Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2000.05b
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- Pages.273-278
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- 2000
Control of Grain Size of PZT Thin Film through Seed Layers
Seed Layer를 통한 PZT 박막의 결정립 크기 조절
- Published : 2000.05.13
Abstract
In order to study effects of interface layers between PZT films and electrodes for MFM(Metal-Ferroelectric-Metal) structure capacitors, we have fabricated the capacitors with the Pt/PZT/interface-layer/Pt/
Keywords