• Title/Summary/Keyword: Ti-O buffer layer

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DFabrication of $GdAlO_3$ Buffer Layers by Sol-Gel Processing (졸-겔법에 의한 $GdAlO_3$ 버퍼층의 제조)

  • Bang, Jae-Cheol
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.7 no.5
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    • pp.801-804
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    • 2006
  • [ $GdAlO_3(GAO)$ ] buffer layer for $YBa_2Cu_3O_{7-{\delta}}(YBCO)$ coated superconductor wire was fabricated by sol-gel processing. Precursor solution was prepared by dissolving 1:1 stoichiometric quantaties of gadolinium nitrate hexahydrate and aluminum nitrate nonahydrate in methanol. The solution was spin-coated on $SrTiO_3(STO)$(100) single crystal substrates and heated at $1000^{\circ}C$ for 2h in wet $N_2-5%\; H_2$, atmosphere. A SEM(scanning electron microscopy) observation of the surface morphology of the GAO layer has shown that it has a faceted morphology indicating epitaxy. It was shown from x-ray diffraction(XRB) that GAO buffer layer was highly c-axis oriented epitaxial thin film with both good out-of-plane($FWHM=0.29^{\circ}$ for the (002) reflection) and in-plane ($FWHM=1.10^{\circ}$ for the {112} reflection) alignment.

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Water Vapor Permeation Properties of Al2O3/TiO2 Passivation Layer Deposited by Atomic Layer Deposition (원자층 증착법을 이용한 Al2O3/TiO2 보호막의 수분 보호 특성)

  • Kwon, Tae-Suk;Moon, Yeon-Keon;Kim, Woong-Sun;Moon, Dae-Yong;Kim, Kyung-Taek;Shin, Sae-Young;Han, Dong-Suk;Park, Jae-Gun;Park, Jong-Wan
    • Journal of the Korean Vacuum Society
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    • v.19 no.6
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    • pp.495-500
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    • 2010
  • In this study, $Al_2O_3$ and $TiO_2$ films was deposited on to PES (poly(ethersulfon) substrate by using atomic layer deposition as functions of deposition temperature and plasma power. The density and carbon contents of $Al_2O_3$ and $TiO_2$ films was changed by varying process conditions. High density thin films was achieved through optimizing the process conditions. Buffer layer was deposited prior to the processing of upper thin films to avoid PES surface destruction during the high power plasma process and to enhances the tortuous path for water vapor permeation for the defect decoupling effect. The water vapor transmission rate by using MOCON test was investigated to analyze the effect. Water vaper permeation properties was improved by using the inorganic multi-layer passivation layer and activation energy of the water vapor permeation was increased.

A Sol-Gel Growth of Oxide Buffer Layer for Coated Conductor (솔젤법에 의한 coated conductor용 산화물 완충층의 성장)

  • 김영국;유재무;고재웅;허순영
    • Proceedings of the Korea Institute of Applied Superconductivity and Cryogenics Conference
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    • 2003.02a
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    • pp.98-100
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    • 2003
  • PbTiO$_3$ films applicable to buffer layers for YBCO coated conductor have been successfully fabricated by sol-gel process. Crystallinity of grown films are heavily dependent on processing parameters such as annealing atmosphere and number of dipping. (100) oreinted PbTiO$_3$ films grown on (200) oriented Ni substrates exhibit uniform surface with small grain size(200~300nm).

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High Quality Non-Transfer Single-Layer Graphene Process Grown Directly on Ti(10 nm)-Buffered Layer for Photo Lithography Process (포토 리소그래피 공정을 위한 Ti(10 nm)-Buffered층 위에 직접 성장된 고품질 무전사 단층 그래핀 공정)

  • Oh, Keo-Ryong;Han, Yire;Eom, Ji-Ho;Yoon, Soon-Gil
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.34 no.1
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    • pp.21-26
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    • 2021
  • Single-layer graphene is grown directly on Ti-buffered SiO2 at 100℃. As a result of the AFM measurement of the Ti buffer layer, the roughness of approximately 0.2 nm has been improved. Moreover, the Raman measurement of graphene grown on it shows that the D/G intensity ratio is extremely small, approximately 0.01, and there are no defects. In addition, the 2D/G intensity ratio had a value of approximately 2.1 for single-layer graphene. The sheet resistance is also 89 Ω/□, demonstrating excellent characteristics. The problem was solved by using graphene and a lift-off patterning method. Low-temperature direct-grown graphene does not deteriorate after the patterning process and can be used for device and micro-patterning research.

