• KIEAE Journal
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• v.3 no.3
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• pp.19-25
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• 2003

The Address No.0 of Eco-friendly Architecture offers unique experience for those who visit the place to envisage the future architecture where nature, human and building exist in harmony. It is open to the general public including the students of elementary and secondary schools. This house has been built to provide opportunities for the general public to experience eco-friendly architecture. It's floor area is 42 pyung($140m^2$) and the overall site has the area of 180 pyung($600m^2$). The following illustrates some of its prominent features : ${\bullet}$ Remodeling of a traditional Korean residence ${\bullet}$ Application of passive solar systems ${\bullet}$ Use of clerestory windows and daylighting systems(washroom and machine room) ${\bullet}$ Operation of solar water heaters with flat plate collectors ${\bullet}$ Construction of Biotop(small ecological world) ${\bullet}$ Water circulation for Biotop by photovoltaic(150W) and wind power(400W) generation ${\bullet}$ Outdoor hot water supplied by all-glass evacuated solar tubes. Through this Address No.0 of Eco-friendly Architeture conclusions are as followings. 1. The array of tubes in collector has the best nice in that the number of tube is nine and the tilt angle is the latitude $+20^{\circ}$. 2. The thermal performance of the all-glass solar vacuum collector was excellent than of the flate-plate solar collector. 3. The adaption of new small wind power systems to buildings were proved to produce a profit if it is considered the expense of environment improvement and the wind speed increasing according to rise of building hight.

• Journal of the Korean Vacuum Society
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• v.20 no.2
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• pp.86-92
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• 2011

The diagnosis studies of the process of chemical vapor deposition were carried out by using in-situ particle monitor (ISPM) and self-plasma optical emission spectroscopy (SPOES). We used the two kinds of equipments such as the silicon plasma enhanced chemical vapor deposition system with silane gas and the borophosphosilicate glass depositon system for monitoring. Using two sensors, we tried to verify the diagnostic and in-situ sensing ability of by-product gases and contaminant particles at the deposition and cleaning steps. The processes were controlled as a function of precess temperature, operating pressure, plasma power, etc. and two sensors were installed at the exhaust line and contiguous with each other. the correlation of data (by-product species and particles) measured by sensors were also investigated.

• Journal of the Korean Vacuum Society
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• v.6 no.2
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• pp.103-108
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• 1997

Silicon field emitter arrays (FEAs) have been fabricated by a novel method employing a two-step tip etch and a spin-on-glass (SOG) etch-back process using double layered thermal/tetraethylortho-silicate (TEOS) oxides as a gate dielectric. A partial etching was performed by coating a low viscous photo resist and $O_2$ plasma ashing on order to form the double layered gate dielectric. A small gate aperture with low gate leakage current was obtained by the novel process. The hight and the end radius of the fabricated emitter was about 1.1 $\mu\textrm{m}$ and less than 100$\AA$, respectively. The anode emission current from a 256 tips array was turned-on at a gate voltage of 40 V. Also, the gate current was less than 0.1% of the anode current.

• Journal of the Korean Vacuum Society
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• v.9 no.3
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• pp.221-226
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• 2000

After manufacturing the electrochromic device (structure: ITO glass/$WO_3$/electrolyte/$V_2O_5$/ITO;glass) by using of sol-gel process and evaporation, optical properties and migration effect were investigated. The result shows that electrochromic device with heat treated (at water vapor ambient, $500^{\circ}C$, 1 hour) sol-gel coated $WO_3$ and $V_2O_5$ films had the highest transmittance variance. Electrochromic devices are based on the reversible insertion of guest atoms into structure of the host solid. But after cyclic operation, we find that the tungsten in $WO_3$ film and the indium in ITO film were migrated with each other. For the purpose of blocking migration, tungsten barrier film is inserted between ITO and $WO_3$ film. The result of cyclic voltamogram and the Auger depth profile show that the peak separation of cyclic voltamogram is reduced to below 1/10 and we could effectively block the indium and tungsten migration that is caused by flow of Li ions.

• Proceedings of the Korean Vacuum Society Conference
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• 2000.02a
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• pp.33-33
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• 2000

