1 |
"Watts Wrong With Pumps - Hidden Joules," Christopher Case, SEMI, April, 19th, (2006)
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"Optimized 300mm vacuum pumping requires an understanding of choices," David J. Hilton(Busch Semiconductor Vacuum Group), Semiconductor Fabtech, 24th ed
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3 |
Thomas Dreifert, et al., "ScrewLine Vacuum Pumps in Industrial Applications", 2005 WILEY-VCH Verlag GmbH & Co., KGaA, Weinheim(2005)
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4 |
SEMI S2 - Environment, Health and Safety Guideline for Semiconductor Manufacturing Equipment
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"Measurement of conservation of energy by semiconductor manufacturing equipment and setting of targets for improvements," Philip Naughton, Semiconductor Fabtech, 29th ed
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SEMI S23 - Guide for Conservation of Energy, Utilities and Materials used by Semiconductor Manufacturing Equipment : Purchase requirement for most device markers worldwide. Quantification of energy, utilities & materials consumption, as well as measurement, monitoring together with ongoing target settings for improvements
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7 |
Ohmi Tadahiro and Hirayama Masaki, "Vacuum apparatus", US patents, US2004/0191079 A1, Sep. 30(2004)
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8 |
L. Kubina and S. Kovac, "Decreasing energetic demands for vacuum pumps being used in machine milking with utilization of a frequency converter", Res. Agr. Eng., 48(3), 103(2002)
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9 |
"Energy Solutions for California Industry : Ways to improve operations and profitability", The California Energy Commission and the U.S. Department of Energy, Office of Industrial Technologies Best Practice Present, August, 2001
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10 |
SEMI Workshop on Energy Conservation Ideas - Device Manufacturers, Equipment Manufactures, Sub-Systems & Component Suppliers : "Are you ready for SEMI Standards S23 & ITRS Energy Reduction Target?", October, 25, 2005, Leuven Belgium
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11 |
SEMI E6 - Guide for Semiconductor Equipment Installation Documentation
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12 |
Ohmi Tadahiro, "Vacuum device and vacuum pump", US patents, US2006/0182639 A1, Aug. 17(2006)
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13 |
Ohmi Tadahiro, "Screw vacuum pump", US patents, US2006/0216189 A1, Sep. 28(2006)
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14 |
"The future of energy", Robert Haavind, Solid State Technology, November(2005)
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15 |
"Optimize Vacuum Systems, Increase Productivity and Save Energy", 2004 Wisconsin Focus on Energy BP3431-0904
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16 |
SEMI E51 - Guide for typical Facilities Services and Termination Matrix
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17 |
Phil Naughton, Freescale Semiconductor, "Greening our cleanrooms : Tools to help us improve cleanroom energy performance," Future Fab International, vol. 21, 1st, July (2006)
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