• Proceedings of the Optical Society of Korea Conference
• /
• 2001.02a
• /
• pp.120-121
• /
• 2001

고분해능을 장점으로 하는 근접장 광학 현미경(NSOM)은 최근 높은 관심을 모으고 있으나, 그 촬영 속도가 너무 느린 이유로 실제적인 활용이 미비한 상황이다. scanning 속도를 높이고자 하는 노력들이 많이 진행되고 있으나[1-2] 아직도 실시간 촬영과는 거리가 멀다. 기존의 근접장 광학 현미경(NSOM)은 tuning fork를 사용하여 탐침을 진동시키고 그 진동의 진폭 또는 위상의 변화를 측정함으로써 탐침과 시료의 거리를 측정하는 방식을 사용한다. (중략)

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 1996.04a
• /
• pp.156-160
• /
• 1996

A vibrating angular rate sensor with tuning fork type resonator of microstructure (940*820 .mu. m$^{2}$) was designed and will be fabricated by polysilicon surface micromaching. The angular rate sensor is driven in a lateral direction by electrostatic force of comb drive electrodes, and vertical vibrations of the sensor, thich is detected capacitively, are produced by Coriolis forces due to an external angular rate. Mechanical Q factors and a difference between the frequencies of the two resonant modes, the driving mode and detecting mode, play a great role in increasing the sensitivity of the sensor. To be a highly sensitive sensor, it was designed to have as small frequency discrepancy of the two resonant modes as possible. Finite element method was used for the modal analysis. Several design parameters were selected and their contributions to the modal frequencies were investigated. A method was presented for tuning the detecting mode frequency by DC bias on the drive electrodes.

• Korean Journal of Optics and Photonics
• /
• v.10 no.4
• /
• pp.267-272
• /
• 1999

We attached a fiber tip on the branch of a quartz crystal oscillator in order to make a feedback control system for near field optical microscope. The electrical impedance of the quartz crystal oscillator depends on the distance between the surface of the sample and the tip caused by the surface damping. Using this method, we can directly monitor the distance between the sample and the tip without inserting extra beam which might give extra optical noise. We characterize the XY scanning resolution and the amplitude of the vibrating tip and the Z-dependent decay of the evanescent wave.

• Journal of the Korean Society for Precision Engineering
• /
• v.17 no.6
• /
• pp.46-52
• /
• 2000

산업사회가 발전하면서 초정밀 분야의 측정기술 또한 시대적 요구에 걸맞게 발전을 거듭하고 있다. 광을 이용한 측정기술에 있어서 보다 작은광 스팟의 구현은 높은 분해능을 위해서 필수 불가결한 조건이며, 광 기록분야에 있어서는 높은 기록밀도를 위해 핵심적인 기술이다. 하지만 스팟의 직경은 광의 회절한계(diffraction limit)에 의한 최소치를 갖는다. 예로서, 측정을 위한 광학 현미경 중 현재 일반적으로 널리 쓰이는 고배율 광학 현미경(high resolution optical microscope)은 측정 대상 표면에 물리적 손상을 주지 않으며, 측정 범위가 크고, 값이 싼 장점이 있다.(중략)

• The Transactions of The Korean Institute of Electrical Engineers
• /
• v.56 no.7
• /
• pp.1218-1223
• /
• 2007

A surface micro machined angular rate sensor utilizing a vibrating MEMS structure on a silicon has been developed. These tuning fork angular rate sensors are extremely rugged, inherently balanced, and easy to fabricate. The device is fabricated using a temperature compensation method based on automatic gain control technique. A linearity of approximately 0.6%, limited by the on-chip electronics has been obtained with this new sensor. Tests of the sensor demonstrate that its performance is equivalent to that required for implementation of a yaw control system. Vehicle handling and safety are substantially improved using the sensor to implement yaw control.

