• 대한환경공학회지
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• 제38권7호
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• pp.364-370
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• 2016

본 연구에서는 초순수 생산을 위한 개별공정들의 특성을 고려하여 공정조합 최적화 방안을 결정하는 기법을 연구하였다. 산업 활동에 사용하는 공업용수 중 고도의 기술집합 산업에서 요구되는 고순도 용수인 초순수를 생산하는 공정은 여과, 이온교환, 역삼투, 탈기, 자외선 산화 등 이 있다. 초순수 공정은 다양한 15~20개 정도의 수처리 단위 공정이 조합을 이루고 있다. 본 연구에서는 초순수 생산 모형플랜트를 운영하여 다양한 처리 공정의 조합을 통해 수질 및 경제성을 고려하여 평가하였다. 평가된 19종류의 공정조합 중 11개 공정조합이 목표로 하는 최종 수질을 만족했다. 이러한 11종의 공정조합에 대해 안정성과 경제성을 평가하였다.

• 한국막학회:학술대회논문집
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• 한국막학회 1991년도 추계 총회 및 학술발표회
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• pp.17-26
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• 1991

It can be said that the current ULSI technology has been supported and/or accomplished by a major challenge to the clean room environment and the ultrapure water equipment manufacturers as to contamination control. The required improvement in ultrapure water quality, which is shown in Figure 1, would not have been possible without significant improvements in membrane performance and enhancements in analytical capabilities.

• Environmental Engineering Research
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• 제10권3호
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• pp.144-154
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• 2005

The use of ozone gained acceptance in the production of ultrapure water because of its powerful oxidizing ability. Ozone is currently used to deactivate microorganisms and remove organic contaminants. However, interest also exists in using radical species, which arc stronger oxidants than ozone, in such processes. One means of producing radical species is by corona discharge. This work investigates the use of a novel pulseless corona-discharge system for the removal of organic substances in ultrapure water production. The method combines corona discharge with electrohydrodynamic spraying of oxygen, forming microbubbles. Experimental results show that pulseless corona discharge effectively removes organics, such as phenol and methylene blue, in deionized water. The corona-discharge method is demonstrated to be comparable to the direct use of ozone at a high-applied voltage. The results also show that a minimum applied voltage exists for operation of the corona-discharge method. In this work, the minimum applied voltage is approximately 4.5 kV. The kinetic rate or phenol degradation in the reactor is modeled. Modeling results show that the dominant species of the pulseless corona-discharge reactor are hydroxyl radical and aqueous electron. Several radical species produced in the pulseless corona-discharge process are identified experimentally. The. major species are hydroxyl radical, atomic hydrogen species, and ozone.

• Journal of Microbiology and Biotechnology
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• 제7권3호
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• pp.200-203
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• 1997

Bacteria isolated from ultrapure water made by a high-purity water manufacturing system in a semiconductor manufacturing plant were classified into two groups which either grew in diluted nutrient broth medium (oligotrophic bacteria) or could not grow (copiotrophic bacteria). The nutritional flexibility of oligotrophic and copiotrophic bacteria was investigated. The oligotrophic bacteria were shown to be able to utilize a significantly broader range of organic substrates than the copiotrophic bateria. This finding substantiates the hypothesis that nutritional flexibility is adaptive for oligotrophic bacteria.

• 한국입자에어로졸학회지
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• 제10권3호
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• pp.99-108
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• 2014

Liquid filtration by membrane filters is essential for the preparation of ultrapure water in semiconductor manufacturing processes. The separation of submicrometer particles suspended in ultrapure water with a laminated fibrous membrane filter was studied numerically and experimentally in the present work. We found that an electrical double layer around a single fiber expanded to a large extent at a low ion concentration, as in ultrapure water, and deformed toward the upstream of the fiber with increasing filtration velocity. Since an increase in the electrical double-layer thickness leads to a decrease in the electrical potential gradient, particles with the same polarity as the fiber approach the fiber more easily and are captured at a high filtration velocity. Experimental results also confirmed that the collection efficiency of polystyrene latex(PSL) particles through a PTFE filter became higher as the filtration velocity increased.

