• Applied Science and Convergence Technology
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• 제23권6호
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• pp.340-344
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• 2014

Ion pumps continue to be a staple in ultra-high vacuum (UHV) applications. Since their adoption as a primary UHV pump in the 1960's, it has been known that a variety of particles can emanate from within the ion pump and cause undesirable effects on current measurements and optics components. Historically the solution has been baffling and shielding which results in longer conductance paths to the ion pump. Those solutions can work, but require a larger pump and more vacuum plumbing to compensate for conductance losses. The first step was to fully understand the nature of the particles and their charges. Once those were characterized options for emissions reduction were evaluated. It was determined that an efficient design of shielding near the source of the particle generation site was the most cost effective solution. With a slight modification to the chamber of a small ion pump, internal shielding was developed that reduced the emissions by a factor of up to 1000 times.

• 한국유체기계학회 논문집
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• 제3권2호
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• pp.50-56
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• 2000

The effects of lobe shapes on the leak flow conductance of Roots-type vacuum pump are studied numerically and experimentally. The modelled lobe shape of Roots-type vacuum pump is two-lobe spur gear. The numerical analyses are performed on leak flows in Roots-type vacuum pump. It is numerically calculated using a 4th-order Runge-Kutta method and is compared with experimental results. Results show that for the case of involute lobe shape the total amount of the leak flow conductance is greater than that of cycloid and Cassini oval lobe shapes.

• International journal of advanced smart convergence
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• 제7권4호
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• pp.84-91
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• 2018

In this paper, we simulated three different HV systems and analyzed of each vacuum characteristics by VacCAD modelling. In each of modelled vacuum systems, selection of chamber materials, combination of rough pump with high vacuum pump and conductance of roughing line (diameter and length) were proposed as system variables. In the modelling of chamber materials, the pumping times to ultimate pressures of different chamber materials (stainless steel, aluminum) were compared by the variations of chamber volume. In this model, the effects of outgassing dependent on the chamber materials was also simulated and aluminum was estimated to optimum chamber materials. It was also obtained that modelling of vane and roots pump with diffusion pump and diameter, length of $50{\times}250$ [mm]roughing line were characterized as optimum variables to reach the ultimate pressure of 10E-7 [mbar] most effectively. Optimum design factors for vacuum characteristics of modelled vacuum system were achieved by VacCAD simulations. Feasibility of VacCAD as vacuum simulator was verified and applications of VacCAD expected to be increased to fields in vacuum needed.

• 한국진공학회지
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• 제8권3B호
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• pp.257-261
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• 1999

The claw pump, one of oil-less dry pumps developed to solve problems found in vacuum systems pumped by oil-sealed rotary pumps, has been widely used separately or as a part of compound structure with a roots pump. The claw pump has some merits such as a high pumping speed, a high compression ratio, and relatively little heat generation. The high compression ratio of the claw pump is compression ratio, and relatively little heat generation. The high compression ratio of the claw pump is based on efficient sweeping action of the special type rotor and an intrinsic self-valving mechanism. The contour of the rotor with claw-type blade is designed basically to make two rotors revolve smoothly without touching with each other, and related dimensions are determined by required pumping speed, compression ratio, power demand and diameter of the rotor axis. In this paper the procedure of designing the rotor of the claw pump is described and factors influencing the pump performance are analyzed.

• Transactions on Electrical and Electronic Materials
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• 제14권6호
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• pp.334-338
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• 2013

In this study, the outgassing effects of selected vacuum materials on the vacuum characteristics were simulated by the $VacSim^{Multi}$ simulation tool. This investigation examined the feasibility of reliably simulating the outgassing characteristics of common vacuum chamber materials (aluminum, copper, stainless steel, nickel plated steel, Viton A). The optimum design factors for these vacuum systems were suggested based on the simulation results. The baking-out effects of the modeled systems and materials on the performance of the vacuum system were also analyzed. The simulation predicted that the overall outgassing effect was more significant in the turbomolecular pump system than in the diffusion pump system and that the utilization of a booster pump has a greater effect on the evacuation time than on the ultimate pressure.

