Fabrication Process and Power Generation Characteristics of Thermoelectric Thin Film Devices for Micro Energy Harvesting (미세 열에너지 하비스팅용 열전박막소자의 형성공정 및 발전특성)
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- Journal of the Microelectronics and Packaging Society
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- v.25 no.3
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- pp.67-74
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- 2018