Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Nanoparticle Size of $TiO_2$ Thin-Films Fabricated by Novel Method(IV)

새로운 방식에 외해 제작된 $TiO_2$ 박막의 나노입자크기(IV)

  • 문정오 (부경대학교 공과대학 전자공학과) ;
  • 정재훈 (부경대학교 공과대학 전자공학과) ;
  • 김강언 (부경대학교 공과대학 전자공학과) ;
  • 문병기 (부경대학교 자연과학대학 물리학과) ;
  • 손세모 (부경대학교 공과대학 인쇄정보공학과) ;
  • 정수태 (부경대학교 공과대학 전자공학과)
  • Published : 2002.07.08
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Abstract

Nanoparticle size of Titanium dioxide thin films was prepared by novel method. Particle size and surface structure of $TiO_2$ thin films were investigated by atomic force microscopy(AFM), scanning electron microscopy(SEM). All thin films process were prepared at room temperature. Particle size was reduced from 100 to 30nm with increasing amount of $Ti[OCH(CH_3)_2]_4$ observed by AFM images. All thin films were irradiated for 5 minutes by white light. Increasing the annealing temperature, particles size was increased. In the $TiO_2$(40%) thin films was annealed at $300^{\circ}C$ for 30minutes, the particle size was about 10nm.

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