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An Experimental Study on the Pumping Performance of the Multi-stage Disk-type Drag Pump  

권명근 (성균관대학교 기계공학과)
허중식 (성균관대학교 기계공학과)
황영규 (성균관대학교 기계공학과)
Publication Information
Journal of the Korean Vacuum Society / v.12, no.2, 2003 , pp. 79-85 More about this Journal
Abstract
Experimental investigations are performed for the rarefied gas flows in a multi-stage disk-type drag pump. The pump considered in the present study consists of grooved rotors and stators. The flow-meter method is adopted to calculate the pumping speed. Compression ratios and pumping speeds for the nitrogen gas are measured under the outlet pressure range of 0.13∼533 Pa. The present experimental data show the leak-limited value of the compression ratio in the molecular transition region. The rotational speed of the pump is 24,000rpm, and nitrogen is used as a test gas. The pumping characteristics of various drag pumps are performed. The inlet pressures are measured for various outlet pressures of the test pump. The ultimate pressures for zero throughput are measured for three-stage, two-stage and single-stage disk-type, respectively.
Keywords
Ultimate Pressure; Compression ratio; Pumping Speed;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
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