• Journal of the Korean Vacuum Society
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• v.7 no.2
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• pp.141-149
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• 1998

The W thin films were deposited on Si3N4 by a PECVD technique. The effects of substrate temperature and gas flow ratio on the properties of the W films were investigated. The deposition of W films were limited by surface reaction at the temperature range of 150>~$250^{\circ}C$, W films had the deposition rate of 150~530 $\AA$/min and stress of 0.85~$14.35\times10 ^9 \textrm {dynes/cm}^2}$ at various substrate temperatures and $SiH_4/WF_6$ flow ratios. $SiH_4/WF_6$ flow ratio affected the deposition rate and stress of the W films, expecially, excessive flow of SiH4 abruptly changed the structure, chemical bonding, and stress of the W films. Among the deposited W films on TiN, Ti, Mo, NiCr and Al adhesion layer, the one on the Al had the best adhesion property.

• Journal of the Korean Ceramic Society
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• v.34 no.5
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• pp.473-482
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• 1997

Titanium carbide(TiC) has a poor sinterability due to the strong covalent bond. Thus, it is generally fabricated by either hot pressing or pressureless-sintering at elevated temperature by the addition of sintering aids such as nickel(Ni), molybdenum(Mo) and cobalt(Co). However, these sintering methods have the following disadvantages; (1) the complicated process, (2) the high energy consumption, and (3) the possibility of leaving inevitable impurities in the product, etc. In order to reduce above disadvantages, we investigated the optimum conditions under which dense titanium carbide bodies could be synthesized and sintered simultaneously by high pressure self-combustion sintering(HPCS) method. This method makes good use of the explosive high energy from spontaneous exothermic reaction between titanium and carbon. The optimum conditions for the nearly full-densification were as follows; (1) The densification of sintered body becomes high by increasing the pressing pressure from 400kgf/$\textrm{cm}^2$ upto 1200 kgf/$\textrm{cm}^2$. (2) Instead of adding the coarse graphite or activated carbon, the fine particles of carbon black should be added as a carbon source. (3) The optimum molar ratio of carbon to titanium (C/Ti) was unity. In reality, titanium carbide body which were prepared under optimum conditions had relatively dense textures with the apparent porosity of 0.5% and the relative density of 98%.

• Journal of the Korean Society for Heat Treatment
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• v.17 no.1
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• pp.17-22
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• 2004

In the present study, newly developed spark plasma sintering(SPS) technique was introduced to refine the grain size of ${\gamma}$-based TiAl intermetallic compounds. Ti-46Al-1.5Mo and Ti-46Al-1.5Mo-0.2C(at%) prealloyed powders were produced by mechanical milling(MM) in high-energy attritor. The mechanically milled powders were characterized by XRD and SEM for the microstructural evolution as a function of milling time. And then, the MMed powders were sintered by both spark plasma sintering and hot pressing in vacuum (HP). After the sintering process, MM-SPSed specimens were heat-treated in a vacuum furnace (SPS-VHT) and in the SPS equipment(MM-SPS) for microstructural control. It was found from microstrutural observation that the microstructure consisting of equiaxed ${\gamma}$-TiAl with a few hundred nanometer in average size and ${\alpha}_2-Ti_3Al$ particles were formed after both sintering processes. It was also revealed from hardness test and three-point bending test that the effect of grain refinement on the hardness and bending strength is much higher than that of carbon addition. The fully lamellar microstructures, which is less than $80{\mu}m$ in average grain size was obtained by SPS-VHT process, and the fully lamellar microstructure which is less than $100{\mu}m$ in average grain size was obtained by MM-SPS for a relatively shorter heat-treatment time.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.07b
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• pp.760-763
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• 2002

Nanoparticle size of Titanium dioxide thin films was prepared by novel method. Particle size and surface structure of $TiO_2$ thin films were investigated by atomic force microscopy(AFM), scanning electron microscopy(SEM). All thin films process were prepared at room temperature. Particle size was reduced from 100 to 30nm with increasing amount of $Ti[OCH(CH_3)_2]_4$ observed by AFM images. All thin films were irradiated for 5 minutes by white light. Increasing the annealing temperature, particles size was increased. In the $TiO_2$(40%) thin films was annealed at $300^{\circ}C$ for 30minutes, the particle size was about 10nm.

• Environmental Engineering Research
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• v.10 no.1
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• pp.31-37
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• 2005

The selective catalytic experiments using both sulfated/sulfur-free titania and V2O5/TiO2 catalysts have been conducted for NO reduction by NH3 in a packed-bed, down-flow reactor. The sulfated and vanadia loaded titania exhibited higher activity for NO removal than the sulfur-free catalysts, where > 90% NO removal was achieved over the sulfated V2O5/TiO2 catalyst between 280∼500 C. The surface structure of vanadia species on the catalyst surface played a critical role in the high performance of catalysts in which the existence of monomeric/polymeric vanadate is revealed by Raman spectra studies. Water vapor and SO2 were added to the reacting system for the catalyst deactivation tests. At higher temperatures (T ≥ 350 C), little deactivation was observed over the sulfated V2O5/TiO2 catalysts, showing good durability against SO2 and water vapor, which is compared with deactivation at lower temperatures.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.56-56
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• 2010

We report a low-temperature fabrication of organic/inorganic nanohybrid dielectrics for organic thin film transistors. The self-assembled organic layers (SAOLs) were grown by repeated sequential adsorptions of C=C-terminated alkylsilane and metal (Al or Ti) hydroxyl with ozone activation, which was called "molecular layer deposition (MLD)". The $TiO_2$ and $Al_2O_3$ inorganic layers were grown by ALD, which relies on sequential saturated surface reactions resulting in the formation of a monolayer in each sequence and is a potentially powerful method for preparing high quality multicomponent superlattices. The MLD method combined with ALD (MLD-ALD) was applied to fabricate SAOLs-$Al_2O_3$-SAOLs-$TiO_2$ nanohybrid superlattices on polymer substrates at relatively low temperature. The MLD method is an ideal fabrication technique for various flexible electronic devices.

