• Title/Summary/Keyword: Ti precursor

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Orientation Control and Dielectric Properties of Sol-gel Deposited (Ba,Sr)TiO3 Thin Films for Room-temperature Tunable Element Applications

  • Zhai, Jiwei;Chen, Haydn
    • Journal of the Korean Ceramic Society
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    • v.40 no.4
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    • pp.380-384
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    • 2003
  • The effects of the mole concentrations of precursor solution on the microstructure and dielectric properties of sol-gel deposited $Ba_{0.85}$S $r_{0.15}$Ti $O_3$(BST) thin films have been investigated. The films were of single perovskite phase with strong (100) preferred orientation when grown on LaNi0$_3$ buffered Pt/Ti/ $SiO_2$Si substrates using a diluted precursor solution. Variation of the precursor solution concentration resulted in a different microstructure and, in turn, affected the tunability of the sol-gel deposited films. It was observed that leakage currents increased asymmetrically for the negative and positive bias voltage with decreasing thickness. Overall results suggest that those BST films have acceptable properties f3r applications as room-temperature tunable elements.

Modified Shrinking Core Model for Atomic Layer Deposition of TiO2 on Porous Alumina with Ultrahigh Aspect Ratio

  • Park, Inhye;Leem, Jina;Lee, Hoo-Yong;Min, Yo-Sep
    • Bulletin of the Korean Chemical Society
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    • v.34 no.2
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    • pp.519-523
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    • 2013
  • When atomic layer deposition (ALD) is performed on a porous material by using an organometallic precursor, minimum exposure time of the precursor for complete coverage becomes much longer since the ALD is limited by Knudsen diffusion in the pores. In the previous report by Min et al. (Ref. 23), shrinking core model (SCM) was proposed to predict the minimum exposure time of diethylzinc for ZnO ALD on a porous cylindrical alumina monolith. According to the SCM, the minimum exposure time of the precursor is influenced by volumetric density of adsorption sites, effective diffusion coefficient, precursor concentration in gas phase and size of the porous monolith. Here we modify the SCM in order to consider undesirable adsorption of byproduct molecules. $TiO_2$ ALD was performed on the cylindrical alumina monolith by using titanium tetrachloride ($TiCl_4$) and water. We observed that the byproduct (i.e., HCl) of $TiO_2$ ALD can chemically adsorb on adsorption sites, unlike the behavior of the byproduct (i.e., ethane) of ZnO ALD. Consequently, the minimum exposure time of $TiCl_4$ (~16 min) was significantly much shorter than that (~71 min) of DEZ. The predicted minimum exposure time by the modified SCM well agrees with the observed time. In addition, the modified SCM gives an effective diffusion coefficient of $TiCl_4$ of ${\sim}1.78{\times}10^{-2}\;cm^2/s$ in the porous alumina monolith.

Synthesis of TiO2 Nanowires by Metallorganic Chemical Vapor Deposition (유기금속 화학기상증착법을 이용한 TiO2 나노선 제조)

  • Heo, Hun-Hoe;Nguyen, Thi Quynh Hoa;Lim, Jae-Kyun;Kim, Gil-Moo;Kim, Eui-Tae
    • Korean Journal of Materials Research
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    • v.20 no.12
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    • pp.686-690
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    • 2010
  • $TiO_2$ nanowires were self-catalytically synthesized on bare Si(100) substrates using metallorganic chemical vapor deposition. The nanowire formation was critically affected by growth temperature. The $TiO_2$ nanowires were grown at a high density on Si(100) at $510^{\circ}C$, which is near the complete decomposition temperature ($527^{\circ}C$) of the Ti precursor $(Ti(O-iPr)_2(dpm)_2)$. At $470^{\circ}C$, only very thin (< $0.1{\mu}m$) $TiO_2$ film was formed because the Ti precursor was not completely decomposed. When growth temperature was increased to $550^{\circ}C$ and $670^{\circ}C$, the nanowire formation was also significantly suppressed. A vaporsolid (V-S) growth mechanism excluding a liquid phase appeared to control the nanowire formation. The $TiO_2$ nanowire growth seemed to be activated by carbon, which was supplied by decomposition of the Ti precursor. The $TiO_2$ nanowire density was increased with increased growth pressure in the range of 1.2 to 10 torr. In addition, the nanowire formation was enhanced by using Au and Pt catalysts, which seem to act as catalysts for oxidation. The nanowires consisted of well-aligned ~20-30 nm size rutile and anatase nanocrystallines. This MOCVD synthesis technique is unique and efficient to self-catalytically grow $TiO_2$ nanowires, which hold significant promise for various photocatalysis and solar cell applications.