일반적으로 GaN-based light emitting diodes(LEDs)는 Top layer위에 금속박막으로 contact을 형성하고 있으며 광소자 구성에 있어 빛은 이러한 금속 contact을 통과할 수 없다. 그러나 만약 이러한 contact이 투명전도막으로 구성될 수 있다면 보다 효율적인 광소자의 구성이 기대되어진다. 특히 GaN photodetector, GaN-based LEDs, GaN vertical cavity surface emitting lasers(VCSELs)등의 소자형성에 있어 투명전도막 contact은 매우 중요하며 그 응용에 앞서 기본적인 구조적, 전기적, 광학적 특성에 대한 연구가 반드시 선행되어져야 한다. 따라서 본 실험에서는 이러한 투명전도막으로써 Indium Tin Oxide(ITO)를 사용하였으며 박막형태의 contact으로 제조하여 n-GaN, p-GaN와 corning glass위에 e-beam evaporation법로써 제조하였다. 또한 각 n-, p-type과 corning glass위에 증착된 ITO박막의 구조적 특성을 분석하기 위하여 x-ray diffractometry(XRD)와 Auger electron spectroscopy(AES)등을 사용하였으며 전기적 특성을 측정하기 위하여 four point probe를 사용하였고 그들의 I-V 곡선을 측정하였다. 또한 UV spectrometry를 사용하여 그들의 광학적 특성을 측정하고자 하였다. ITO 박막의 제조에 있어 기판은 초음파 유기세정 후 HCl과 H2O2(1:1)의 혼합용액을 사용하여 GaO2를 제거하고자 하였으며 이후 초순수로 세척하여 사용하였다. 초기 진공도는 3$\times$10-5 Torr이하였으며 기판온도 50$0^{\circ}C$에서 0.6 /s의 증착속도로 약 2000 증착하였다. 이렇게 제조된 ITO 박막은 5$\times$10-5 Torr이하의 진공분위기에서 $600^{\circ}C$로 열처리를 실시하였으며 열처리 시간의 변화에 따른 그들의 전기적, 구조적, 광학적 특성을 측정하였다. 열처리 과정을 통한 ITO박막은 투과도는 420nm의 영역에서 80%이상을 나타내었으며 이때의 면저항은 약 50ohm/ 이었다. 또한 I-V 곡선 측정에 의한 contact특성의 측정결과 열처리 전의 ITO contact은 n-GaN와 n-GaN에 대해 각각 ohmic과 schottky contact의 일반적인 contact 특성을 나타내었다. 그러나 이러한 contact 특성은 열처리 시간의 변화에 따라 변화하는 것을 확인할 수 있었다.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.261-261
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• 2010

본 연구에서는 PBMS (Particle Beam Mass Spectrometer)와 ISPM (In-Situ Particle Monitor)을 연계하여 BPSG (Borophosphosilicate Glass) 및 PSG (Phosphosilicate Glass) 박막 증착을 위한 CVD (chemical vapor deposition) 공정 중 발생하는 오염입자 발생특성에 대해 비교 평가하였다. 소스는 TEB (Triethylborate), TEPO (Triethylphosphate) 및 TEOS (Tetraethoxysilane)를 사용하였고, 운반가스 및 반응가스로 He과 $O_2$ 및 $O_3$를 사용하였다. 증착온도와 압력은 각각 $450^{\circ}C$, 200 Torr 이었다. 반응기의 배기라인에 PBMS와 ISPM을 설치하고 500 nm 이하의 입자에 대해 공정단계별 시간에 따른 모니터링 결과 전 공정에 걸쳐 동일한 패턴의 입자발생분포를 보였으며, 특히 PBMS의 경우 ISPM의 입자측정한계인 260 nm 이하의 입자크기도 측정할 수 있었다. 입자발생이 안정적으로 일어나는 증착공정 중 PBMS를 통하여 입자크기를 측정한 결과 BPSG의 경우 약 110 nm, PSG의 경우 약 80 nm의 분포를 나타내었다. 이를 통해 TEB 소스가 배제된 PSG의 경우 BPSG의 경우보다 입자의 성장이 지체됨을 확인하였다. 측정에 대한 신뢰성을 확보하기 위해 PBMS 내의 TEM (Transmission Electron Microscopy) grid를 이용하여 입자를 샘플링 하였고, TEM 분석을 실시한 결과 PBMS 측정결과와 잘 일치하였다. 또한 EDS (Energy Dispersive Spectroscopy) 분석을 통하여 입자성분에 대해 검증하였다.

• The Journal of Korean Academy of Prosthodontics
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• v.45 no.1
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• pp.21-33
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• 2007

Statement of problem: The esthetic component of dental care has become increasingly more important, while new tooth-colored materials are continually marketed. Various new indirect composite materials have been developed with required advantages. The most recent development in the indirect composites has been the introduction of the second-generation laboratory composite or poly-glass materials. They are processed by different laboratory techniques based on combinations of heat, pressure, vacuum and light polymerization. Although, second generation products became available in 1995, their characteristics and clinical performance have not been adequately investigated. Purpose: The aim of this study was to measure the mechanical properties of the second generation indirect resin system and compare these with an existing universal direct composite resin. Material and method: In this study four indirect composite material (Adoro LC, BelleGlass HP, Tescera, Synfony) were tested for flexural strength, wear resistance, hardness and their degree of conversion against Z250, a light cure direct composite. Results: Within the limitations of this study, the following conclusions were drawn: 1. From the abrasion wear result, Adoro showed the least volume loss while Synfony showed the greatest volume loss. Z250 and BelleGlass HP didn't show significant difference (p>0.05), but they showed significant difference with other groups (p<0.05). From the attrition wear, BelleGlass HP showed the least volume loss and it didn’t show significant difference with Tescera (p>0.05). While Synfony showed the greatest volume loss that it showed significant difference with other groups (p>0.05). 2. Mean values of flexural strength by means of three point bending test was in the order of Z250, Adoro, Belleglass HP, Tescera and Synfony. Mean elastic modulus was in the order of Z250, BelleGlass HP, Tescera, Adoro and Synfony. 3. The result of Vicker‘s microhardness value showed that significantly higher value in Z250 (p<0.05), and is in the order of BelleGlass HP, Tescera, Adoro and Synfony. 4. The degree of conversion measured by FT-IR showed significantly higher value in BelleGlass HP (p<0.05), and is in the order of Adoro, Synfony, Tescera and Z250. Conclusion: Significant differences were found in the flexural strength, wear resistance, hardness and their degree of conversion.