• 반도체디스플레이기술학회지
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• 제21권1호
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• pp.5-11
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• 2022

Despite the increasing importance of manufacturing and application R&D for ultrapure deionized water and electrolyzed ion water, various and systematic studies have not been conducted until now. In this study, the electrostatic discharge (ESD) behavior of electrolyzed ion water using a proton exchange membrane(PEM) was evaluated according to the type, flow rate, and bubble of electrolyzed ion water. In addition, by observing that Oxidation Reduction Potential (ORP) value returns to the unique value of electrolyzed ion water after electrostatic discharge, the possibility of two types of ions participating in electrostatic discharge ((H₂O)_n⁺ (assumed)) and ions for maintaining the characteristics of electrolyzed water could be inferred. In order to confirm the chemical structure and characteristics of the cations, in-depth research related to water molecular orbital energy or band gap should be followed.

• 상하수도학회지
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• 제28권4호
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• pp.391-396
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• 2014

Ultrapure water (UPW) is water containing nothing but water molecule ($H_2O$). The use of UPW is increasing in many industries such as the thermal and nuclear power plants, petrochemical plants, and semiconductor manufacturers. In order to produce UPW, several unit processes such as ion exchange, reverse osmosis (RO), ultraviolet (UV) oxidation should be efficiently arranged. In particular, RO process should remove not only ions but also low molecular weight (LMW) organic matters in UPW production system. But, the LMW organic matter removal data of RO membranes provided by manufacturers does not seem to be reasonable because they tested the removal in high concentration conditions like 1,000 ppm of isopropyl alcohol (IPA, MW=60.1). In this study, bench-scale experiments were carried out using 4-inches RO modules. IPA was used as a model LMW organic matter with low concentration conditions less than 1 ppm as total organic carbon (TOC). As a result, the IPA removal data by manufacturers turned out to be trustable because the effect of feed concentration on the IPA removal was negligble while the IPA removal efficiency became higher at higher permeate flux.

• 멤브레인
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• 제10권3호
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• pp.112-120
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• 2000

• 공업화학
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• 제30권4호
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• pp.408-414
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• 2019

본 연구에서는 전통적인 열수추출법과 초음파 추출법을 이용하여 민들레에서 항산화성분을 추출하였다. 추출 후 추출수율과 항산화성분인 플라보노이드 함량을 최적화하기 위해 반응표면분석법 중 Box-Behnken 설계모델을 이용하여 추출하였다. 열수추출법의 경우 추출온도, 주정/초순수 부피비, 추출시간을 변수로 설정하였으며, 초음파 추출법의 경우 초음파 조사세기, 주정/초순수 부피비, 초음파 조사시간을 변수로 설정하였다. 열수추출법의 최적 추출조건은 추출온도($45.76^{\circ}C$), 주정/초순수 부피비(41.92 vol.%), 추출시간(1.75 h)이었다. 또한 초음파 추출법의 최적조건은 초음파 조사세기(512.63 W), 주정/초순수 부피비(56.97 vol.%), 추출시간(20.79 min)이었다. 이 조건에서 예상되는 반응치는 수율(22.09 wt.%), 플라보노이드 함량(28.98 mg QE/mL dw)으로 산출되었다. 또한 실제실험 결과 오차는 3% 이하로 나타나 최적화의 타당성을 입증하였다.

• Membrane and Water Treatment
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• 제3권4호
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• pp.221-230
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• 2012

This study employed the modified fouling index (MFI) to determine the performance of a two-step recycling system - a membrane filtration integrated laminar flow water storage (LFWS) tank followed by an ion exchange process to reclaim ultrapure water (UPW) from the wastewater generated from semiconductor wafer backgrinding and sawing processes. The first step consisted of the utilization of either ultrafiltration (UF) or nanofiltration (NF) membranes to remove solids in the wastewater where the second step consisted of an ion exchanger to further purify the filtrate. The system was able to produce high purity water in a continuous operating mode. However, higher recycling cost could be incurred due to membrane fouling. The feed wastewater used for this study contained high concentration of fine particles with low organic and ionic contents, hence membrane fouling was mainly attributed to particulate deposition and cake formation. Based on the MFI results, a LFWS tank that was equipped with a turbulence reducer with a pair of auto-valves was developed and found effective in minimizing fouling by discharging concentrated wastewater prior to any membrane filtration. By comparing flux behaviors of the improved system with the conventional system, the former maintained a high flux than the latter at the end of the experiment.