• 한국결정성장학회지
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• 제10권2호
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• pp.128-133
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• 2000

Numerical analysis of the transport phenomena in an inductively coupled plasma reactor was conducted with two-dimensional axisymmetric model including the electromagnetic field model, electron and species density models. The spatial distribution of the charged species in the ion flux to the wafer have been calculated to examine the influence of the process conditions including antenna and reactor geometry. The antenna radius had a significant influence on the plasma state and axial ion flux distribution.

• 한국전기전자재료학회논문지
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• 제17권12호
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• pp.1301-1307
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• 2004

Reduced pressure chemical vapor deposition(RPCYD) technology has been investigated for the growth of SiGe epitaxial films with two dimensional in-situ doped boron impurities. The two dimensional $\delta$-doped impurities can supply high mobility carriers into the channel of SiGe heterostructure MOSFETs(HMOS). Process parameters including substrate temperature, flow rate of dopant gas, and structure of epitaxial layers presented significant influence on the shape of two dimensional dopant distribution. Weak bonds of germanium hydrides could promote high incorporation efficiency of boron atoms on film surface. Meanwhile the negligible diffusion coefficient in SiGe prohibits the dispersion of boron atoms: that is, very sharp, well defined two-dimensional doping could be obtained within a few atomic layers. Peak concentration and full-width-at-half-maximum of boron profiles in SiGe could be achieved in the range of 10$^{18}$ -10$^{20}$ cm$^{-3}$ and below 5 nm, respectively. These experimental results suggest that the present method is particularly suitable for HMOS devices requiring a high-precision channel for superior performance in terms of operation speed and noise levels to the present conventional CMOS technology.

• 한국항공우주학회지
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• 제45권6호
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• pp.523-530
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• 2017

높은 에너지의 레이저가 조사되면 레이저 삭마 현상을 일으키고, 결과적으로 플라즈마가 물질에 따라 특정한 파장의 빛을 방출하는 레이저 유도 파괴 분광법(LIBS, Laser-Induced Breakdown Spectroscopy)과 빛은 산란 현상에 대해 분자 간 혹은 분자 내의 회전 및 진동 운동을 측정하는 라만 분광법은 높은 정확도와 실시간 분석이 가능하다는 점, 원거리 검출이 가능하다는 장점들을 기반으로 우주 탐사 기술로써 주목을 받고 있다. 본 연구에서는 레이저 분광법을 활용하여 토양 성분의 변화에 따른 레이저 스펙트럼의 경향성을 파악하고, 이를 기반으로 2차원 화학적 분포도 실험을 진행하였다. 또한 화성(4-7 torr)과 달의 대기(<1 torr) 환경을 레이저 실험 환경 내에 구축하여 인공적인 우주 환경에서 LIBS와 라만 분광법을 활용하여 토양 성분의 변화에 따른 LIBS와 라만 분광법을 통한 계측이 가능함을 증명하였다.

• Transactions on Electrical and Electronic Materials
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• 제7권4호
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• pp.173-179
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• 2006

Due to the limitations of the channel length, the lateral spread for two-dimensional impurity distributions is critical for the analysis of devices including the integrated complementary metal oxide semiconductor (CMOS) circuits and high frequency semiconductor devices. The developed codes were then compared with the two-dimensional implanted profiles measured by transmission electron microscope (TEM) as well as simulated by a commercial TSUPREM4 for verification purposes. The measured two-dimensional TEM data obtained by chemical etching-method was consistent with the results of the developed analytical model, and it seemed to be more accurate than the results attained by a commercial TSUPREM4. The developed codes can be applied on a wider energy range $(1KeV{\sim}30MeV)$ than a commercial TSUPREM4 of which the maximum energy range cannot exceed 1MeV for the limited doping elements. Moreover, it is not only limited to diffusion process but also can be applied to implantation due to the sloped and nano scale structure of the mask.

• 한국고분자학회:학술대회논문집
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• 한국고분자학회 2006년도 IUPAC International Symposium on Advanced Polymers for Emerging Technologies
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• pp.113-113
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• 2006

Polymer separations are used to obtain information on molecular distributions (molecular-weight distribution, chemical-composition distribution, functionality-type distribution, etc.). The existing methods, such as size-exclusion chromatography are reliable, but imperfect. New methods and improvements to existing methods are being studied and some of the results will be discussed. In addition, comprehensive two-dimensional liquid chromatography allows the complete characterization of two mutually dependent distributions. LCxSEC chromatograms provide a very good qualitative impression of the distributions, but calibration is not straightforward. Finally, progress in mass spectrometry allows much better information to be obtained.

