• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.291-291
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• 2013

The wettability of TiO2 layers is controlled by forming highly ordered arrays of nanocones using nanopatterning, based on self-assembly and dry etching. Nanopatterning of TiO2 layers is achieved via formation of self-assembled monolayers of SiO2 spheres fabricated using the Langmuir-Blodgett technique, followed by dry etching. Compared to a thin film TiO2 layer, the nanopatterned TiO2 samples show a smaller static water contact angle, where the water contact angle decreases as the etching time increases, which is attributed to the Wenzel equation. When TiO2 layers are coated by 1H,1H,2H,2H-perfluorooctyltrichlorosilane, we observed the opposite behavior, exhibiting superhydrophobicity (up to contact angle of $155^{\circ}$) on the nanopatterned TiO2 layers. Self-assembled nanopatterning of the TiO2 layer may provide an advanced method for producing multifunctional transparent layers with self-cleaning properties.

• Journal of the Korean Vacuum Society
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• v.5 no.2
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• pp.147-155
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• 1996

Optical properties of $TiO_2/M/Ag/M/TiO_2$ films have been changed with the diffusion barrier metal M. Optimum opticla properties of $TiO_2/M/Ag/M/TiO_2$ as the transparent heat mirror film, could be obtained with Ti among diffusion barrier metals of Ti, Cu, Zr and Al. $TiO_2/M/Ag/M/TiO_2$ film, which was fabricated by sputtering of 18 nm-thick $TiO_2$ and Ag, and 4nm-thick Ti, showed maximum transimittance of 89% at visible wavelength and infrared reflectance of 97% at wavelength of 3000 nm. Optical properties of this film was not degraded by Xenon-sunshine weather test for 240 hours. For specimens with barrier layers of Cu, Zr, and Al, degradation of optical properties by weather test was increased in a sequence of films with Cu, Zr, and Al barrier layers.

• Journal of the Korean Vacuum Society
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• v.12 no.S1
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• pp.88-91
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• 2003

Electromagnetic interference shielding and near-infrared cutoff filters for plasma display panel application were designed and fabricated by radio frequency magnetron sputtering. Three types of the filters were prepared: the basic structure of type A consisted of [$TiO_2$ Ti Ag $TiO_2$]; type B, of [$TiO_2$ ITO Ag $TiO_2$]; type C, of [$TiO_2$ ITO Ag ITO $TiO_2$]. Ti and ITO layers deposited on Ag layers were employed as barriers to prevent the oxidation and the diffusion of Ag film into the adjacent oxide layers. Optical, electrical, chemical, and structural properties were investigated, and the result shows that the filters with the ITO barrier layers provided an enhancement in transmittance in the visible owing to a lower absorption of ITO layers than Ti layers. Type C filter showed better optical and electrical performances and smoother surface roughness than Type B and C filters: the average sheet resistance was as low as 1.51 $\Omega\Box$ (where $\square$ stands for a square film), the peak transmittance in the visible was as high as 78.2 %, and the average surface roughness was 1.48 nm.

• Korean Journal of Materials Research
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• v.10 no.10
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• pp.684-690
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• 2000

In order to study effects of interfacial layers between $Pb(Zr,Til)Q_3(PZT)$ films and electrodes for Metal-Ferroelectric-MetaI(MFM) structure capacitors, we have fabricated the capacitors with the Pt/PZT/interfacial-layer/Pt/$TiO_2/SiO_2$/Si structure. $PbTiO_3(PT)$ interfacial layers were formed by sol-gel deposition and PbO, ZrO, and $TiO_2$ thin layers were deposited by reactive sputtering. $TiO_2$ interface layers result in the finest grains of PZT(crystalline Temp. $600^{\circ}C$) films compare to $PbO_2\;and\;ZrO_2$ layers. However, as the thickness of $TiO_2$ layer increases. PZT thin films become rough and electrical characteristics were deteriorated due to remained anatase phase. On the other hand. PT interface layers result in improved morphology of PZT films and do not significantly change ferroelectric properties. It is a also observed that seed layers at the middle and top of PZT films do not give significant effects on grain size but the PT seed layer at the interface between the bottom electrode and the PZT films results in the small grain size.

• Journal of Korean Vacuum Science & Technology
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• v.6 no.2
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• pp.67-70
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• 2002

Multi-period low-emissivity (low-e) filters based on [TiO$_2$｜Ti｜Ag｜TiO$_2$] layer structure were designed and fabricated by a RF magnetron sputtering method. Optical, structural, chemical, and electrical properties were investigated with various analytical tools. Interface layers consisting of Ag, Ti, and O were observed next to Ag layers by Rutherford backscattering spectrometry (RBS) analysis. The results show that Ti layers of ~ 1.8 nm protect the Ag layers from oxidation better than those of ~ 1 nm and the optical spectra of the filter with thicker Ti layers are in agreement with the simulated one. The average transmittance of a low-e filter with thicker Ti layers is reduced and the sheet resistance is slightly increased due to the increased Ti thickness.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.05b
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• pp.273-278
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• 2000