• 한국유체기계학회 논문집
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• 제14권5호
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• pp.18-23
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• 2011

A CFD analysis method is developed and applied for investigating the gas flow and the byproduct particle trajectory in Roots type vacuum pump. The internal fluid flow and thermal fields between the rotors and the housing of vacuum pump are analyzed by using the dynamic mesh, the numerical methods for unsteady 2-D Navier-Stokes equation and the standard k-$\varepsilon$ turbulence model of the Fluent code. Coupled with the flow simulation results, the particle trajectory of the byproduct flowing into the pump with gas stream is analyzed by using discrete phase modeling technique. The CFD analysis results show the pressure, the velocity and the temperature distributions in pump change abruptly due to the rotation of rotors, and back flows are produced due to the strong reverse pressure gradients at rotor/rotor and rotor/housing clearances. The predicted byproduct particle trajectory results also show the particles impinge on the clearance surfaces between the housing and the rotor of pump and then may form the deposit layer causing the failure of pump.

• 한국철도학회논문집
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• 제13권5호
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• pp.516-520
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• 2010

튜브 구조물의 압력을 대기압 이하로 유지하는데에 사용될 진공 펌프의 용량을 설정하기 위한 파라메타 연구를 수행하였다. 최근 철도 기술 연구자들은 초고속 수송 시스템의 하나인 튜브 열차 시스템에 관심을 가지게 되었다. 초고속을 달성하기 위하여 튜브 내부를 저압으로 유지할 필요가 있는데, 저압에서는 공기 저항이 극단적으로 줄어들기 때문이다. 진공 펌프 시스템은 튜브 내부를 저압으로 만들고, 누설을 보충하는 역할을 한다. 일련의 연구결과, 다양한 파라메타에 대한 진공 펌프의 용량을 구하였다. 이 결과들은 공기 저항 저감 효과를 분석하는데에 적용될 것이다.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회B
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• pp.3134-3138
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• 2007

The objective of this paper is to elucidate the characteristic performance of the mini-vacuum pump with various heights of eccentric shaft. The mini-diaphragm pump is composed of DC motor, eccentric shaft and diaphragm and it is operated by PCB panel. The height of eccentric shaft is changed that controls the quantities of air flow to improve the performance of vacuum pressure. This device is manufactured in order to embody the vacuum pressure with 200 mmHg. The heights of eccentric shaft which is used in present experiment are located in the range from 3 mm to 5.5 mm. The vacuum pressure distributions with each height of eccentric shaft was measured and the results were graphically depicted.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 추계학술대회 논문집
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• pp.934-937
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• 2005

It is not efficient and scarcely out of the question to use commercial expensive electron beam lithography system widely used for semiconductor fabrication process for the manufacturing application field of various devices in the small business scope. Then scanning electron microscope based electron beam machining system is maybe regarded as a powerful model can be used for it simply. To get a complete suite of thus proper system, proper chamber with high vacuum condition is necessarily required more than anything else to modify scanning electron microscope. In this study, special chamber unit using rotary pump and diffusion pump to obtain high vacuum degree was designed and manufactured and various evaluation tests fur recognize the vacuum characteristic were accomplished.

• 한국진공학회지
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• 제17권4호
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• pp.278-291
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• 2008

반도체 소자 제조 공정을 진행하기 위해서는 수많은 진공 시스템이 사용되어야 하고 이로 인하여 많은 소비전력을 필요로 한다. 소비전력 문제는 환경 문제와도 연관되기 때문에 반도체 소자 제조업체들 입장에서는 깊은 관심을 가지고 해결해야 할 사항으로 여러 가지 방안들이 제안되고 있다. 진공 펌프 제조업체들 입장에서는 진공 펌프의 설계/제작에 있어 소비 전력절감을 감안하게 되지만, 반도체 팹(fab)내부에서 소비 전력을 줄이기 위해서는 진공 펌프를 사용하는 사용자의 사용 방법 및 환경도 매우 중요하다. 본 연구에서는 반도체 소자 제조 공정에 사용되는 진공 펌프의 소비 전력을 줄이는 여러 가지 방법들에 대해 간략하게 설명하고 반도체 산업의 기술 발전 방향이 진공 펌프 소비 전력에 미치는 영향을 살펴보고자 한다.