Journal of the Korean Vacuum Society (한국진공학회지)

The Korean Vacuum Society (한국진공학회)
권호 표지

Optical Properties of $TiO_2/M/Ag/M/TiO_2$ Films with Different Diffusion Barrier Layers

확산방지막에 따른 $TiO_2/M/Ag/M/TiO_2$ 투명 열절연 박막의 광학적 성질

  • 이경준 (홍익대학교 공과대학 금속, 재료공학과) ;
  • 이진구 (홍익대학교 공과대학 금속, 재료공학과) ;
  • 박주동 (홍익대학교 공과대학 금속, 재료공학과) ;
  • 김진현 (홍익대학교 공과대학 금속, 재료공학과) ;
  • 김영환 (홍익대학교 공과대학 금속, 재료공학과) ;
  • 오태성 (홍익대학교 공과대학 금속, 재료공학과)
  • Published : 1996.06.01
Download PDF
⟨ Previous Next ⟩

Abstract

Optical properties of $TiO_2/M/Ag/M/TiO_2$ films have been changed with the diffusion barrier metal M. Optimum opticla properties of $TiO_2/M/Ag/M/TiO_2$ as the transparent heat mirror film, could be obtained with Ti among diffusion barrier metals of Ti, Cu, Zr and Al. $TiO_2/M/Ag/M/TiO_2$ film, which was fabricated by sputtering of 18 nm-thick $TiO_2$ and Ag, and 4nm-thick Ti, showed maximum transimittance of 89% at visible wavelength and infrared reflectance of 97% at wavelength of 3000 nm. Optical properties of this film was not degraded by Xenon-sunshine weather test for 240 hours. For specimens with barrier layers of Cu, Zr, and Al, degradation of optical properties by weather test was increased in a sequence of films with Cu, Zr, and Al barrier layers.

Keywords

References

  1. J. Vac. Sci. Technol. v.20 A. Thelen
  2. Appl. Opt. v.18 H.K. Pulker
  3. Appl. Phys. Lett. v.25 J.C.C. Fan;F.J. Bachner;G.H. Foley;P.M. Zavracky
  4. Solid State Research Report, No.1969: 1 T.B. Reed
  5. Appl. Opt. v.15 J.C.C. Fan;F. J. Bachner
  6. Solar Energy Mater. v.20 Y. Claesson;M. Georgson;C.G. Ribbing
  7. SPIE v.324 I. Hamberg;A. Hjortsberg;C.G. Granqvist
  8. Glass Technol. v.21 H.J. Glaser
  9. United States Patent # 4,462,883 F.H. Har;S.H. Enland
  10. Solar Energy Mater. v.19 R.C. Ross;R. Sherman;R.A. Buner
  11. Solar Energy Mater. v.21 R.C. Ross
  12. Solar Energy Mater. v.13 C.A. Bishop;R.P. Howson
  13. J. Vac. Sci. Technol. v.A5 S.J. Nadel
  14. United States Patent # 4,716,086 F.H. Gillery;A. Park;R.C. Criss;J.J. Finley
  15. J. Appl. Phys. v.65 K. Fukushima;I. Yamada
  16. Acta Metall. v.13 G.E. Rhead
  17. J. Opt. Soc. Am. v.44 L.G. Schulz
  18. The Materials Science of Thin Films Milton Ohring
  19. SPIE v.346 Richard W. Vook
  20. Thin Solid Film v.112 K. Chiba;K. Nakatani
  21. The Principles of Engineering Materials D.R. Barrett;W.D. Nix;A.S. Tetelman