• Journal of Mechanical Science and Technology
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• 제17권9호
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• pp.1358-1370
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• 2003

The effects of anode, cathode, and cooling channels for a Proton Exchange Membrane Fuel Cell (PEMFC) on flow fields have been investigated numerically. Continuous open-faced fluid flow channels formed in the surface of the bipolar plates traverse the central area of the plate surface in a plurality of passes such as a serpentine manner. The pressure distributions and velocity profiles of the hydrogen, air and water channels on bipolar plates of the PEMFC are analyzed using a two-dimensional simulation. The conservation equations of mass, momentum, and energy in the three-dimensional flow solver are modified to include electro-chemical characteristics of the fuel cell. In our three-dimensional numerical simulations, the operation of electro-chemical in Membrane Electrolyte Assembly (MEA) is assumed to be steady-state, involving multi-species. Supplied gases are consumed by chemical reaction. The distributions of oxygen and hydrogen concentration with constant humidity are calculated. The concentration of hydrogen is the highest at the center region of the active area, while the concentration of oxygen is the highest at the inlet region. The flow and thermal profiles are evaluated to determine the flow patterns of gas supplied and cooling plates for an optimal fuel cell stack design.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2003년도 ICCAS
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• pp.1798-1803
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• 2003

In this work the dynamic heat transfer occurring in a cable penetration fire stop system built in the firewall of nuclear power plants is three-dimensionally investigated to develop a test-simulator that can be used to verify effectiveness of the sealants. The dynamic heat transfer can be described by a partial differential equation (PDE) and its initial and boundary conditions. For the shake of simplicity PDE is divided into two parts; one corresponding to the heat transfer in the axial direction and the other corresponding to the heat transfer on the vertical layers. Two numerical methods, SOR (Sequential Over-Relaxation) and FEM (Finite Element Method), are implemented to solve these equations respectively. The axial line is discretized, and SOR is applied. Similarly, all the layers are separated into finite elements, where the time and spatial functions are assumed to be of orthogonal collocation state at each element. The heat fluxes on the layers are calculated by FEM. It is shown that the penetration cable influences the temperature distribution of the fire stop system very significantly. The simulation results are shown in the three-dimensional graphics for the understanding of the transient temperature distribution in the fire stop system.

• Korea-Australia Rheology Journal
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• 제13권2호
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• pp.97-106
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• 2001

Three-dimensional flow analysis was performed by using the control volume finite-element method for design of a profile extrusion die. Because polymer melt behavior is complicated and cross-sectional shape of the profile extrusion die is changing continuously, the fluid flow within the die must be analyzed three-dimensionally. A commercially available polypropylene is used for theoretical and experimental investigations. Material properties are assumed to be constant except for the viscosity. The 5-constant modified Cross model is used for the numerical analysis. A test problem is examined in order to verify the accuracy of the numerical method. Simulations are performed for conditions of three different screw speeds and three different die temperatures. Predicted pressure distribution is compared with the experimental measurements and the results of the previous two-dimensional study. The computational results obtained by using three dimensional CVFEM agree with the experimental measurements and are more accurate than those obtained by using the two-dimensional cross-sectional method. The velocity profiles and the temperature distributions within several cross-sections of the die are given as contour plots.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.98-99
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• 2012

Deposition of thin films using magnetron sputtering plasmas is a well-developed, classical technology. However, detailed investigations using advanced diagnostics are insufficient in magnetron sputtering, in comparison with plasma-aided dry etching and plasma-enhanced chemical vapor deposition. In this talk, we will show examples of diagnostic works on magnetron sputtering employing metal targets. Diagnostic methods which have fine spatial resolutions are suitable for magnetron sputtering plasmas since they have significant spatial distributions. We are using two-dimensional laser-induced fluorescence spectroscopy, in which the plasma space is illuminated by a tunable laser beam with a planer shape. A charge-coupled device camera with a gated image intensifier is used for taking the picture of the image of laser-induced fluorescence formed on the planer laser beam. The picture of laser-induced fluorescence directly represents the two-dimensional distribution of the atom density probed by the tunable laser beam, when an intense laser with a relatively wide line-width is used. When a weak laser beam with a relatively narrow linewidth is used, the laser-induced fluorescence represents the density distribution of atoms which feel the laser wavelength to be resonant via the Doppler shift corresponding to their velocities. In this case, we can obtain the velocity distribution function of atoms by scanning the wavelength of the laser beam around the line center.

• Carbon letters
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• 제25권
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• pp.25-32
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• 2018

In this study, a thermal-gradient chemical vapor infiltration (TG-CVI) process was numerically studied in order to enhance the deposition uniformity within the preform. The computational fluid dynamics technique was used to solve the governing equations for heat transfer and gas flow during the TG-CVI process for two- and three-dimensional (2-D and 3-D) models. The temperature profiles in the 2-D and 3-D models showed good agreement with each other and with the experimental results. The densification process was investigated in a 2-D axisymmetric model. Computation results showed the distribution of the SiC deposition rate within the preform. The results also showed that using two-zone heater gave better deposition uniformity.