• 한국초전도ㆍ저온공학회논문지
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• 제24권4호
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• pp.65-70
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• 2022

A vacuum system is designed for thermal insulation of a 10 ton/day class air liquefaction cold box for liquid air energy storage. The vacuum system is composed of a turbomolecular pump, a backing pump and vacuum piping for the vacuum pumps. The turbomolecular pump is in combination with the backing pump for pumping capacity. The vacuum piping is designed with system installation conditions, such as distance from the cold box, connections to vacuum pumps and installation space. The capacity of the vacuum pump combination, namely pumping speed, is determined by analysis of the vacuum system, and pump-down time to 1×10^-5 mbar is estimated. Vacuum piping conductance, system pumping speed and outgassing rate are calculated for the pump-down time with the ultimate pumping speed range of the vacuum pump combination of 1400 - 2300 l/s. Although the pump-down time gets shorter by larger capacity vacuum pumps, it mainly depends on target vacuum degree and outgassing rate in the cold box. The pump-down time is estimated as 3 - 6 hours appropriate for cold box operation for the pumping speed range. Considering the outgassing rate has uncertainty, the vacuum pump combination with pumping speed of 1900 l/s is chosen for the vacuum system, which is middle value of the pumping speed range.

• 한국진공학회지
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• 제17권4호
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• pp.292-301
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• 2008

반도체 및 디스플레이 공정과 같이 진공의 높은 청결도의 진공이 필수적으로 요구되어 지는 산업분야가 확대됨에 따라 건식진공펌프의 중요성은 급격히 증대되어 왔다. 다단루츠형 진공펌프와 함께 건식진공펌프 양대 축의 하나를 형성하는 스크류형 건식진공펌프는 공정부산물 발생이 많은 고 난이도 응용분야에서 그 장점을 발휘하여 왔다. 최근 들어 에너지 효율이 획기적으로 개선된 스크류형 건식진공펌프의 개발이 활발히 진행되고 있다. 이 총설논문에서는 스크류형 건식진공펌프의 전반적 기술사항들을 살펴보고 실제 반도체 공정에의 응용 및 스크류형 건식진공펌프의 향후 발전 방향에 대하여 살펴보았다.

• 한국진공학회지
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• 제19권4호
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• pp.265-274
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• 2010

반도체소자 및 디스플레이 제조공정의 핵심 환경인 진공을 형성 유지하기 위한 건식진공펌프는 높은 성능과 신뢰성을 필요로 한다. 건식진공펌프의 개발을 위해서는 다양한 고려와 세밀한 기술적 검토가 필요하다. 본고에서는 반도체 및 디스플레이 제조 공정용 건식진공펌프 개발 과정을 단계별로 소개하고 향후 기술발전 방향에 대해 소개하고자 한다.

• 한국소음진동공학회논문집
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• 제21권12호
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• pp.1112-1119
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• 2011

The goal of this study is the stability evaluation of a vacuum pump through modal test and rotor dynamics. Roots type vacuum pump, which is a dry vacuum pump, is necessary for the manufacturing process of the semiconductor and the display. Eigenvalue was solved by the finite-element method(FEM) using 2D and 3D models, then the modal test result was compared with the FEM result. According to the comparison, the analysis result using the 2D was more accurate than the 3D model. Therefore, rotor dynamics was performed by the 2D model. Campbell diagram and root-locus maps, which were calculated by complex-eigenvalue analysis, were used to evaluate the stability of the rotors of the vacuum pump. And displacement solved by unbalance response analysis was compared with the minimum clearance between two rotors of the vacuum pump. Thus, the vacuum pump is assumed operated under steady state through the evaluation of the rotor dynamics.

• 한국전기전자재료학회논문지
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• 제24권6호
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• pp.449-457
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• 2011

Effect of pump combinations on the vacuum characteristics of vacuum system was simulated for optimum design of system. In this investigation, the feasibility of modelling mechanism for VacSimMulti simulator was proposed. Simulation results of various pumping combinations showed the possibilities and reliabilities of simulation for the performance of vacuum system in specific semiconductor processing. Simulation of roughing pump presented the expected pumping behaviors based on commercial specifications of employed pumps. Application of booster pump exhibited the high pumping efficiency for middle vacuum range. Combinations of optimum backing pump for diffusion and turbo vacuum system were obtained. And, the predictable characteristics of process application of both simulated systems were also acquired.