Preparation of Anatase TiO2 Thin Films with (OiPr)2Ti(CH3COCHCONEt2)2 Precursor by MOCVD

  • Bae, Byoung-Jae;Lee, Kwang-Yeol;Seo, Won-Seok;Miah, Md. Arzu;Kim, Keun-Chong;Park, Joon T.
    • Bulletin of the Korean Chemical Society
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    • v.25 no.11
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    • pp.1661-1666
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    • 2004
  • The reaction of titanium tetraisopropoxide with 2 equiv of N,N-diethyl acetoacetamide affords Ti($O^iPr)_2(CH_3COCHCONEt_2)_2$ (1) as colorless crystals in 80% yield. Compound 1 is characterized by spectroscopic (Mass and $^1H/^{13}C$ NMR) and microanalytical data. Molecular structure of 1 has been determined by a single crystal X-ray diffraction study, which reveals that it is a monomeric, cis-diisopropoxide and contains a six coordinate Ti(IV) atom with a cis($CONEt_2$), trans($COCH_3$) configuration (1a) in a distorted octahedral environment. Variable-temperature $^1H$ NMR spectra of 1 indicate that it exists as an equilibrium mixture of cis, trans (1a) and cis, cis (1b) isomers in a 0.57 : 0.43 ratio at -20$^{\circ}C$ in toluene-$d_8$ solution. Thermal properties of 1 as a MOCVD precursor for titanium dioxide films have been evaluated by thermal gravimetric analysis and vapor pressure measurement. Thin films of pure anatase titanium dioxide (after annealing above 500$^{\circ}C$ under oxygen) have been grown on Si(100) with precursor 1 in the substrate temperature range of 350- 500$^{\circ}$ using a bubbler-based MOCVD method.

A Study on the Precursor of $BaTiO_3$ Synthesized in Water (수용액계에서 합성한 $BaTiO_3$의 선구물질에 관한 연구)

  • Kim, Seungwon;Huh, Woo Young;Lee, Chul
    • Analytical Science and Technology
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    • v.5 no.4
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    • pp.409-415
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    • 1992
  • Factor analysis was applied to X-ray diffraction patterns of the precursor of $BaTiO_3$. For that purpose, the precursor was synthesized in water solvent system using $Ba(NO_3)_2$ and $TiO(NO_3)_2$ as the starting materials and calcined at various temperatures. The samples obtained from the various calcined temperatures were analyzed by the X-ray diffractometer. Factor analysis was applied to the intensity data of the X-ray diffraction patterns. As the results, three factors were found and they were found to be $BaCO_3$, $BaTiO_3$ and $Ba_2TiO_4$. The relative concentrations of the three components were estimated during calcination.

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The control of TiO2 nanofiber diameters using fabrication variables in electrospinning method (전기 방사 공정의 제조 변수를 이용한 TiO2 나노섬유의 직경 제어)

  • Yoon, Han-Sol;Kim, Bo-Sung;Kim, Wan-Tae;Na, Kyeong-Han;Lee, Jung-Woo;Yang, Wan-Hee;Park, Dong-Cheol;Choi, Won-Youl
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.31 no.1
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    • pp.8-15
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    • 2021
  • TiO2 has been used in various fields such as solar cells, dental implants, and photocatalysis, because it has high physical and chemical stability and is harmless to the body. TiO2 nanofibers which have a large specific surface area also show a good reactivity in bio-friendly products and excellent photocatalysis in air and water purification. To fabricate TiO2 nanofibers, an electrospinning method was used. To observe the diameter of TiO2 nanofibers with fabrication variables, the fabrication variables was divided into precursor composition variables and process variables and microstructure was analyzed. The concentrations of PVP (Polyvinylpyrrolidone) and TTIP (Titanium(IV) isopropoxide) were selected as precursor composition variables, and inflow velocity and voltage were also selected as process variables. Microstructure and crystal structure of TiO2 nanofibers were analyzed using FE-SEM (Field emission scanning electron microscope) and XRD (X-ray diffraction), respectively. As-spun TiO2 nanofibers with an average diameter of about 0.27 ㎛ to 1.31 ㎛ were transformed to anatase TiO2 nanofibers with an average diameter of about 0.22 ㎛ to 0.78 ㎛ after heat treatment of 3 hours at 450℃. Anatase TiO2 nanofibers with an average diameter of 0.22 ㎛ can be expected to improve the photocatalytic properties by increasing the specific surface area. To change the average diameter of TiO2 nanofibers, the control of precursor composition variables such as concentrations of PVP and TTIP is more efficient than the control of electrospinning process variables such as inflow velocity and voltage.

