• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제54권4호
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• pp.144-148
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• 2005

In this study, the microwave dielectric properties of $0-6TiTe_3O_8-0.4MgTiO_3$ ceramic with $H_3BO_3$ and SnO were investigated to reduce the sintering time for the LTCC application. According to the X-ray diffraction patterns, both of $0-6TiTe_3O_8-0.4MgTiO_3$ ceramic with $H_3BO_3$ and SnO had the columbite structure of $TiTe_3O_8$ Phase, the ilmenite structure of $MgTiO_3$ phase. The density and dielectric constant of the $0-6TiTe_3O_8-0.4MgTiO_3$ ceramics with $H_3BO_3$ sintered at $830^{\circ}C$ for 1 hour were decreased but the quality factor was not changed with addition of $H_3BO_3$. Also the temperature coefficient of resonant frequency was not changed hardly. In the case of addition of SnO, the density and dielectric constant were increased but the quality factor was decreased and the temperature coefficient of resonant frequency was shifted to the negative(-) direction.

• 한국세라믹학회지
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• 제34권4호
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• pp.373-379
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• 1997

A study on the deposition and characterization of BaTiO3 thin films on MgO-buffered Si(100) substrates by sputtering was conducted. The MgO buffer layers were investigated as a function of deposition temperature. At lower substrate temperature, the MgO layers were not fully crystalline, but a crystallized MgO layer with (001) preferred orientation was obtained at the substrate temperature of $700^{\circ}C$. Partially (00ι) or (h00) textured BaTiO3 films were obtained on Si(100) with the MgO buffer layer grown at 700ι. While, randomly oriented BaTiO3 films with large-scale cracks on the surface were made without the MgO layer. The crystallographic orientation, morphology and electrical properties between the BaTiO3 films on Si with and without the MgO layer were compared using the BaTiO3 film on MgO(100) single crystal substrate as a reference system. Also the favorable role of the MgO layer as a buffer for growing of oriented BaTiO3 films on Si substrates was confirmed.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제55권6호
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• pp.291-296
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• 2006

In this study, the sputtered BTO film was polished by CMP process with the self-developed $BaTiO_3$- and $TiO_2$-mixed abrasives slurries (MAS), respectively. The removal rate of BTO ($BaTiO_3$) thin film using the $BaTiO_3$-mixed abrasive slurry (BTO-MAS) was higher than that using the $TiO_2$-mixed abrasives slurry ($TiO_2$-MAS) in the same concentrations. The maximum removal rate of BTO thin film was 848 nm/min with an addition of $BaTiO_3$ abrasive at the concentration of 3 wt%. The sufficient within-wafer non-uniformity (WIWNU%) below 5% was obtained in each abrsive at all concentrations. The surface morphology of polished BTO thin film was investigated by atomic force microscopy (AFM).

• Bulletin of the Korean Chemical Society
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• 제33권7호
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• pp.2305-2308
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• 2012

Perovskite structured barium titanate particles ($BaTiO_3$) platelets were synthesized by molten salt synthesis and topochemical microcrystal conversion. As the precursors of $BaTiO_3$, plate-like $BaBi_4Ti_4O_{15}$ particles were first synthesized by the reaction of $Bi_4Ti_3O_{12}$, $BaCO_3$, and $TiO_2$ at $1080^{\circ}C$ for 3 h in $BaCl_2$-KCl molten salt. After the topochemical reactions, layer-structured $BaBi_4Ti_4O_{15}$ particles transformed to the perovskite $BaTiO_3$ platelets. $BaTiO_3$ particles with thickness of approximately $0.5{\mu}m$ and a length of $10-15{\mu}m$ retained the morphology feature of the $BaBi_4Ti_4O_{15}$ precursor. For <001> $Pb(Mg_{1/3}Nb_{2/3})O_3-32.5PbTiO_3$ (PMNT)-5 wt % PbO piezoelectric ceramics textured with 5 vol % of $BaTiO_3$ templates, the Lotgering factor reached 0.82, and $d_{33}$ was 870 pC/N.

