• 한국정밀공학회지
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• 제22권9호
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• pp.147-154
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• 2005

A precision hi-directional actuator for a high precision leveling system with $Z{\Theta}_x{\Theta}_y$ motions is proposed and designed in this paper. The actuator is composed of a force generation structure, a guide mechanism, and a symmetric structure. At first, its driving force is generated by a change of flux in air gaps by permanent and changeable flux. The permanent flux is generated by a permanent magnet. The changeable flux is created by variable current flowing through coil. The combination of permanent and changeable flux makes various flux densities in air gaps between moving part and fixed yokes. And then, the difference between flux densities in lower and upper gaps creates forces fur the $bi-direction({\pm}z)$ motion. The guide mechanism of this actuator is composed of two circular plates and one shaft. Reducing motions generated by forces except z-motion, these circular plates endow the actuator with high stiffness for fast settling time. And the function of the shaft is to transfer motion to an object. At last, total body has a symmetric structure to be stable on thermal error. The actuator is designed by MAXWELL 2D and ProMECHANICA. The designed actuator is evaluated by 8nm laser doppler vibrometer, dynamic signal analyzer, and simple PID controller.

• 한국정밀공학회지
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• 제23권1호
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• pp.64-71
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• 2006

Ultraprecision machining and MEMS technology have been taken more and more important position in machining of microparts. Micro endmilling is one of the prominent technology that has wide spectrum of application field ranging from macro parts to micro products. Also, the method of micro-grooving using micro endmill is used widely owing to many merit, but has problems of precision and quality of products due to tool wear and tool fracture. This investigation deals with state monitoring using acoustic emission(AE) signal in the micro-grooving. Characteristic evaluation of AE raw signal, AE hit and frequency analysis for condition monitoring is presented. Also, the feature extraction of AE signal directly related to machining process is executed. Then, the distinctive micro endmill state according to the each tool condition is classified by the fuzzy C-means algorithm.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 춘계학술대회 논문집
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• pp.922-925
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• 2002

Klystron which is micro wave amplifier tube are mainly used in fields of science such as accelerator, nuclear fusion, broadcasting, communication fields, and defense industry fields, tract. The quality of Klystron anode and cavity are determined by form accuracy and roughness of the worked surface. Therefore anode and cavity are restricted the from accuracy strictly and the surface roughness be under Rmax 0.03S. As a work material of anode and cavity, the oxygen-free copper, that is used for optical pares of aerospace and laser mirror is selected. An outside diameter of material is $\Phi$100 mm and an inside diameter is $\Phi$30~33 mm. In this study, to find the optimum ultra precision cuffing condition of oxygen-free copper with diamond turning machine, the surface roughness is examined for various diamond toot nose radius, main spindle speed, fred rate and depth of cut. As a result of experiment, we could machined the anode and cavity with a surface roughness within Ra 3.2 nm, a form accuracy within 0.01 $\mu\textrm{m}$.

• 한국정밀공학회지
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• 제17권12호
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• pp.68-75
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• 2000

This paper presents the construction of an ultra-precision machining system and machining experiments using the developed system. The system is composed of air bearing system, granite bed, air pad, and linear feeding mechanism. The cutting conditions have great effect on the surface quality in ultra-precision machining. the ultra-precision machining is mainly processed by several ${\mu}{\textrm}{m}$ depth of cut and feed rate. For this, tools with sharper cutting edge and less tool wear are needed. To satisfy these requirement, diamond is generally used as a tool material for ultra-precision machining. In order to evaluate the cutting characteristics of the PCD and MCD tools on the aluminum alloy, the machining experiments performed using the developed system.

• 한국생산제조학회지
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• 제20권3호
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• pp.268-273
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• 2011

In light guide panels, the PMMA sheet that is used in liquid crystal displays plays an important role in scattering the incident light and requires very fine machining as the sheet is directly related to the optical characteristics of the panels. High speed end milling(HSE) and high speed shaping(HSS) processes that are widely adopted and applied to the precise machining of light incident plane through vibration-assisted HSS for increasing the optical quality by minimizing the above-mentioned problems. The cutting tool and the tool post presented in this paper are designed by the authors to increase the magnitude of the cutting stroke by adopting the resonant frequency without weakening the stiffness and to reduce vibrations during even high speed feeding. The dynamic haracteristics of thecutting tool and the tool post are evaluated through simulation and experiment as well. The results reveal very appropriate dynamic characteristics for vibration-assisted HSS.

• 한국생산제조학회지
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• 제19권3호
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• pp.419-425
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• 2010

To machine the micro hole, laser machining system is widely used, however, the system cannot fabricate the micro hole with high aspect ratio and good surface finish. To break the obstacles, the high frequency vibration mechanism with PZT (Piezoelectric Transducers) is proposed in this paper. The mechanism will vibrate the laser beam in vertical direction so that the aspect ratio and surface finish may be higher than the conventional. The mechanism vibrates the eyepiece of laser optics. In addition to the benefits, the mechanism enables us to have high precision and flexibility. It decreases burr and debris during machining. And it is able to machine various materials of workpiece. This research include high frequency and large travel range of the proposed mechanism. The PZT motion of mechanism and analysis on the sensitivity of design parameters are extracted from a finite element method (FEM) simulation. In the analysis, the target vibration mode without parasitic motion is designated to have the target frequency and high amplitude.

