• Journal of the Korean Vacuum Society
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• v.8 no.3B
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• pp.257-261
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• 1999

The claw pump, one of oil-less dry pumps developed to solve problems found in vacuum systems pumped by oil-sealed rotary pumps, has been widely used separately or as a part of compound structure with a roots pump. The claw pump has some merits such as a high pumping speed, a high compression ratio, and relatively little heat generation. The high compression ratio of the claw pump is compression ratio, and relatively little heat generation. The high compression ratio of the claw pump is based on efficient sweeping action of the special type rotor and an intrinsic self-valving mechanism. The contour of the rotor with claw-type blade is designed basically to make two rotors revolve smoothly without touching with each other, and related dimensions are determined by required pumping speed, compression ratio, power demand and diameter of the rotor axis. In this paper the procedure of designing the rotor of the claw pump is described and factors influencing the pump performance are analyzed.

• Applied Science and Convergence Technology
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• v.25 no.6
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• pp.120-123
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• 2016

The rotor of a turbomolecular drag pump is generally made of an aluminum alloy. Its surface finish is affected by various processes that the rotor itself undergoes during the manufacturing phase. The impact of different surface finishes on the pumping performances of a turbomolecular pump has been mainly investigated by Sawada et al [1]. The present work aims to broaden the previous bibliographic study to the drag stages of a turbomolecular pump by testing the impact of different surface finishes on the compression ratio of the pump. Experimental tests have been made focusing on two processes: the corundum sandblasting and the glass microspheres shot-peening. Both the processes flatten and/or physically remove EDM melted spheres; in particular, blasted surfaces obtained by glass shot-peening are generally smoother than surfaces obtained by corundum sandblasting. In order to characterize the surface texture left by such processes, preliminary surface roughness measurements have been made on the drag rotor disks of several pumps. The experimental tests conducted on both sandblasted and shot-peened rotors confirms previous results obtained on the turbo stages by Sawada et al. [1], showing that the average roughness of the surface has an impact on the compression ratio of the pump; in particular, an increment in the surface roughness causes a corresponding increment in the compression ratio of the pump and vice versa. For the tested pumps, the higher surface roughness gives a factor of increment of about 2 on the measured hydrogen maximum compression ratio of the pump.

• Proceedings of the Korean Vacuum Society Conference
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• 2003.02a
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• pp.77-77
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• 2003

• Journal of the Korean Vacuum Society
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• v.15 no.1
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• pp.14-23
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• 2006

The scroll pump is widely used in ultra clean vacuum systems. However, there is no commonly available information on the hydrogen pumping characteristics of this pump, which creates a difficulty in determining whether the scroll pump can be used or not in a fusion experiment system where hydrogen ,is the main working gas. In this paper the experimental setup, measurement procedures, experimental results, and discussions on the pumping speed, the maximum compression ratio and the back-streaming properties of the scroll pump, especially for the hydrogen gas, are reported.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.38 no.7
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• pp.771-777
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• 2014

Injection-compression molding was used for film insert molding of an automotive door grip using films with three-dimensional embossed patterns. A vacuum mold was fabricated for vacuum-assisted thermoforming of the film, and an injection-compression mold was developed for film insert molding. Three pressure transducers were installed inside the mold cavity to measure cavity pressures. Injection-compression molding experiments under various compression strokes and toggle speeds were performed to investigate their effects on the cavity pressure and heights of the embossed patterns. The compression stroke of 0.9mm and low toggle speed resulted in a higher degree of conservation of embossed patterns. Additionally, the processing conditions for the maximum heights of embossed patterns were almost similar to those for minimum integral value of cavity pressures. The injection-compression molding process presents the opportunity to impart a soft-touch feeling of plastic parts printed with embossed patterns.

• International journal of advanced smart convergence
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• v.5 no.2
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• pp.1-7
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• 2016

Recently, with the development of advanced thin film devices comes the need for constant high quality vacuum as the deposition pressure is more demanding. It is for this reason our research seeks to understand how the variable design factors are employed in such vacuum systems. In this study, the effects of design factor applications on the vacuum characteristics were simulated to obtain the optimum design modeling of variable models on an ultra high vacuum system. The commercial vacuum system simulator, $VacSim^{(multi)}$, was used in our investigation. The reliability of the employed simulator was verified by the simulation of the commercially available models of ultra high vacuum system. Simulated vacuum characteristics of the proposed modeling aligned with the observed experimental behavior of real systems. Simulated behaviors showed the optimum design models for the ideal conditions to achieve optimal pressure, pumping speed, and compression ratio in these systems.