Effects of ${Y_2}{O_3}$Buffer Layer on Ferroelectric Properties of $YMnO_3$Thin Films Fabricated on Pt/$TiO_2$/$SiO_2$/Si Substrate (Pt/$TiO_2$/$SiO_2$/Si 기판 위에 제조된 $YMnO_3$박막의 강유전 특성에 미치는 ${Y_2}{O_3}$버퍼층의 영향)

  • 김제헌;강승구;은희태
    • Journal of the Korean Ceramic Society
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    • v.37 no.11
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    • pp.1097-1104
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    • 2000
  • MOD(Metal-Organic-Decomposition)법에 의해 $Y_2$O$_3$버퍼층에 Pt/TiO$_2$/SiO$_2$/Si 기판 위에 제조한 후, 그 표면 위에 졸-겔 방법으로 YMnO$_3$박막을 형성하였다. 기판의 종류와 수화조건 변화가 YMnO$_3$박막의 결정화 거동에 미치는 영향을 고찰하였으며, 또한 $Y_2$O$_3$버퍼층 유.무에 따른 Mn의 산화상태를 확인하고 이에 따른 유전특성 변화를 연구하였다. $Y_2$O$_3$버퍼층을 삽입하지 않고 직접 기판 위에 형성한 YMnO$_3$박막의 결정상은 기판의 종류 및 Rw 변화에 관계없이 orthorhombic 구조임이 확인되었다. 반면, $Y_2$O$_3$버퍼층 위에 형성된 YMnO$_3$박막의 경우에는 Rw($H_2O$/alkoxide mole ratio)가 0~6 범위 내에서 낮아질술고 hexagonal 결정상 성장에 유리하였으며, 또한 Pt(111)/TiO$_2$/SiO$_2$/Si 기판이 Ptd(200)/TiO$_2$/SiO$_2$/Si에 비하여 결정상 형성에 용이하였다. $Y_2$O$_3$버퍼층은 YMnO$_3$결정상 내에서 $Mn^{4+}$ 이온형성을 억제함으로써 누설전류밀도가 크게 감소되는 효과를 주었으며, 동시에 강유전 특성을 지닌 hexagonal 결정상 형성에 유리하게 작용하였다. 결론적으로, $Y_2$O$_3$는 Pt가 코팅된 Si 기판 위에 YMnO$_3$박막 제조시 그 강유전 특성을 향상시켜주는 우수한 버퍼층 재료임을 확인하였다.

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Bond Strength of TiO2 Coatings onto FTO Glass for a Dye-sensitized Solar Cell

  • Lee, Deuk Yong;Kim, Jin-Tae;Kim, Young-Hun;Lee, In-Kyu;Lee, Myung-Hyun;Kim, Bae-Yeon
    • Journal of Sensor Science and Technology
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    • v.21 no.6
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    • pp.395-401
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    • 2012
  • The bond strength of three types of $TiO_2$ coatings onto fluorine-doped $SnO_2$ (FTO) glass was investigated with the aid of a tape test according to ASTM D 3359-95. Transmittance was then measured using an UV-vis spectrophotometer in the wavelength range of 300 nm to 800 nm to evaluate the extent of adhesion of $TiO_2$ nanorods/nanoparticles on FTO glass. A sharp interface between the coating layer and the substrate was observed for single $TiO_2$ coating ($TiO_2$ nanorods/FTO glass), which may be detrimental to the bonding strength. In multicoating sample ($TiO_2$ nanorod/$TiO_2$ nanoparticle/$TiO_2$ nanoparticle/FTO glass), the tape test was not performed due to severe peeling-off prior to the test. On the other hand, the dual coating sample ($TiO_2$ nanorod/$TiO_2$ nanoparticle/FTO glass) showed minimum variation of transmittance (4%) after the test, suggesting that the topcoat adheres well with the FTO substrate due to the presence of the $TiO_2$ nanoparticle buffer layer. The use of a $TiO_2$ nanorod electrode layer with good adhesion may be attributed to the excellent dye sensitized solar cell performance.

