• Journal of the Semiconductor & Display Technology
• /
• v.3 no.1
• /
• pp.31-34
• /
• 2004

We develop Mueller-matrix spectroscopic ellipsometry based on dual compensator configuration. This technique is very powerful for measuring surface anisotropy in nano-scale, especially when materials show depolarization. Dual-rotating compensator configuration is adopted with the rotational ratio of 5:3 originally developed by Collins et al[1]. The instrument can provide 250-point spectra over the wavelength range from 230 nm to 820 nm in one irradiance waveform with minimum acquisition time of Tc=10 s. In this work, the results obtained in transmission modes are presented for the initial attempt. We present calibration procedures to diagnose the system from the utilized data collected in transmission mode without sample. We expect that the instrument will have important applications in thin films and surfaces that have anisotropy and inhomogeneity.

• 한국정보디스플레이학회:학술대회논문집
• /
• 2006.08a
• /
• pp.1715-1718
• /
• 2006

Evaluating method of the device parameters of liquid crystal display (LCD) by means of the renormalized transmission spectroscopic ellipsometry is demonstrated. Dielectric and elastic constant, threshold voltage, pretilt angle, cell gap and Anchoring strength coefficients can be evaluated from the measurement of ellipsometric parameters measured by the symmetrically oblique incidence transmission ellipsometry (SOITE). Furthermore, rapid evaluating method for rubbed polyimide film is also demonstrated.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
• /
• 2004.05a
• /
• pp.169-173
• /
• 2004

Rotating Compensator Ellipsometry에 회전하는 시편 홀더를 갖추었을 때 uniaxial한 시편의 광축과 retardance를 측정하는 것이 매우 간단해진다. 이것은 Dual Rotating Compensator Transmission Ellipsometry의 self-calibration과정과 흡사하기 때문이다. 기존의 ellipsometry가 광학 부품들의 입사면에 대한 방위각을 찾는 복잡한 calibration과정과 비등방성 시편의 고속축의 방향을 찾아야 하는 수고를 필요로 하지만 rotating sample and compensator ellipsometry는 self-calibration과 자동으로 고속축의 방향을 찾기 때문에 매우 편리하다. 우리는 이 기술를 정렬된 액정display panel에 적용하여 ~$0.4^{\circ}$ 의 작은 retardance 간을 측정할 수 있었다.

• 한국정보디스플레이학회:학술대회논문집
• /
• 2005.07a
• /
• pp.191-194
• /
• 2005

Evaluating methods of the polar and/or azimuthal anchoring strength coefficients by means of the renormalized transmission spectroscopic ellipsometry are demonstrated. The Anchoring strength coefficients can be evaluated from the measurement of ellipsometric parameters measured by the oblique incident transmission ellipsometry, where the effect of multiplebeam interference is eliminated. The device parameters such as the pretilt angle and cell gap can be determined simultaneously even in the case of the twisted nematic liquid crystal sample cells.

• Journal of the Optical Society of Korea
• /
• v.18 no.2
• /
• pp.156-161
• /
• 2014

Anisotropy profile of a rubbed polyimide film is investigated using both a modified ultra high precision transmission ellipsometer and the analysis software previously developed to determine the optic axis distribution of discotic liquid crystals in the wide view film. The distorted sinusoidal variation of the ellipsometric constants obtained at an oblique angle of incidence indicates that the optic axis varies from $14.7^{\circ}$ to $40.6^{\circ}$ from the sample plane. The magnitude and distribution of anisotropy is expressed in terms of no, ne, and the cosine-shaped tilt angle distribution of the optic axis in a rubbed polyimide film.

• 한국정보디스플레이학회:학술대회논문집
• /
• 2004.08a
• /
• pp.63-66
• /
• 2004

Transparent MgO thin films were deposited on glass substrates by electron beam evaporation of MgO (99.99%) under $O_2$ atmosphere at 150-250 $^{\circ}C$. These films were characterized for their useful properties such as thickness, transmission, and refractive index using ultraviolet / visible (UV/VIS) spectrophotometer, scanning electron microscopy (SEM), and Spectroscopic Ellipsometry. The thickness of MgO films were measured by alpha step instrument and found to be 600 nm to 1000 nm and are meeting the stoichiometry. The transmission spectrum of these films shows transmittance values ${\sim}$92%..

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
• /
• 2003.12a
• /
• pp.12-17
• /
• 2003

We develop Mueller-matrix spectroscopic ellipsometry based on dual compensator configuration. This technique is very powerful for measuring surface anisotropy in nano-scale, especially when materials show depolarization. Dual-rotating compensator configuration is adopted with the rotational ratio of 5:3 originally developed by Collins et al [1]. The instrument can provide 250-point spectra over the wavelength range from 230 nm to 820 nm in one irradiance waveform with minimum acquisition time of $Tc{\approx}10 s$. In this work, the results obtained in transmission modes are presented for the initial attempt. We present calibration procedures to diagnose the system from the utilize data collected in transmission mode without sample. We expect that the instrument will have important applications in thin films and surfaces that have anisotropy and inhomogeneity.

• Proceedings of the Optical Society of Korea Conference
• /
• 2001.02a
• /
• pp.256-259
• /
• 2001

Rotating-compensator type ellipsometer was developed for spectroscopic measurements. For accurate data reduction, the azimuths of transmission axises of polarizer and analyzer, and the angular position of the fast axis of compensator should be determined through calibration process. In this paper, we present various calibration methods.

• Korean Journal of Optics and Photonics
• /
• v.8 no.4
• /
• pp.277-282
• /
• 1997

The complex refractive index of Diamond-like Carbon (DLC) thin films, which can be applied to optical devices or electrical devices, have been determined using optical methods. DLC thin films are grown on Si(100) substrates and vitreous silica substrates respectively, using the technique of plasma enhanced chemical vapor deposition (PECVD). The spectroscopic ellipsometry data($\psi$, $\Delta$) and the transmission spectra of these DLC films are obtained. These optical spectra are analyzed with the help of the Sellmeier dipersion relation and a quantum mechanically derived dispersion relation. Using spectroscopic ellipsometry data at their transparent region, the refractive index and the effective thickness of DLC films on vitreous silica are model calculated, Then the transmission spectra are inverted to yield the extinction coefficient spectra k(λ) at absorbing region. These spectra are fit to the quantum mechanical dispersion relation and the best fit dispersion constants are determined. The complex refractive indices are easily calculated with these constants. The spectroscopic ellipsometry data at the absorbing region in model calculated to give the packing densities and the degrees of surface microroughness of DLC films. Discussions are made in correlation with the growth condition of DLC films.

• Korean Journal of Optics and Photonics
• /
• v.20 no.5
• /
• pp.288-293
• /
• 2009

Polarization characteristics of a composite film composed of two optically anisotropic films are analyzed. The procedure to determine the effective optics axis and the equivalent retardation of the composite film is suggested in conjuction with the related ellipsometric expressions. The explicit expressions of the effective optic axis and the equivalent retardation of a non-uniform anisotropic film are derived when all optic axes are parallel. Those expressions of the composite film where optic axes of two constituting anisotropic films are not parallel are also derived. Dependence of those expressions on the polarization state of the incident light or the azimuth angle of the linearly polarized light and their limit when applied to practical use are discussed.