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http://dx.doi.org/10.5757/JKVS.2008.17.4.292

Screw-type Dry Vacuum Pump Technology and Application in Semiconductor Process  

Noh, Myung-Keun (LOT vacuum Co., Ltd.)
Hwang, Tae-Kyoung (LOT vacuum Co., Ltd.)
Park, Jea-Woo (LOT vacuum Co., Ltd.)
Publication Information
Journal of the Korean Vacuum Society / v.17, no.4, 2008 , pp. 292-301 More about this Journal
Abstract
As the industry requiring clean vacuum condition like semiconductor and display manufacturing expands, importance of dry vacuum pumps has been increased. Screw-type dry vacuum pump, occupying major share with multi-stage roots pump in dry-pump market, has big strength specially in harsh application area accompanying serious by-product accumulation. Recently, development in screw-type pump has been focused on improving energy efficiency. In this article, technology of screw-type dry vacuum pump is reviewed and the requirement for actual industrial application is considered. In addition, the expected evolution for screw-type dry pump in near future is also described.
Keywords
Drypump; Vacuum pump; Screw-type vacuum pump; Screw-rotor; Backing pump;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
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