• Journal of Magnetics
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• 제14권3호
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• pp.120-123
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• 2009

In this study, BiFe$O_3$-BaTi$O_3$ ceramics have been fabricated by a solid-state reaction method. The effects of BaTi$O_3$ content in the (1-x)BiFe$O_3$-xBaTi$O_3$ (x = 0.1, 0.2, 0.25, 0.3, 0.4, 0.5) system on crystal structure and magnetic, dielectric, and ferroelectric properties were investigated. Perovskite BiFe$O_3$ was stabilized through the formation of a solid solution with BaTi$O_3$. Rhombohedrally distorted structure (1-x)BiFe$O_3$-xBaTi$O_3$ ceramics showed strong ferromagnetism at x = 0.5. Dielectric and ferroelectric properties of the BiFe$O_3$-BaTi$O_3$ system also changed significantly upon addition of BaTi$O_3$. It was found that the maximum dielectric and ferroelectric properties were exhibited in the (1-x)BiFe$O_3$-xBaTi$O_3$ system at x = 0.25. This suggested the morphotropic phase boundary (MPB) with the coexistence of both rhombohedral and cubic phases of the (1-x)BiFe$O_3$-xBaTi$O_3$ system at x = 0.25.

• 한국재료학회지
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• 제21권9호
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• pp.509-514
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• 2011

In this study, optical emission spectroscopy was used to monitor the plasma produced during the RF magnetron sputtering of a $BaTiO_3$ target. The intensities of chemical species were measured by real time monitoring with various discharge parameters such as RF power, pressure, and discharge gas. The emission lines of elemental and ionized species from $BaTiO_3$ and Ti targets were analyzed to evaluate the film composition and the optimized growth conditions for $BaTiO_3$ films. The emissions from Ar(I, II), Ba(I, II) and Ti(I) were found during sputtering of the $BaTiO_3$ target in Ar atmosphere. With increasing RF power, all the line intensities increased because the electron density increased with increasing RF power. When the Ar pressure increased, the Ba(II) and Ti(I) line intensity increased, but the $Ar^+$ line intensity decreased with increasing pressure. This result shows that high pressure is of greater benefit for the ionization of Ba than for that of Ar. Oxygen depressed the intensity of the plasma more than Ar did. When the Ar/$O_2$ ratio decreased, the intensity of Ba decreased more sharply than that of Ti. This result indicates that the plasma composition strongly depends on the discharge gas atmosphere. When the oxygen increased, the Ba/Ti ratio and the thickness of the films decreased. The emission spectra showed consistent variation with applied power to the Ti target during co-sputtering of the $BaTiO_3$ and Ti targets. The co-sputtered films showed a Ba/Ti ratio of 1.05 to 0.73 with applied power to the Ti target. The films with different Ba/Ti ratios showed changes in grain size. Ti excess films annealed at $600^{\circ}C$ did not show the second phase such as $BaTi_2O_5$ and $TiO_2$.

• Bulletin of the Korean Chemical Society
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• 제30권1호
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• pp.201-204
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• 2009

$BaTiO_3/SrTiO_3$ and $PbTiO_3/PbZrO_3$ superlattice thin films were fabricated on $Pt/Ti/SiO_2/Si$ substrate by the pulsed laser deposition process. The morphologies and physical properties of deposited films were characterized by using X-ray diffractometer, HR-SEM, and Impedance Analyzer. XRD data and SEM images of the films indicate that each layer was well deposited alternatively in the superlattice structure. The dielectric constant of $BaTiO_3/SrTiO_3$ superlattice thin film was higher than that of individual $BaTiO_3$ or $SrTiO_3$ film. Same result was obtained in the $PbTiO_3/PbZrO_3$system. The dielectric constant of a superlattice film was getting higher as the number of layer is increased.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2002년도 하계학술대회 논문집 C
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• pp.1485-1487
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• 2002