In order to study effects of interface layers between PZT films and electrodes for MFM(Metal-Ferroelectric-Metal) structure capacitors, we have fabricated the capacitors with the Pt/PZT/interface-layer/Pt/$TiO_2/SiO_2/Si$ structure. $PT(PbTiO_3)$ interface layers were formed by sol-gel deposition and PbO, $ZrO_2$ and $TiO_2$ thin layers were deposited by reactive sputtering. $TiO_2$ interface layers result in the finest grains of PZT films compared to $PbO_2$ and $ZrO_2$ layers. On the other hand, PT interface layers result in improved morphology of PZT films and do not significantly change ferroelectric properties. It is also observed that seed layers at the middle and top of PZT films do not give significant effects on grain size but the PT seed layer at the interface between the bottom electrode and the PZT films results in the small grain size.

• Journal of Technologic Dentistry
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• v.27 no.1
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• pp.57-63
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• 2005

Experimental Ti-13%Zr and Ti-13%Zr-5%Cu alloys were made in an argon-arc melting furnace. The grade 2 CP Ti was used to control. To investigate the surface reaction layers produced by the reaction with mold materials and the influence of the reaction layers on the hardness of castings, A phosphate bonded $SiO_2$ base investment was used as mold material, and microstructure observation and hardness test were performed. The surface reaction layers of Ti-13%Zr and Ti-13%Zr-5%Cu alloys were thinner than that of CP Ti had a clearly multiple structure. A difference of the hardness between surface and inner of the Ti-13%Zr and Ti-13%Zr-5%Cu alloys became less than that of CP Ti. From the results, it was found that the Ti-Zr-(Cu) based alloys were possible to cast with $SiO_2$ base investment without the great changes of mechanical properties of the castings.

• Journal of the Korean Ceramic Society
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• v.35 no.2
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• pp.123-128
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• 1998

Multilayer ceramic capacitors(MLCC) were prepared by laminating the layer of composition with dif-ferent Curie temperature to improve temperature coefficient in the Pb(Mg1/3Nb2/3)O3-PbTiO3 binary system. Green sheet was formed by tape casting using Pb(Mg1/3Nb2/3)O3-PbTiO3 and PbTiO3 synthesized with solid state reaction of PBO. Nb2O5 MgO and TiO2. Green sheet with electrode of 70Ag-30Pd was laminated under 300 kg/cm2 at 70$^{\circ}C$ and sintered at 1100$^{\circ}C$ for 2hr. Curie temperatues for MLCC with 10 layers of pure PMN and 0.9PMN-0.1PT were lowered to -22$^{\circ}C$ and 36$^{\circ}C$ respectively. MLCC with 7 layers of PMN and 3 layers of 0.9PMN-0.1PT showed nearly zero temperature coefficient of capacitance in the range of -20∼30$^{\circ}C$ and sum of dissipation factor of each layer.

• Journal of Welding and Joining
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• v.14 no.6
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• pp.109-118
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• 1996

Al$_2$O$_3$-TiO$_2$powders of six different compositions were plasma-sprayed on Ti substrate. The spray powders and the spray coated layers were analysed and compared using SEM and X-RD. The elastic properties (specific elastic constant and damping coefficient) of the coated specimens were measured in order to select the optimum composition range of ceramics for use in a speaker diaphragm. A correlation between the microstructure and elastic properties was also investigated. When $Al_2$O$_3$powders with 0- 13% TiO$_2$were plasma sprayed, the coated layers were composed of metastable y-Al$_2$O$_3$with small amount of $\alpha$-Al$_2$O$_3$and the content of $\alpha$-Al$_2$O$_3$was increased with TiO$_2$content. Specific elastic constant was rapidly increased with 2 and 13% TiO$_2$addition to $Al_2$O$_3$. The internal damping was nearly unchanged with TiO$_2$content The specific elastic constant seemed to be dependent on the content of $\alpha$-Al$_2$O$_3$in the coated layer.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.25 no.7
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• pp.558-562
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• 2012

As an alternative energy, Dye-sensitized solar cells (DSSCs) have received much attention due to low cost manufacturing procedure and high energy consumption rate. Incorporating scattering centers in the nanocrystalline photoanode or additional scattering layers on the nanocrystalline photoanode is an effective way to enhance the light harvest efficiency of the photoanode and the performance of dye-sensitized solar cells (DSSCs). The light scattering abilities of these scattering layers also depend on the relative sizes and phase of the particles in the layers. A higher surface area is normally obtained using large particle sizes. Therefore, transparent high surface area $TiO_2$ layers and an additional scattering layer consisting of $TiO_2$-Rutile 500 nm paste with relatively larger particles are attractive. In this work, we investigates the applicability of a hybrid $TiO_2$ electrode (or a working electrode with a light scattering layer) in a DSSCs. We fabrication various thin film using $TiO_2$ paste 20 nm and $TiO_2$ paste 500 nm. As a result, the efficiency of the a single structure thin film was 3.35% and the efficiency as scattering layer of hybrid structure thin film was 4.36%, 4.73%.