• 한국정밀공학회지
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• 제30권10호
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• pp.1087-1093
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• 2013

In this study, a measurement method of double ball-bar is proposed to measure the geometric errors of an ultra-precision roll mold machine tool. A volumetric error model of the machine tool is established to investigate the effects of the geometric errors to a radius error and a cylindricity of the roll mold. A measurement path is suggested for the geometric errors, and a ball-bar equation is derived to represent the relation between the geometric errors and a measured data of the double ball-bar. Set-up errors, which are inevitable at the double ball-bar installation, also are analyzed and are removed mathematically for the measurement accuracy. In addition, standard uncertainty of the measured geometric errors is analyzed to determine the experimental condition. Finally, the proposed method is tested and verified through simulation.

• 대한기계학회논문집A
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• 제34권11호
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• pp.1613-1622
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• 2010

본 연구는 고진공 환경중 초음파 리니어 스테이지의 나노미터 위치제어를 기술하고 있다. 고진공 환경 중 초정밀 위치 제어 시스템에 응용하기 위해 3 차 종진동 모드와 6 차 횡진동 모드를 가지는 BLT를 개발 했다. 안정적인 고출력을 위해 BLT 는 하나의 공진 주파수로 두 개의 모드 진동을 발생 시켜야 한다. 하나의 공진 주파수를 이용 하기 위해 어드미턴스를 변화시켜 각 모드의 공진 주파수를 일치시켜 조건이 다른 대기 환경에서 안정적인 고출력을 얻을 수 있었다. 기압 변화에 따라 구동 특성이 달라지는 시스템을 제어하기 위해 마찰력 변화에 따른 비선형 특성을 보상한 NCTF 제어를 사용했다. 설계된 제어기를 이용해 고진공 환경에서 시스템을 나노미터 정도로 제어하는 결과를 얻을 수 있었다.

• 반도체디스플레이기술학회지
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• 제21권1호
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• pp.148-154
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• 2022

As the 4th industrial age approaches, the demand for semiconductors is increasing enough to be used in all electronic devices. At the same time, semiconductor technology is also developing day by day, leading to ultraprecision and low power consumption. Semiconductors that keep getting smaller generate heat because the energy density increases, and the generated heat changes the shape of the semiconductor package, so it is important to manage. The temperature change is not only self-heating of the semiconductor package, but also heat generated by external damage. If the package is deformed, it is necessary to manage it because functional problems and performance degradation such as damage occur. The package burn in test in the post-process of semiconductor production is a process that tests the durability and function of the package in a high-temperature environment, and heat dissipation performance can be evaluated. In this paper, we intend to review a new material formulation that can improve the performance of the adapter, which is one of the parts of the test socket used in the burn-in test. It was confirmed what characteristics the basic base showed when polyamide, a high-molecular material, and alumina, which had high thermal conductivity, were mixed for each magnification. In this study, functional evaluation was also carried out by injecting an adapter, a part of the test socket, at the same time as the specimen was manufactured. Verification of stiffness such as tensile strength and flexural strength by mixing ratio, performance evaluation such as thermal conductivity, and manufacturing of a dummy device also confirmed warpage. As a result, it was confirmed that the thermal stability was excellent. Through this study, it is thought that it can be used as basic data for the development of materials for burn-in sockets in the future.

• 한국차세대컴퓨팅학회논문지
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• 제14권6호
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• pp.44-56
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• 2018

전 세계적으로 국방력 향상을 위해 초정밀무기체계에 대한 연구가 활발히 진행되고 있다. 초정밀무기체계는 무기로 사용될 뿐만 아니라 사람이 접근하기 힘든 장소의 정찰 및 감시 역할도 수행하기 때문에 그 활용성이 점차 확장되고 있다. 이러한 무기체계가 공격의 대상이 될 경우, 국가 안보에 중요한 군사 데이터가 유출될 수 있고, 더 나아가 기기가 탈취될 경우 오히려 자국을 위협하는 테러 도구로 사용될 수 있기 때문에 이와 같은 위협을 방지하기 위해서는 무기 체계에 대한 보안이 매우 중요하다. 이러한 무기체계의 보안을 유지하기 위해서는 전원이 인가된 시점부터 응용프로그램이 실행되기까지 시스템 운용의 전반적인 모든 과정에 신뢰성을 부여하는 신뢰체인을 형성하는 것이 필요하다. 따라서 본 논문에서는 신뢰성 부팅 기술 분석을 바탕으로 신뢰성 부팅 기술을 구성하는 요소 기술들을 도출하고 하드웨어 종속/독립성을 기준으로 분류한다. 본 논문에서 분류한 하드웨어 종속/독립성에 따라 분류한 신뢰성 부팅 구성 요소를 바탕으로 신뢰성 부팅 기술을 적용하기 위해 필요한 최소한의 하드웨어 종속적인 구성 요소를 제시하여 우리 군에서 국방력 향상을 위해 자체개발하는 초정밀무기체계 설계에 적용될 수 있을 것으로 기대된다.