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http://dx.doi.org/10.5012/bkcs.2009.30.1.201

Properties of MTiO3 (M = Sr, Ba) and PbM'O3(M'= Ti, Zr) Superlattice Thin Films Fabricated by Laser Ablation  

Lim, T.M. (Department of Chemistry and Institute of Natural Basic Sciences, Wonkwang University)
Park, J.Y. (Department of Chemistry and Institute of Natural Basic Sciences, Wonkwang University)
Han, J.S. (Department of Chemistry and Institute of Natural Basic Sciences, Wonkwang University)
Hwang, P.G. (Department of Chemistry and Institute of Natural Basic Sciences, Wonkwang University)
Lee, K.H. (Nanoscale Science and Technology Institute, Wonkwang University)
Jung, K.W. (Department of Chemistry and Institute of Natural Basic Sciences, Wonkwang University)
Jung, D. (Department of Chemistry and Institute of Natural Basic Sciences, Wonkwang University)
Publication Information
Bulletin of the Korean Chemical Society / v.30, no.1, 2009 , pp. 201-204 More about this Journal
Abstract
$BaTiO_3/SrTiO_3$ and $PbTiO_3/PbZrO_3$ superlattice thin films were fabricated on $Pt/Ti/SiO_2/Si$ substrate by the pulsed laser deposition process. The morphologies and physical properties of deposited films were characterized by using X-ray diffractometer, HR-SEM, and Impedance Analyzer. XRD data and SEM images of the films indicate that each layer was well deposited alternatively in the superlattice structure. The dielectric constant of $BaTiO_3/SrTiO_3$ superlattice thin film was higher than that of individual $BaTiO_3$ or $SrTiO_3$ film. Same result was obtained in the $PbTiO_3/PbZrO_3$system. The dielectric constant of a superlattice film was getting higher as the number of layer is increased.
Keywords
Superlattice; Laser ablation; Ferroelectric;
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