• Journal of the Korean Society of Safety
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• v.31 no.3
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• pp.42-46
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• 2016

In LCD Display or semiconductor manufacturing processes, the anti-static technology of glass substrates and wafers becomes one of the most difficult issues which influence the yield of the semiconductor manufacturing. In order to overcome the problems of wafer surface contamination various issues such as ionization in decompressed vacuum and inactive gas(i.e. $N_2$ gas, Ar gas, etc.) environment should be considered. Soft X ray radiation is adequate in air and $O_2$ gas at atmospheric pressure while UV radiation is effective in $N_2$ gas Ar gas and at reduced pressure. At this point of view, the "vacuum ultraviolet ray ionization" is one of the most suitable methods for static elimination. The vacuum ultraviolet can be categorized according to a short wavelength whose value is from 100nm to 200nm. this is also called as an Extreme Ultraviolet. Most of these vacuum ultraviolet is absorbed in various substances including the air in the atmosphere. It is absorbed substances become to transit or expose the electrons, then the ionization is initially activated. In this study, static eliminator based on the vacuum ultraviolet ray under the above mentioned environment was tested and the results show how the ionization performance based on vacuum ultraviolet ray can be optimized. These vacuum ultraviolet ray performs better in extreme atmosphere than an ordinary atmospheric environment. Neutralization capability, therefore, shows its maximum value at $10^{-1}{\sim}10^{-3}$ Torr pressure level, and than starts degrading as pressure is gradually reduced. Neutralization capability at this peak point is higher than that at reduced pressure about $10^4$ times on the atmospheric pressure and by about $10^3$ times on the inactive gas. The introductions of these technology make it possible to perfectly overcome problems caused by static electricity and to manufacture ULSI devices and LCD with high reliability.

• Korean Journal of Materials Research
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• v.24 no.1
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• pp.60-65
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• 2014

Fe-based amorphous coatings were fabricated on a soda-lime glass substrate by the vacuum kinetic spray method. The effect of the gas flow rate, which determines particle velocity, on the deposition behavior of the particle and microstructure of the resultant films was investigated. The as-fabricated microstructure of the film was studied by field emission scanning electron microscopy (FE-SEM) and high resolution transmission electron microscopy (HR-TEM). Although the activation energy for transformation from the amorphous phase to crystalline phase was lowered by severe plastic deformation and particle fracturing under a high strain rate, the crystalline phases could not be found in the coating layer. Incompletely fractured and small fragments 100~300 nm in size, which are smaller than initial feedstock material, were found on the coating surface and inside of the coating. Also, some pores and voids occurred between particle-particle interfaces. In the case of brittle Fe-based amorphous alloy, particles fail in fragmentation fracture mode through initiation and propagation of the numerous small cracks rather than shear fracture mode under compressive stress. It could be deduced that amorphous alloy underwent particle fracturing in a vacuum kinetic spray process. Also, it is considered that surface energy caused by the formation of new surfaces and friction energy contributed to the bonding of fragments.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.19 no.12
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• pp.87-97
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• 2020

In this study, a UV-cured GFRP molding is made using a combination of hand lay-up and resin transfer molding, and its properties are analyzed. The molded plates produced using various vacuum pressures (0 mmHg, -450 mmHg, and -760 mmHg) are examined via a comparison of hand lay-up molding and resin transfer molding. Tests are conducted by processing tensile specimens (ASTM D-5083), flexural test specimens (ASTM D-790), and ILSS test specimens (ASTM D-2344) according to each ASTM standard with a molded plate. Similarly, the UV-cured GFRP molding is compared against GFRP using epoxy. It was confirmed that the mechanical strengths of all the specimens increased when the vacuum pressure was increased and when UV curing was applied. This is believed to be because as the vacuum pressure increases, the pores of the cured specimen are removed, thereby reducing defects, and the bonding force between the glass fiber and the resin is stronger than that of the epoxy resin. It is expected that if resin transfer molding methods and UV-cured resins are used for molding GFRP composites in industry, products with better mechanical properties and faster curing time will be produced.