Synthesis of Nano-Size BaTiO3 Powder by Hydrothermal Reaction Method (수열합성법을 이용한 BaTiO3 나노분말 합성)

  • Shim, Young-Jae;Choi, Gyoung-Jin
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.28 no.9
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    • pp.561-564
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    • 2015
  • Nano-size $BaTiO_3$ powder was synthesized by relatively simple hydrothermal reaction method. Finely dispersed Ti hydroxide precursor was first precipitated using $Ti(SO_4)_2$ and NaOH solution by applying ultrasonic power and washed thoroughly to remove $SO_4{^{2-}}$ and $Na^+$ ion. Then hydrothermal reaction was done at $160^{\circ}C$ for 6 hrs using solution prepared by washed Ti hydroxide precursor slurry and $Ba(OH)_2{\cdot}8H_2O$ with Ti:Ba mole ratio of 1:1. 200 ~ 500 nm size and uniform size distributed $BaTiO_3$ powder was synthesized by relatively low temperature and simple process.

Effect of Precursor Ratio on the Properties of Inorganic-Organic Hybrid TiO2-SiO2 Coating (유무기 TiO2-SiO2 혼성코팅에 미치는 전구체 배합비율의 영향)

  • Kim, Dong Kyu;Maeng, Wan Young
    • Korean Journal of Materials Research
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    • v.26 no.5
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    • pp.271-280
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    • 2016
  • When a single inorganic precursor is used for the synthesis of a sol-gel coating, there is a problem of cracking on the surface of coating layer. In order to solve this problem of surface cracking, we synthesized inorganic-organic coatings that have hybrid properties of inorganic and organic materials. Sols of various ratios (1:0.07, 0.2, 0.41, 0.82, 1.64, 3.26, 6.54, 13.2) of an inorganic precursor of Tetrabutylorthotitanate ($Ti(OBu)_4$, TBOT) and an organic precursor of ${\gamma}$-Methacryloxy propyltrimethoxysilane (MAPTS) were prepared and coated on stainless steels (SUS316L) by dip coating method. The binding structure and the physical properties of the synthesized coatings were analyzed by FT-IR, FE-SEM, FIB (Focused Ion Beam), and a nano-indenter. Dynamic polarization testing and EIS (electrical impedance spectroscopy) were carried out to evaluate the micro-defects and the corrosion properties of the coatings. The prepared coatings show hybrid properties of inorganic oxides and organic materials. Crack free coatings were prepared when the MAPTS ratio was above a critical value. As the MAPTS ratio increased, the thickness and the corrosion resistance increased, and the hardness decreased.

Effect of Precursor Concentration on the Structural, Morphological, and Optical Properties of TiO2 Nano-Flowers

  • Anwar, M.S.;Danish, Rehan;Park, Keun Young;Koo, Bon Heun
    • Korean Journal of Materials Research
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    • v.25 no.5
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    • pp.247-252
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    • 2015
  • The effect of precursor concentration on the structural, morphological, and optical properties of $TiO_2$nano-flowers was investigated in this study. An increase in crystallite size was observed with an increase in the concentration of the precursor (titanium butoxide). The FE-SEM micrographs of the as-prepared samples show a three-dimensional flower-like morphology. The flowers consist of several nanorods coming out of a single core and have very sharp edges. Also, the variation in the aspect ratio of the nanostructure was observed with the concentration of the precursor. The photocatalytic properties of the samples show that the sample that has a high aspect ratio (AR~9) has a much better photocatalytic activity compared to the nano-crystal with a low aspect ratio (AR~6.1). It is believed that the excellent photocatalytic performance and short time synthesis of $TiO_2$nano-flowers using the microwave hydrothermal method can have potential applications in the field of photocatalysis.