• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.282-282
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• 2010

결정질 태양전지는 상대적으로 고효율이 보장되며, 낮은 공정 비용 등의 이유로 널리 사용되고 있는 기술이다. 결정질 태양전지의 효율을 증가시키는 공정 방법에는 표면 구조화, 도핑 농도, 반사방지막, 금속전극 형성 등이 있다. 특히, 도핑 공정에서 도핑 농도를 변화시킬 수 있으며, 이에 의하여 면 저항값을 변화 시킬 수 있다. 본 연구에서는 결정질 태양 전지에서 도핑 농도의 조절에 의한 이상적인 sheet resistance를 얻기 위한 실험을 진행하였다. 3개의 실험 set을 두고 각각의 경우를 실험하였다. 본 연구에서는 Pre-deposition과 drive-in 방법을 사용한 doping의 2가지 step으로 실험을 진행하였다. pre-deposition의 시간 condition은 21분으로 하였다. $N_2$ 분위기에서 $O_2$와 $POCl_3$ 의 비율을 각각 100sccm, 200sccm으로 하여 실험을 진행하였다. 변수인 온도의 경우는 각각의 set에 대하여, $830^{\circ}C$, $840^{\circ}C$, $850^{\circ}C$ 로 가변하였다. pre-deposition을 끝낸 뒤, sheet resistance의 값은 각각 $75{\sim}90\;\Omega/square$, $68{\sim}75\;\Omega/square$, $56{\sim}63\;\Omega/square$의 값을 나타내었다. 도핑의 경우에는 drive-in 방법을 사용하였으며, 모든 경우에서 20분에서 $890^{\circ}C$에서 진행하였다. 최종 sheet resistance의 값은 각각의 경우 최대 $33\;\Omega/square$, $34\;\Omega/square$, $30\;\Omega/square$의 값을 나타내었다. $40{\sim}45\;\Omega/square$ 정도의 sheet resistance가 많은 연구에서 이상적인 sheet resistance로 연구되고 있다. 본 연구에서 두 번째 조건이 이상적인 sheet resistance에 가장 접근 하였음을 확인 할 수 있다.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.285-285
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• 2013

Recently, hexagonal boron nitride (h-BN), which is III-V compound of boron and nitride by strong covalent sp2 bonds has gained great interests as a 2 dimensional insulating material since it has honeycomb structure with like graphene with very small lattice mismatch (1.7%). Unlike graphene that is semi-metallic, h-BN has large band gap up to 6 eV while providing outstanding properties such as high thermal conductivity, mechanical strength, and good chemical stability. Because of these excellent properties, hBN can potentially be used for variety of applications such as dielectric layer, deep UV optoelectronic device, and protective transparent substrate. Low pressure and atmospheric pressure chemical vapor deposition (LPCVD and APCVD) methods have been investigated to synthesize h-BN by using ammonia borane as a precursor. Ammonia borane decomposes to polyiminoborane (BHNH), hydrogen, and borazine. The produced borazine gas is a key material that is a used for the synthesis of h-BN, therefore controlling the condition of decomposed products from ammonia borane is very important. In this paper, we optimize the decomposition of ammonia borane by investigating temperature, amount of precursor, and other parameters to fabricate high quality monolayer h-BN. Synthesized h-BN is characterized by Raman spectroscopy and its absorbance is measured with UV spectrophotometer. Topological variations of the samples are analyzed by atomic force microscopy. Scanning electron microscopy and Scanning transmission Electron microscopy are used for imaging and analysis of structures and surface morphologies.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.233-233
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• 2010

CdS thin films were deposited on glass substrates by R.F. magnetron sputtering method and some of the samples were treated by rapid thermal annealing (RTA) process. Effects of thermal annealing on structural and optical properties were investigated at different temperatures ranging from 100 to $600^{\circ}C$. The crystallographic structure of the films and the size of the crystallites in the films were studied by X-ray diffraction. The crystallite sizes were found to increase, and the X-ray diffraction patterns were seen to sharpen by annealing. Optical properties of the films were calculated using the envelope method and the photoluminescence measurements. The optical properties of the films were seen to be dependent on the film thicknesses. The energy gap of the films was found to decrease by annealing. The band edge sharpness of the optical absorption was seen to oscillate by thermal annealing. Annealing over $400^{\circ}C$ was seen to degrade the optical properties of the film. The best annealing temperature for the films was found to be $400^{\circ}C$ from the optical properties. It is observed that the CdS film annealed at $400^{\circ}C$ reveals the strongest UV emission intensity and narrowest full width at half maximum among the temperature ranges studied. The enhanced UV emission from the film annealed at $400^{\circ}C$ is attributed to the improved crystalline quality of CdS thin film due to the effective relaxation of residual compressive stress and achieving maximum grain size. The results show that heat treatments under optimal annealing condition can provide significant improvements in the properties of CdS thin films.

