for 5-30 minutes. The carrier concentration/mobility and the crystalline structure were analyzed by the Hall effect and the x-ray diffraction (XRD), respectively, and the carrier lifetime were determined by the fs time-resolved pump-probe spectroscopy. THz generation from LTG-InGaAs was carried out by a Ti-sapphire laser (800 nm) of a pulse width of 190 fs at a repetition of 76 MHz. Figure shows the spectral amplitude of generated waves in the THz region. As the growth temperature of epilayer increases, the amplitude is enhanced. However, two samples grown at $200^{\circ}C$, as-grown and annealed, show almost no difference in the spectral amplitude. This suggests that the growth temperature is critical in the formation of defect states involved in THz emission. We are now investigating the correlations between the XRD band attributed to defects, the Hall parameter, and the spectral amplitude of generated THz wave.