• Journal of Powder Materials
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• v.23 no.5
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• pp.353-357
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• 2016

In this study, $TiO_2$ powders are synthesized from ammonium hexafluoride titanate (AHFT, $(NH_4)_2TiF_6$) as a precursor by heat treatment. First, we evaluate the physical properties of AHFT using X-ray diffraction (XRD), particle size analysis (PSA), thermogravimetric analysis (TGA), and field-emission scanning electron microscopy (FE-SEM). Then, to prepare the $TiO_2$ powders, is heat-treated at $300-1300^{\circ}C$ for 1 h. The ratio of anatase to rutile phase in $TiO_2$ is estimated by XRD. The anatase phase forms at $500^{\circ}C$ and phase transformation to the rutile phase occurs at $1200^{\circ}C$. Increase in the particle size is observed upon increasing the reaction temperature, and the phase ratio of the rutile phase is determined from a comparison with the calculated XRD data. Thus, we show that anatase and rutile $TiO_2$ powders could be synthesized using AHFT as a raw material, and the obtained data are utilized for developing a new process for producing high-quality $TiO_2$ powder.

• Korean Journal of Materials Research
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• v.20 no.8
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• pp.429-433
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• 2010

In this study, activated carbon (AC) as a carbon source was modified with different concentrations of cobalt chloride ($CoCl_2$) to prepare a Co-AC composite, and it was used for the preparation of Co-AC/$TiO_2$ composites with titanium oxysulfate (TOS) as the titanium precursor. The physicochemical properties of the prepared Co-AC/$TiO_2$ composites were characterized by $N_2$ adsorption at 77 K, X-ray diffraction (XRD), scanning electron microscopy (SEM), and energy dispersive X-ray (EDX) analysis. The photocatalytic treatments of organic dyes were examined under an irradiation of visible light with different irradiation times. $N_2$ adsorption data showed that the composites had decreased surface area compared with the pristine AC, which was $389\;m^2/g$. From the XRD results, the Co-AC/$TiO_2$ composites contained a mixturephase structuresof anatase and rutile, but a cobalt oxide phase was not detected in the XRD pattern. The EDX results of the Co-AC/$TiO_2$ composites confirmed the presence of various elements, namely, C, O, Ti, and Co. Subsequently, the decomposition of methylene orange (MO, $C_{14}H_{14}N_3NaO_3S$) and rhodamine B (Rh.B, $C_{28}H_{31}ClN_2O_3$) in an aqueous solution, respectively, showed the combined effects of an adsorption effect by AC and the photo degradation effect by $TiO_2$. Especially, the Co particles in the Co-AC/$TiO_2$ composites could enhance the photo degradation behaviors of $TiO_2$ under visible light.

• Proceedings of the Korean Nuclear Society Conference
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• 1995.05a
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• pp.818-823
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• 1995

방사성 폐기물 소각로에서 발생하는 off-gas중에는 NOx가 포함되어 있으며 이를 제어하기 위하여 NOx 배출의 재어에 효과적이라고 알려진 SCR법을 사용하여 실험을 행하였다. NOx 방출 저감화를 위해 상업화된 다양한 촉매들 중에서 V$_2$O$_{5}$, MoO$_3$ Fe$_2$O$_3$ 그리고 SnO$_2$를 TiO$_2$honeycomb형태의 담체에 담지시켜 제조한 촉매들의 특성을 조사하고 여러 변수들, 예를 들면 촉매의 종류, 담체의 종류, 반응온도, feed의 조성 등이 반응특성에 미치는 영향을 실험실 규모의 반응기에서 조사하였다. 10%V$_2$O$_{5}$TiO$_2$촉매가 35$0^{\circ}C$에서 94.4%의 높은 NO-$N_2$전환율을 보였으며 열적 안정성이 높은 SnO$_2$나 MoO$_3$의 첨가는 높은 전환율을 보이는 온도 범위를 확장시켜 주었다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1997.11a
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• pp.48-51
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• 1997

(Pb. La)TiO$_3$ thin films were fabricated by sol-gel Processing and spin-coated on the Pt substrate. The spin-coated PLT films were sintered at 75$0^{\circ}C$ for 5min by rapid thermal ann La content dependence of the electrical properties of the PLT thin films are discussed. Wit La mole% from 20 to 36mo1e%. the dielectric constant of the PLT thin films decreased f 570. P-E hysteresis loops changed from ferroelectric to paraelectric. and the charge storage charging time decreased. The Curie Point decreased with increasing La content. The leak density also decreased and La 36mo1% species shows mood characteristics less than 10- electric field 500 (KV/cm) Because of the broad range of composition-controlled ferroelectric PLT thin films are suitable for memory application.