Development of High-Efficient Organic Solar Cell With $TiO_2$/NiO Hole-Collecting Layers Using Atomic Layer Deposition

  • Seo, Hyun Ook;Kim, Kwang-Dae;Park, Sun-Young;Lim, Dong Chan;Cho, Shinuk;Kim, Young Dok
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.157-158
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    • 2013
  • Organic solar cell was fabricated using one-pot deposition of a mixture of NiO nanoparticles, P3HT and PCBM. In the presence of NiO, the photovoltaic performance was slightly increased comparing to that of the device without NiO. When $TiO_2$ thin films with a thickness of 2~3 nm was prepared on NiO nanoparticles using atomic layer deposition, the power conversion efficiency was increased by a factor 2.5 with respect to that with bare NiO. Moreover, breakdown voltage of the film consisting of NiO, P3HT, and PCBM on indium tin oxide was increased by more than 1 V in the presence of $TiO_2$-shell on NiO nanoparticles. It is evidenced that S atoms of P3HT can be oxidized on NiO surfaces, and $TiO_2$-shell on NiO nanoparticles. It is evidenced that S atoms of P3HT can be oxidzed on NiO surfaces, and $TiO_2$ shell heavily reduced oxidation of S at oxide/P3HT interfaces. Oxidized S atoms can most likely act as carrier generation sites and recombination centers within the depletion region, decreasing breakdown voltage and performance of organic solar cells. Our result shows that fabrication of various core-shell nanostruecutres of oxides by atomic layer deposition with controlled film thickness can be of potential importance for fabricating highly efficient organic solar cells.

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Design of $Ti:LiNbO_3$ Three-Waveguide Optical Switch with Center-Waveguide Fed (가운데 도파로 입사된 $Ti:LiNbO_3$ 세 도파로 광스위치의 설계 및 제작)

  • Huh, Chang-Yul;Han, Young-Tak;Kim, Chang-Min
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.37 no.6
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    • pp.64-71
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    • 2000
  • An optical switch composed of identical, equally-spaced $Ti:LiNbO_3$ three-waveguides was designed and fabricated. Patterned Ti was diffused into z-cut $LiNbO_3$ substrates. $SiO_2$ buffer layer was evaporated to reduce the propagation loss of TM mode, and Al electrodes of CPW structure were built on the layer for switching of the guided beam. The optical switching phenomenon was confirmed when a beam of ${\lambda}=1.3{\mu}m$ was launched into the center waveguide and an electric field was applied to detune the three waveguides symmetrically.

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Study on dielectric properties of $Ba_{0.5}Sr_{0.5}TiO_{3}$thin films for high-frequency passive device (고주파 수동소자 유전체용 $Ba_{0.5}Sr_{0.5}TiO_{3}$ 박막의 유전특성에 관한 연구)

  • 이태일;최명률;박인철;김홍배
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.07a
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    • pp.263-266
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    • 2001
  • In this paper, we investigated dielectric properies for BST thin films that was deposited on MgO/Si substrates using RF magnetron sputtering. In here, MgO film was used to perform that a diffusion b arrier between the BST film and Si substrate and a buffer layer to assist the BST film growth. A d eposition condition for MgO films was RF Power of 50W, substrate temperature of room temperature and the working gas ratio of Ar:O$_2$ were varied from 90:10 to 60:47. Finally we manufactured the cap acitor of Al/BST/MgO/Si/Al structure to know electrical properties of this capacitor through I-V, C-V measurement. In the results, C-V aha racteristic curves was shown a ferroelectric property so we measured P-E. A remanent poliazation and coerceive electric field was present 2$\mu$C/cm$^2$ and -27kV/cm respectively at Ar:O$_2$=90:10. And a va clue of dielectric constant was 86 at Ar:02=90:10.

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Dielectric properties of KTN(80/20) thin films with pzt buffer layer for tunable microwave devices

  • Kyeong-Min Kim;Sam-Haeng Lee;Byeong-Jun Park;Joo-Seok Park;Sung-Gap Lee
    • Journal of Ceramic Processing Research
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    • v.23 no.1
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    • pp.29-32
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    • 2022
  • K(Ta0.80Nb0.20)O3 films with Pb(Zr0.52Ti0.48)O3PZT buffer layer on Pt/Ti/SiO2/Si substrate were fabricated by sol-gel and spin-coating method. Structural and electrical properties were measured with variation of the sintering temperature, and the applicability to microwave materials was investigated. All K(Ta0.80Nb0.20)O3 films showed a cubic crystal structure. Average grain size was about 123~193 nm and average thickness of the K(Ta0.80Nb0.20)O3 films was approximately 366 nm. Through the AFM results, root mean square roughness (Rrms) of all K(Ta0.80Nb0.20)O3 films was around 6 nm. All K(Ta0.80Nb0.20)O3 films showed a tendency to increase dielectric loss as frequency increased. As the sintering temperature increased, tunability with an applied DC voltage indicated a decreasing tendency. Tunability and temperature coefficient of the K(Ta0.80Nb0.20)O3 film sintered at 700 ℃ showed good values of 22.1% at 10 V, -0.594/℃.