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수직형 건식 진공 스크류 펌프의 열특성에 대한 연구

A Study on the Thermal Characteristics of Dry Vacuum Pump with Vertical Screws

  • 장문석 (창원대학교 기계공학과 대학원) ;
  • 박재현 (창원대학교 기계공학과 대학원) ;
  • 김수태 (창원대학교 기계공학부) ;
  • 김일곤 (창원대학교 물리학과) ;
  • 조성진 (경성대학교 에너지과학과)
  • 투고 : 2014.12.08
  • 심사 : 2015.03.05
  • 발행 : 2015.04.30

초록

In this study, analysis and experiments were carried out on temperature distributions and thermal deformations in a dry vacuum pump with vertical screws for safe operation. When a vacuum pump is working, it is necessary to get rid of the heat generated by the friction of bearings and the compression of air to prevent the vacuum pump from being damaged by interference between two screws and housing through thermal deformation. Additional cooling was proposed by using oil flow through the inner channel of the rotating axis for lower temperature control of the vacuum pump. Analysis and experimental results were compared in terms of temperature distribution and thermal deformation of the vacuum pump, and two sets of results matched reasonably well. These results for a dry vacuum pump with vertical screws can be used in similar model development and can minimize errors in design and manufacture by providing reasonably accurate prediction in advance.

키워드

참고문헌

  1. ISO 3529 II, "Vacuum Technology; Vocabulary Part II"
  2. Myeong-geun Noh, Tae-gyeong Hwang, Jeu Park, "Screw-type Dry Vacuum Pump Technology and Application in Semiconductor Process", Kor. Vac. Soc., No. 17, Vol. 4, pp. 292-301, 2008 https://doi.org/10.5757/JKVS.2008.17.4.292
  3. Myeong-geun Noh, Tae-gyeong Hwang "Dry Vacuum Pump Development trends at domestic and foreign" Kor. Vac. Soc., No. 43, Summer Conference, Invited Speaker, VS-001, pp. 90, 2012
  4. Byeon-guk Kim, An-seong Lee, Myeong-geun Noh, "A Rotordynamic Analysis of Dry Vacuum Pump Rotor-Bearing System for High-Speed Operation", Journal of the KSFM, Vol. 10, No. 3, pp. 47-54, 2007.
  5. Seong-hui Baek, Sang-ryeol In, Gwang-hwa Jung, "Vacuum Engineering", The Korea Economic Daily, 2004
  6. Shuji Haga, "Introduction of the Oil-Free Scroll Vacuum Pump", JKVST, Vol. 6, No. 4, pp. 158-161, 2002
  7. Dirk Stratmann, Knutkauder, Andreas Brummer, "Operating Performance of Screw Vacuum Pumps", Vacuum in Forschung and Praxis 20, No. 6, pp. 19-25, 2008
  8. Tedric A. Harris, "Rolling Bearing Analysis", John Wiley & Sons, Inc, 2001
  9. NSK, "Super Precision Bearings" CAT. NO. 1254K 2006
  10. Michael J. Moran, Howard N. Shapiro, "Fundamentals of Engineering Thermodynamics", Wiley 6th edition, 2008
  11. Frank Kreith, Mark S. Bohn, "Principles of Heat Transfer", West info Access 5th edition, 1993
  12. K. Rabiger a, b, T.M.A Maksoudb, J. Wardb, Hausmannc, "Theoretical and Experimental Anslys of a Multiphase Screw Pump, Handling Gas - Liquid Mixtures with Very High Gas Volume Fractions", Experimental Thermal and Fluid Science 32, pp. 1694-1701, 2008 https://doi.org/10.1016/j.expthermflusci.2008.06.009

피인용 문헌

  1. 헤어드라이기의 팬 형상에 따른 열변형에 관한 연구 vol.16, pp.3, 2015, https://doi.org/10.14775/ksmpe.2017.16.3.082