The 0.96Mg$TiO_3$-0.04Sr$TiO_3$ ceramics with $V_2O_5$(5wt%) were prepared by the conventional mixed oxide method. The structural properties were investigated with sintering temperature by XRD and SEM. According to the X-ray diffraction patterns of the 0.96Mg$TiO_3$-0.04Sr$TiO_3$ceramics with $V_2O_5$(5wt%), the ilmenite $MgTiO_3$ and perovskite $SrTiO_3$ structures were coexisted and secondary phase $MgTi_2O_5$ were appeared. Increasing the sintering temperature, the grain size was increased and three types of grains were exhibited: larger circular grain, small square grain and lapth-shaped grain. In the case of 0.96Mg$TiO_3$-0.04Sr$TiO_3$ ceramics with $V_2O_5$(10wt%), dielectric constant, quality factor and temperature coefficient of resonant frequency were $15.24{\sim}18.55$, $22,890{\sim}42,100$GHz, -24.5${\sim}$+2.414ppm/$^{\circ}C$, respectively.

• 한국세라믹학회지
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• 제38권3호
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• pp.225-230
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• 2001

저전압용 형광체로 주목받고 있는 SrTiO$_3$:Pr,Al 형광체를 고상반응법으로 제조하였다. 부활성체 Al이 23 mol% 첨가되었을 때 SrTiO$_3$:Pr 형광체는 최대 발광 강도를 보여주었다. 최대 발광 강도를 보인 형광체에 대해 제한시야회절상과 투과전자현미경을 이용하여 SrTiO$_3$:Pr,Al 적색 형광체내 2차상 형성에 대한 연구를 행하였고 또한 에너지 분산 분광 분석을 행하여 SrTiO$_3$:Pr,Al 형광체내 주입된 부활성제 Al의 함량을 결정하였다. 제한시야회절상의 결과에 의하면 SrTiO$_3$:Pr,Al 적색 형광체내에 단사정 SrAl$_2$O$_4$, 삼사정 Ti$_4$O$_{7}$, 육방정 SrAl$_{12}$O$_{19}$가 2차상으로 존재함을 보여 주었다. 에너지 분산 분광 분석 결과 부활성제 Al의 함량 중 일부는 SrTiO$_3$:Pr,Al 적색 형광체 격자에 고용되고 일부 Al은 SrAl$_{12}$O$_{19}$와 SrAl$_2$O$_4$의 2차상을 형성하는데 소모됨을 보여주었다.주었다.

• 전자공학회논문지D
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• 제35D권10호
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• pp.51-59
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• 1998

(Na½Ln½) TiO₃(Ln = La, Pr, Nd, Sm)은 양의 온도계수(190 ∼ 480ppm/℃), 고유전율(99∼127)의 특성을 갖고 있다. 반면에 MgTiO₃는 음의 온도계수(-45ppm/℃), 저유전손실(110,000㎓)을 갖고 있다. 그래서 xMgTiO₃(1-x) (Na½Ln½) TiO₃의 유전특성에 관심을 갖게 되었고, 초고주파 대역에서의 유전특성을 측정하고 미세구조를 관찰하여, 몰비변화와 소결온도변화에 따른 경향성을 파악하였으며, 그 원인을 연구하였다. 그 결과 MgTiO₃와 (Na½Ln½) TiO₃는 구조적으로 새로운 고용체나 이차상을 형성하지 않는 혼합상을 이루고 있었다. 그리고 이들의 유전특성은 (Na½Ln½) TiO₃와 MgTiO₃의 중간 값을 나타냈고, logarithmic mixing rule로써 유전특성을 예측할 수 있다. 이중에서 온도에 안정한 조성은 Ln = La, Pr, Nd으로 치환되었을 경우 각각 x = 0.9, 0.87, 0.84이었다. 이때의 유전율은 22 ∼25, Qf값은 55000 ∼ 28000㎓를 나타내었다. 이로써 온도에 안정한 유전특성을 갖는 새로운 유전체 재료를 개발하였으며, 특히 Ln = La으로 치환되었을 경우 다른 조성에 비하여 유전특성이 좋을 뿐아니라, 소결온도 범위가 넓어 공정상의 잇점을 가지고 있다.