• Progress in Medical Physics
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• v.22 no.2
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• pp.72-78
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• 2011

The aim of this study is to evaluate the patient's setup errors in TomoTherapy (Hi-Art II, TomoTherapy, USA) Bodyfix system (Medical Intelligence, Ele-kta, Schwabmuchen, Germany) pressure in the vacuum compression, depending on and were evaluated. Bodyfix immobilization system and vacuum pressure was compression applied to the patients who received Tomotherapy thoracic and abdominal area, 21 patients were selected and TomoTehpay treatment total 477 of MVCT images were obtained. The translational (medial-lateral: ML, anterior-posterior: AP, superior-inferior: SI directions) and rolling were recorded and analyzed statistically. Using Pearson's product-moment coefficient and One-way ANOVA, the degree of correlation depending on the different vacuum pressure levels were statistically analyzed for setup errors from five groups (p<0.05). The largest average and standard deviation of systematic errors were 6.00, 5.95 mm in the AP and SI directions, respectively. The largest average of random errors were 4.72 mm in the SI directions. The correlation coefficients were 0.485, 0.244, and 0.637 for the ML-Roll, AP-Vector, and SI-Vector, respectively. SI-Vector direction showed the best relationship. In the results of the different degree of vacuum pressure in five groups (Pressure range: 30~70 mbar), the setup errors between the ML, SI in both directions and Roll p=0.00 (p<0.05) were shown significant differences. The average errors of SI direction in the vacuum pressure of 40 mbar and 70 mbar group were 4.78 mm and -0.74 mm, respectively. In this study, the correlation between the vacuum pressure and the setup-errors were statistically analyzed. The fact that setup-errors in SI direction is dependent in vacuum pressure considerly setup-errors and movement of interal organs was identified. Finally, setup-errors, and it, based on the movement of internal organs in Bodyfix system we should apply more than 50 mbar vacuum pressure. Based on the results of this study, it is suggested that accuracy of the vacuum pressure and the quantitative analysis of movement of internal organs and the tumor should be studied.

• Journal of the Korean Vacuum Society
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• v.12 no.2
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• pp.93-104
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• 2003

For evaluation of durability of low vacuum pumps, it is required to examine the performance and degradation of low vacuum pumps. Pump degradation may result from abnormalities associated with the performance in many areas of pump operation. The diagnostics method can be used to monitor the pump performance in the semi-conductor process line. Based on the mechanical defect of the pump, the dynamic response and reliability of the system for performance test, and the dynamic characteristics of the pump were experimentally assessed. The theoretical work rate for the compression process in the pump was calculated, and then the efficiency of the pump associated with the power consumption was evaluated. This analysis will be useful in detecting pump degradation with increasing the power consumption. To determine the predominant factors of pump degradation, it is important to evaluate the entire pumping system. We studied vibration, dynamic pressure, pumping speed, and power consumption of low vacuum pumps. Our results can be utilized for the future research on the evaluating technology of durability of low vacuum pumps.

• Vacuum Magazine
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• v.2 no.4
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• pp.39-46
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• 2015

After stepping into a new field of vacuum 30 years ago, our company has grown up steadily as a specialized vacuum industry, and now we can provide vacuum devices covering most of the pressure range. We are planning to put out high level dry pump like a multistage Roots pump on the market in the near future. Procedures of technology development for designing, fabricating, and testing the multistage Roots pump of 600 L/min class will be briefly reported. Core items of the technical development on the multistage Roots pump are as follows; elaborated profile design of 3-lobe rotors using an involute curve, optimization of rotor dimensions, especially for clearances and rotor width, considering the pumping speed, compression ratio and heat load, and establishment of a standardized test system. At present, the multistage Roots pump is about to come into commercialization.

• Journal of the Korean Vacuum Society
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• v.12 no.2
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• pp.79-85
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• 2003

Experimental investigations are performed for the rarefied gas flows in a multi-stage disk-type drag pump. The pump considered in the present study consists of grooved rotors and stators. The flow-meter method is adopted to calculate the pumping speed. Compression ratios and pumping speeds for the nitrogen gas are measured under the outlet pressure range of 0.13∼533 Pa. The present experimental data show the leak-limited value of the compression ratio in the molecular transition region. The rotational speed of the pump is 24,000rpm, and nitrogen is used as a test gas. The pumping characteristics of various drag pumps are performed. The inlet pressures are measured for various outlet pressures of the test pump. The ultimate pressures for zero throughput are measured for three-stage, two-stage and single-stage disk-type, respectively.