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Design of High frequency Vibration Mechanism with PZT actuator for Ultraprecision Laser Machining  

Kim, Hyun-Uk (아주대학교 기계공학과)
Hwang, Dong-Hyun (아주대학교 기계공학과)
Park, Jong-Kweon (한국기계연구원)
Cho, Sung-Hak (한국기계연구원)
Lee, Moon-G. (아주대학교 기계공학부)
Publication Information
Journal of the Korean Society of Manufacturing Technology Engineers / v.19, no.3, 2010 , pp. 419-425 More about this Journal
Abstract
To machine the micro hole, laser machining system is widely used, however, the system cannot fabricate the micro hole with high aspect ratio and good surface finish. To break the obstacles, the high frequency vibration mechanism with PZT (Piezoelectric Transducers) is proposed in this paper. The mechanism will vibrate the laser beam in vertical direction so that the aspect ratio and surface finish may be higher than the conventional. The mechanism vibrates the eyepiece of laser optics. In addition to the benefits, the mechanism enables us to have high precision and flexibility. It decreases burr and debris during machining. And it is able to machine various materials of workpiece. This research include high frequency and large travel range of the proposed mechanism. The PZT motion of mechanism and analysis on the sensitivity of design parameters are extracted from a finite element method (FEM) simulation. In the analysis, the target vibration mode without parasitic motion is designated to have the target frequency and high amplitude.
Keywords
PZT; High frequency Vibration; Vibration Mode; Flexure Guide; Vibration-assisted machining; Laser machining;
Citations & Related Records
Times Cited By KSCI : 4  (Citation Analysis)
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