• Korean journal of food and cookery science
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• v.19 no.2
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• pp.241-253
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• 2003

Changes in chemical, microbiological quality of pan fried oak mushroom and meat, soy sauce glazed hair tail and roasted dodok in wrap packaging, top sealing, vacuum packaging were evaluated during storage 25$^{\circ}C$, 4$^{\circ}C$, -18$^{\circ}C$ for 5 days. The results were as follows: 1) The cases of chilled and frozen storage, there were small increases in the pH from the first day, with no differences between the different packaging methods, with the exception of the vacuum packaging, which was lower. The pH and Aw of the roasted dodok were lower than those of the other foods. The Aw for all three foods at room temperature significantly decreased in the wrap packaging and top sealing on day one, but the rate of reduction was lower when in chilled storage. The VBN increased with increasing length of storage, and temperatures, but the rate of increase was lower in the top sealing and vacuum packaging. The VBN of roasted dodok was considerably lower than with the other foods. The POV increased significantly on the first day or room temperature storage and the rate or increase was low in chilled End frozen storages, and in the vacuum packaging. 2) SPC of the roasted dodok at room temperature increased significantly within five days of storage. but was inhibited within five days in the vacuum packaging with chilled storage. The SPC of the soy sauce glazed hair tail was low in the top sealing and vacuum packaging when in chilled storage. The coliform of the pan fried oak mushroom and meat. on the fifth day of room temperature storage, was close to hazardous conditions for the wrap packaging. From the third day of chilled storage, few coliform were detected in the pan fried oak mushroom and meat, or the soy sauce glazed hair tail, but not in the vacuum packaging, within five days, for all three foods in frozen storage. The S. spp. had exceeded the standard in the wrap packaging and top sealing with the pan fried oak mushroom and meat on the third day at room temperature, but was not detected in the vacuum packaging within five days, and exceeded the standard in the wrap packaging on the fifth day of chilled storage. S. spp. was not detected in the soy sauce glazed hair tail within five days at all storage temperatures. S. spp. was not detected in the roasted dodok within five days of chilled and frozen storage, but was detected from the third day in the wrap packaging. and the fifth in the top sealing, at room temperature, which exceeded the standard. Sal. spp., V parahaemolyticus, E. coli O157:H7, L. monocytogenes were not detected. 3) The Aw was found to be influenced by storage temperature, period and packaging method, while the VBN was significantly influenced by the storage temperature and period. Regarding the SPC, the pan fried oak mushroom and meat was affected by the storage temperature and period, while the soy sauce glazed hair tail was influenced by the packaging method and storage period. The roasted dodok's microbiological quality was influenced by the method of packaging. The chemical, microbiological quality of home-delivered meals were preserved to be five days in the vacuum packaging, at. chilled and frozen storage.

• Food Science of Animal Resources
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• v.27 no.3
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• pp.290-298
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• 2007

The effect of packaging methods on the quality of stick type restructured jerky was investigated in terms of pH, water activity $(A_w)$, TBA (thiobarbituric acid) value, total bacterial counts, and sensory evaluation during storage at room temperature $(25^{\circ}C)$ for 90 days. The jerky was subjected to plastic or vacuum packaging at $(25^{\circ}C)$. The pH decreased slightly as storage time increased (p<0.05), but there were no significant differences between the packaging methods. The water activity of jerky in plastic packaging decreased as storage time increased (p<0.05), however jerky in vacuum packaging showed no significant change. Vacuum packaging resulted in a higher water activity value than plastic packaging. The TBA and hardness values decreased as storage time increased (p<0.05), and there were significant differences between packaging methods during the storage period (p<0.05). The total bacterial counts in vacuum packaged jerky were lower than jerky in plastic packaging. The sensory evaluation of each treatment decreased slightly as storage time increased (p<0.05), however there was no significant difference between packaging methods. Based on our findings, we conclude that vacuum packaging provides more effective storage than common packaging of jerky.

• Journal of the Korean Vacuum Society
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• v.14 no.2
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• pp.91-96
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• 2005

The silicon-on-insulator (SOI) wafer fabrication technique has been developed by using ion-cut process, based on proton implantation and wafer bonding techniques. It has been shown by SRIM simulation that 65keV proton implantation is required for a SOI wafer (200nm SOI, 400nm BOX) fabrication. In order to investigate the optimum proton dose and primary annealing condition for wafer splitting, the surface morphologic change has been observed such as blistering and flaking. As a result, effective dose is found to be in the $6\~9\times10^{16}\;H^+/cm^2$ range, and the annealing at $550^{\circ}C$ for 30 minutes is expected to be optimum for wafer splitting. Direct wafer bonding is performed by joining two wafers together after creating hydrophilic surfaces by a modified RCA cleaning, and IR inspection is followed to ensure a void free bonding. The wafer splitting was accomplished by annealing at the predetermined optimum condition, and high temperature annealing was then performed at $1,100^{\circ}C$ for 60 minutes to stabilize the bonding interface. TEM observation revealed no detectable defect at the SOI structure, and the interface trap charge density at the upper interface of the BOX was measured to be low enough to keep 'thermal' quality.

