• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2011년도 춘계학술대회 논문집
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• pp.769-770
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• 2011

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 추계학술대회 논문집
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• pp.103-104
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• 2006

• Design & Manufacturing
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• 제14권3호
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• pp.63-70
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• 2020

As the consumer market in the VR(virtual reality) and the head-up display industry grows, the demand for 5-axis machines and grooving machines using on a ultra-precision machining increasing. In this paper, ultra-precision diamond tools satisfying the cutting edge width of 500 nm were developed through the process research of a focused ion beam. The material used in the experiment was a single-crystal diamond tool (SCD), and the equipment for machining the SCD used a focused ion beam. In order to reduce the influence of the Gaussian beam emitted from the focused ion beam, the lift-off process technology used in the semiconductor process was used. 2.9 ㎛ of Pt was coated on the surface of the diamond tool. The sub-micron tool with a cutting edge of 492.19 nm was manufactured through focused ion beam machining technology. Toshiba ULG-100C(H3) equipment was used to process fine-pattern using the manufactured ultra-precision diamond tool. The ultra-precision machining experiment was conducted according to the machining direction, and fine burrs were generated in the pattern in the forward direction. However, no burr occurred during reverse machining. The width of the processed pattern was 480 nm and the price of the pitch was confirmed to be 1 ㎛ As a result of machining.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2010년도 하계학술대회 논문집
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• pp.41-41
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• 2010

In this research, to study tungsten carbide alloy(Co 0.5%) ultra precision turning possibility that is used Glass Molding Press(GMP) using conventional (Rake angle $-25^{\circ}$) single crystal diamond bite observed machining surface condition, surface roughness($R_a$), diamond bite cutting edge after tungsten carbide alloy ultra precision turning. Suggested and designed optimum chamfer bite shape to suggest ultra precision optimum bite using Finite Element Analysis(FEM). After machining tungsten carbide alloy ultra precision turning using optimum chamfer bite and comparing with conventional bite machine result and studied optimum chamfer bite design inspection and also tungsten carbide ultra precision turning possibility for high temperature compression glass lens molding.

• 한국정밀공학회지
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• 제32권5호
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• pp.431-439
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• 2015

One of common challenges in designing modern production machines is realizing high speed motion without sacrificing accuracy. To address this challenge it is necessary to maximize the stiffness of the mechanical structure and the control system with consideration on the main disturbance input, cutting forces. This paper presents analysis technologies for realizing high stiffness in production machines. First, CAE analysis techniques to evaluate the dynamic stiffness of a machine structure and a new method to construct the physical machine model for servo controller simulations are demonstrated. Second, cutting forces generated in milling processes are analyzed to evaluate their effects on the mechatronics system. In the effort to investigate the interaction among the structure, controller, and process, a flexible multi-body dynamics simulation method is implemented on a magnetic bearing stage as an example. The presented technologies can provide better understandings on the mechatronics system and help realizing high stiffness production machines.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1566-1570
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• 2005

The aspherical lenses are used as optical lens of HMD optical system. The optimum cutting condition of PMMA lens sample with ultra precision SPDT, the diamond tool nose radius, the cutting speed, the feed rate, the depth of cut, and cutting fluid type are found. The demanded surface roughness 10 nm Ra, aspherical form error $1.0\;\mu{m}$ P-V for aspherical lens of optical data storage device are satisfied.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.1885-1888
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• 2003

As high technology industries such as IT and display have developed, demand for application parts of micro lens and lens array has been extremely increasing. According to these trends, many researchers are studying on the fabrication technology for parts of the micro lens by a variety of methods such as MEMS, Lithography, LIGA and so on. In this paper, we have performed researches related to ultra precision micro lens, lens array mold and fabrication of Lenticular lens mold for three-dimensional display by using mechanical micro end-milling and fly-cutting fabrication method. Tools used in this research were a diamond tool of R 150$\mu\textrm{m}$. Cutting conditions set up feed rate, spindle revolution. depth of cut and dwell time as variables. And we analyzed surface quality variation of the processed products according to the cutting conditions, and then carried out experiments to search the optimum conditions. Through this research, we have confirmed that we can fabricate the ultra precision micro lens mold with surface roughness Ra=20nm and the holographic lens mold by using micro end-milling and fly-cutting fabrication method. Furthermore, we demonstrated problems happened in the fabrication of the micro lens and established the foundation of experimental study for formulating its improvement plan.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.97-100
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• 2004

In recent years, a demand for micro-structure machining is increasing by the development of information and optics industries. Micro machining technology is in general well known in the field of lithograghy. However, the requirement of producing micro machine and/or micro mechanism with metal materials will be increased since a variety of workpiece configurations can be easily made. In this paper, ultra precision machine is developed to obtain micro groove and mirror surface using single crystal diamond tool. According to the cutting experiment, no burr was found at the edge of V-grooves, and the surface roughness of copper is about 1～3nm Ra. It is verified that ultra precision machine is effective to high precision machining.

• 한국정밀공학회지
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• 제27권5호
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• pp.22-26
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• 2010

Recently, due to the tremendous growth of media technology, demands of the aspheric glass lens which is a high-performance and miniaturized increase gradually. Generally, the aspheric glass lens is manufactured by Glass Molding Press (GMP) method using tungsten carbide (WC) mold core. In this study, the thermal deformation which was occurred by GMP process was analyzed and applied it to compensate the aspheric glass lens. The compensated lens was satisfied that can be applied to the actual specifications.

• 한국정밀공학회지
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• 제19권4호
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• pp.79-86
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• 2002

As consumer electronics, information, and aero-space industry grow, the demand for aspheric lens increases higher. To enhance the precision and productivity of aspheric surface, a CAM system for ultra-precision aspheric surface needs to be realized. In this study, the developed CAM system can generate NC code fur various aspheric surfaces fast and precisely by a new bi-arc interpolation method that the location of maximum error is fixed at an efficient point. The newly developed bi-arc meets the given tolerance more precisely, performs faster calculation. The cutting condition input module and the NC code verification module are adequate to ultra-precision machining, so that a operator can obtain products fast and easily.