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http://dx.doi.org/10.5757/JKVS.2008.17.4.278

How to reduce the power consumption of vacuum pump in semiconductor industry  

Joo, J.H. (Edwards Korea Ltd.)
Kim, Hyo-Bae (Edwards Korea Ltd.)
Kim, J.C. (Edwards Korea Ltd.)
Publication Information
Journal of the Korean Vacuum Society / v.17, no.4, 2008 , pp. 278-291 More about this Journal
Abstract
For the semiconductor manufacturing processes, so many vacuum systems are needed with large power consumption for vacuum pumps. Semiconductor device manufacturing makers are concerned about the power consumption and have to address this because it is related with the environmental issues. So many solutions including the design and the control of them by vacuum pump manufacturers to reduce the power consumption of vacuum pump are proposed. However, how to use vacuum pumps by users and the conditions for vacuum pump to be used are also very important to reduce the power consumption. In this article, how to reduce the power consumption of vacuum pumps is explained briefly and what the impact of semiconductor technology trend on the power consumption is considered very briefly.
Keywords
vacuum pump; power consumption; energy; semiconductor industry;
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  • Reference
1 "Watts Wrong With Pumps - Hidden Joules," Christopher Case, SEMI, April, 19th, (2006)
2 "Optimized 300mm vacuum pumping requires an understanding of choices," David J. Hilton(Busch Semiconductor Vacuum Group), Semiconductor Fabtech, 24th ed
3 Thomas Dreifert, et al., "ScrewLine Vacuum Pumps in Industrial Applications", 2005 WILEY-VCH Verlag GmbH & Co., KGaA, Weinheim(2005)
4 SEMI S2 - Environment, Health and Safety Guideline for Semiconductor Manufacturing Equipment
5 "Measurement of conservation of energy by semiconductor manufacturing equipment and setting of targets for improvements," Philip Naughton, Semiconductor Fabtech, 29th ed
6 SEMI S23 - Guide for Conservation of Energy, Utilities and Materials used by Semiconductor Manufacturing Equipment : Purchase requirement for most device markers worldwide. Quantification of energy, utilities & materials consumption, as well as measurement, monitoring together with ongoing target settings for improvements
7 Ohmi Tadahiro and Hirayama Masaki, "Vacuum apparatus", US patents, US2004/0191079 A1, Sep. 30(2004)
8 L. Kubina and S. Kovac, "Decreasing energetic demands for vacuum pumps being used in machine milking with utilization of a frequency converter", Res. Agr. Eng., 48(3), 103(2002)
9 "Energy Solutions for California Industry : Ways to improve operations and profitability", The California Energy Commission and the U.S. Department of Energy, Office of Industrial Technologies Best Practice Present, August, 2001
10 SEMI Workshop on Energy Conservation Ideas - Device Manufacturers, Equipment Manufactures, Sub-Systems & Component Suppliers : "Are you ready for SEMI Standards S23 & ITRS Energy Reduction Target?", October, 25, 2005, Leuven Belgium
11 SEMI E6 - Guide for Semiconductor Equipment Installation Documentation
12 Ohmi Tadahiro, "Vacuum device and vacuum pump", US patents, US2006/0182639 A1, Aug. 17(2006)
13 Ohmi Tadahiro, "Screw vacuum pump", US patents, US2006/0216189 A1, Sep. 28(2006)
14 "The future of energy", Robert Haavind, Solid State Technology, November(2005)
15 "Optimize Vacuum Systems, Increase Productivity and Save Energy", 2004 Wisconsin Focus on Energy BP3431-0904
16 SEMI E51 - Guide for typical Facilities Services and Termination Matrix
17 Phil Naughton, Freescale Semiconductor, "Greening our cleanrooms : Tools to help us improve cleanroom energy performance," Future Fab International, vol. 21, 1st, July (2006)