Fabrication of metal line on plastic substrate by hot embossing and CMP process (핫 엠보싱 공정과 CMP 공정을 이용한 플라스틱 기판에 메탈 라인 형성)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2005.07a
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- pp.655-656
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- 2005