• 제어로봇시스템학회:학술대회논문집
• /
• 1991.10a
• /
• pp.783-786
• /
• 1991

Generally, The position of mobile robot moving on the plane is measured by the method of dead reckoning, using the encoder system coupled on a wheel axis. But it is noted that the encoder system cannot check the slip of a wheel, often occurring in tracking of the mobile robot. In this study, using velocity angular velocity sensor with a tuning fork vibration system, the system is developed which can measure the directional angle of positional variables on the mobile robot. By measuring the variations of tracking direction mobile robot equipped with this system, following result is found; In spite of the slip at a wheel when measuring the tracking directional angle, the error occurs in the range of .+-. 1 (degree).

• Journal of the Korean Society for Precision Engineering
• /
• v.24 no.10
• /
• pp.83-90
• /
• 2007

The vehicle dynamic control system needs to detect the yaw rate of vehicle and a yaw rate sensor is required as a central component. Therefore, A sensor on the basic of the "tuning fork method" for automotive controls is being developed. The sensor was fabricated by the surface micro machining process to miniaturize its size. The sensor output offset is ${\pm}0.37^{\circ}/sec$ in the room temperature. The resonance frequency of the fabricated yaw rate sensor is measured to 5.29kHz for the drive mode. Tests of the sensor demonstrate that its performance is equivalent to that required for implementation of a yaw control system. Vehicle handling and safety are substantially improved using the sensor to implement yaw control.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
• /
• 2001.05a
• /
• pp.115-120
• /
• 2001

A gyroscope is a rotating body possessing one axis of symmetry and whose rotation about the symmetry axis is relatively large compared with the rotation about any other axis. Tuning fork is this type of structure that various modem gyro-sensors are based on. In this paper, dynamic behavior of a cantilevered beam subjected ta a base rotation with respect to the eccentric axis that is parallel to the beam axis is analyzed. The final equations of motion in terms of generalized coordinates can be solved with numerical scheme with various values of angular velocities and angular accelerations of the rotating axis. In contrast to the case of rotating cantilever beam like helicopter blade, the rotational motion with respect to the beam axis has effect to decrease the stiffness of the beam and has unstable region depending on the magnitude of the rotational angular velocity and angular acceleration.

• Proceedings of the KIEE Conference
• /
• 2008.07a
• /
• pp.1743-1744
• /
• 2008

NSOM(Near-field Scanning Optical Microscopy) 조화 진동자(Tuning fork)와 광섬유 탐침을 결속시켜 미소신호를 검출하여 증폭과 잡음을 제거하기 위한 Pre-amplifier의 설계 및 제작과 더불어 시료-탐침간 거리를 파장보다 짧게 유지시키는 Shear force 검출, 효율적인 시료-탐침 거리유지 알고리즘 구연 및 탐침을 시료 표면에서 일정한 거리를 안정적으로 유지하도록 제어 및 시료의 높이 정보를 얻어내는 시스템을 설계 및 제작하였다. 또한 ����$CO_2Laser$를 이용한 Heat Pulling 장치개발을 통해 탐침을 제작, LabVIEW를 통해 개별적인 시스템을 하나로 통합하여 AFM 테스트 시료인 SiO 샘플의 표면 형상을 측정하였다.

• Journal of Institute of Control, Robotics and Systems
• /
• v.11 no.5
• /
• pp.463-470
• /
• 2005

This paper describes a method aimed at improving dead-reckoning accuracy with gyroscopes in mobile robots. The method is a precision calibration procedure for gyroscopes, which effectively reduces the ill effects of nonlinearity of the scale-factor and temperature dependency. This paper also describes the methods of gyro data collection fur all ambient temperature$(-40^{\circ}C{\~}+80^{\circ}C)$ using cubic spline interpolation and defining the error function. The sensor used was a vibrating gyroscope called the EWTS82NA21, which is low lost and commonly used in car navigation system, made by Panasonic. This angular rate sensor utilizes Coriolis force generated by a vibrating tuning fork. The paper also provides experimental results to check the performance and the effectiveness of the proposed method.