• Journal of the Korean Vacuum Society
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• v.18 no.3
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• pp.213-220
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• 2009

The optimal condition of low temperature deposition of transparent conductive Al-doped zinc oxide (AZO) films is studied by RF magnetron sputtering method. To achieve enhanced-electrical property and good crystallites quality, we tried to deposit on glass using a two-step growth process. This process was to deposit AZO buffer layer with optimal growth condition on glass in-situ state. The AZO film grown at rf 120 W on buffer layer prepared at RF $50{\sim}60\;W$ shows the electrical resistivity $3.9{\times}10^{-4}{\Omega}cm$, Carrier concentration $1.22{\times}10^{21}/cm^3$, and mobility $9.9\;cm^2/Vs$ in these results, The crystallinity of AZO film on buffer layer was similar to that of AZO film on glass with no buffer later but the electrical properties of the AZO film were 30% improved than that of the AZO film with no buffer layer. Therefore, the cause of enhanced electrical properties was explained to be dependent on degree of crystallization and on buffer layer's compressive stress by variation of $Ar^+$ ion impinging energy.

• Journal of the Korean Vacuum Society
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• v.21 no.1
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• pp.29-35
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• 2012

The Hydrogenated silicon nitride (SiNx:H) using plasma enhanced chemical vapor deposition is widely used in photovoltaic industry as an antireflection coating and passivation layer. In the high temperature firing process, the $SiN_x:H$ film should not change the properties for its use as high quality surface layer in crystalline silicon solar cells. Initially PECVD-$SiN_x:H$ film trends were investigated by varying the deposition parameters (temperature, electrode gap, RF power, gas flow rate etc.) to optimize the process parameter conditions. Then by varying gas ratios ($NH_3/SiH_4$), the hydrogenated silicon nitride films were analyzed for its optical, electrical, chemical and surface passivation properties. The $SiN_x:H$ films of refractive indices 1.90~2.20 were obtained. The film deposited with the gas ratio of 3.6 (Refractive index=1.98) showed the best properties in after firing process condition. The single crystalline silicon solar cells fabricated according to optimized gas ratio (R=3.6) condition on large area substrate of size $156{\times}156mm$ (Pseudo square) was found to have the conversion efficiency as high as 17.2%. Optimized hydrogenated silicon nitride surface layer and high efficiency crystalline silicon solar cells fabrication sequence has also been explained in this study.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.239-240
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• 2012

With advancements in semiconductor device technologies, manufacturing processes are getting more complex and it became more difficult to maintain tighter process control. As the number of processing step increased for fabricating complex chip structure, potential fault inducing factors are prevail and their allowable margins are continuously reduced. Therefore, one of the key to success in semiconductor manufacturing is highly accurate and fast fault detection and classification at each stage to reduce any undesired variation and identify the cause of the fault. Sensors in the equipment are used to monitor the state of the process. The idea is that whenever there is a fault in the process, it appears as some variation in the output from any of the sensors monitoring the process. These sensors may refer to information about pressure, RF power or gas flow and etc. in the equipment. By relating the data from these sensors to the process condition, any abnormality in the process can be identified, but it still holds some degree of certainty. Our hypothesis in this research is to capture the features of equipment condition data from healthy process library. We can use the health data as a reference for upcoming processes and this is made possible by mathematically modeling of the acquired data. In this work we demonstrate the use of recurrent neural network (RNN) has been used. RNN is a dynamic neural network that makes the output as a function of previous inputs. In our case we have etch equipment tool set data, consisting of 22 parameters and 9 runs. This data was first synchronized using the Dynamic Time Warping (DTW) algorithm. The synchronized data from the sensors in the form of time series is then provided to RNN which trains and restructures itself according to the input and then predicts a value, one step ahead in time, which depends on the past values of data. Eight runs of process data were used to train the network, while in order to check the performance of the network, one run was used as a test input. Next, a mean squared error based probability generating function was used to assign probability of fault in each parameter by comparing the predicted and actual values of the data. In the future we will make use of the Bayesian Networks to classify the detected faults. Bayesian Networks use directed acyclic graphs that relate different parameters through their conditional dependencies in order to find inference among them. The relationships between parameters from the data will be used to generate the structure of Bayesian Network and then posterior probability of different faults will be calculated using inference algorithms.

• Journal of Oral Medicine and Pain
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• v.34 no.1
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• pp.39-48
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• 2009

Recently there is much interest in the antibacterial activity of nano-sized silver particle (nanosilver) since silver is known to be safe and effective as disinfectant for a long time. Oral malodor is considered to originate in the oral cavity primarily as a result of production of malodorous compounds by oral bacteria. Major compounds responsible for oral malodor are volatile sulfur compounds, which is thought to be generated by the G(-) anaerobic bacteria found normally in the oral cavity, especially on the dorsum of the tongue. The purposes of this study were to investigate the effect of nanosilver on growth of oral malodor generating microorganisms, including Fusobacterium nucleatum, Prevotella melaninogenica, Klebsiella pneumonia, and to determine the optimal culture condition of them. The results were as follows: 1. The optimal culture condition for P. melaninogenica was vacuum culture using desiccator after evacuation of air by vacuum pump in chopped beef meat media. 2. The growth of K. pneumonia was temporarily inhibited by nanosilver (5 ppm and 10 ppm). 3. The morphological alteration and cell damage caused by nanosilver were observed in K. pneumonia.