• 한국기계가공학회지
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• 제14권2호
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• pp.67-74
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• 2015

In this study, analysis and experiments were carried out on temperature distributions and thermal deformations in a dry vacuum pump with vertical screws for safe operation. When a vacuum pump is working, it is necessary to get rid of the heat generated by the friction of bearings and the compression of air to prevent the vacuum pump from being damaged by interference between two screws and housing through thermal deformation. Additional cooling was proposed by using oil flow through the inner channel of the rotating axis for lower temperature control of the vacuum pump. Analysis and experimental results were compared in terms of temperature distribution and thermal deformation of the vacuum pump, and two sets of results matched reasonably well. These results for a dry vacuum pump with vertical screws can be used in similar model development and can minimize errors in design and manufacture by providing reasonably accurate prediction in advance.

• 유체기계공업학회:학술대회논문집
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• 유체기계공업학회 2006년 제4회 한국유체공학학술대회 논문집
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• pp.287-290
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• 2006

Orbiter mechanism has been applied to vacuum pump design for small oxygen generator where low vacuum of about 200mmHg is required. Performance of the designed vacuum pump has been numerically investigated: calculated volumetric and adiabatic efficiencies were 69.7% and 83.9%, respectively for leakage clearance of $10{\mu}m$. Total efficiency of the orbiter vacuum pump was 77.5%. At the shaft speed of 1700 rpm suction displacement volume of 6.3cc provided discharge flow at the rate of 2.3 liter/min with power consumption of 10.1Watt. Torque variation of the orbiter pump was only about 20% of that of diaphragm pump.

• 한국유체기계학회 논문집
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• 제9권5호
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• pp.28-35
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• 2006

Orbiter mechanism has been applied to vacuum pump design for small oxygen generator where low vacuum of about 200 mmHg is required. Performance of the designed vacuum pump has been numerically investigated: calculated volumetric and adiabatic efficiencies were 69.7% and 83.9%, respectively for leakage clearance of $10{\mu}m$. Total efficiency of the orbiter vacuum pump was 77.5%. At the shaft speed of 1700 rpm suction displacement volume of 6.3cc provided discharge flow at the rate of 2.3 liter/min with power consumption of 10.1Watt. Torque variation of the orbiter pump was only about 20% of that of diaphragm pump.

• 한국산업융합학회 논문집
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• 제25권6_2호
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• pp.1063-1069
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• 2022

In modern industry, vacuum has grown into an indispensable industrial field. The performance of the vacuum pump in the degasser system among mud treatment system facilities was verified by a numerical analysis method. The degasser system is an equipment for removing the gas contained in the mud, and it is a work process that requires a vacuum. This study analyzed the vacuum pump performance of the degasser used in drilling for resource development of onshore and offshore plants. The vacuum pump used in the degasser system was designed with a discharge rate of 0.099kg/s. The DM(Design Modeler) program of ansys workbench 17.2 was used to modify the model of the vacuum pump used in the degasser system. And for performance analysis, CFX, which is known to be suitable for rotating system analysis, was used. Finally the performance analysis results of the vacuum pump and the prototype performance test results were compared and analyzed.

• 진공이야기
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• 제2권4호
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• pp.39-46
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• 2015

After stepping into a new field of vacuum 30 years ago, our company has grown up steadily as a specialized vacuum industry, and now we can provide vacuum devices covering most of the pressure range. We are planning to put out high level dry pump like a multistage Roots pump on the market in the near future. Procedures of technology development for designing, fabricating, and testing the multistage Roots pump of 600 L/min class will be briefly reported. Core items of the technical development on the multistage Roots pump are as follows; elaborated profile design of 3-lobe rotors using an involute curve, optimization of rotor dimensions, especially for clearances and rotor width, considering the pumping speed, compression ratio and heat load, and establishment of a standardized test system. At present, the multistage Roots pump is about to come into commercialization.