Proceedings of the Korean Vacuum Society Conference
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2012.02a
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pp.431-432
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2012
In the era of 20 nm scaled semiconductor volume manufacturing, Microelectronics Manufacturing Engineering Education is presented in this paper. The purpose of microelectronic engineering education is to educate engineers to work in the semiconductor industry; it is therefore should be considered even before than technology development. Three Microelectronics Manufacturing Engineering related courses are introduced, and how undergraduate students acquired hands-on experience on Microelectronics fabrication and manufacturing. Conventionally employed wire bonding was recognized as not only an additional parasitic source in high-frequency mobile applications due to the increased inductance caused from the wiring loop, but also a huddle for minimizing IC packaging footprint. To alleviate the concerns, chip bumping technologies such as flip chip bumping and pillar bumping have been suggested as promising chip assembly methods to provide high-density interconnects and lower signal propagation delay [1,2]. Aluminum as metal interconnecting material over the decades in integrated circuits (ICs) manufacturing has been rapidly replaced with copper in majority IC products. A single copper metal layer with various test patterns of lines and vias and $400{\mu}m$ by $400{\mu}m$ interconnected pads are formed. Mask M1 allows metal interconnection patterns on 4" wafers with AZ1512 positive tone photoresist, and Cu/TiN/Ti layers are wet etched in two steps. We employed WPR, a thick patternable negative photoresist, manufactured by JSR Corp., which is specifically developed as dielectric material for multi- chip packaging (MCP) and package-on-package (PoP). Spin-coating at 1,000 rpm, i-line UV exposure, and 1 hour curing at $110^{\circ}C$ allows about $25{\mu}m$ thick passivation layer before performing wafer level soldering. Conventional Si3N4 passivation between Cu and WPR layer using plasma CVD can be an optional. To practice the board level flip chip assembly, individual students draw their own fan-outs of 40 rectangle pads using Eagle CAD, a free PCB artwork EDA. Individuals then transfer the test circuitry on a blank CCFL board followed by Cu etching and solder mask processes. Negative dry film resist (DFR), Accimage$^{(R)}$, manufactured by Kolon Industries, Inc., was used for solder resist for ball grid array (BGA). We demonstrated how Microelectronics Manufacturing Engineering education has been performed by presenting brief intermediate by-product from undergraduate and graduate students. Microelectronics Manufacturing Engineering, once again, is to educating engineers to actively work in the area of semiconductor manufacturing. Through one semester senior level hands-on laboratory course, participating students will have clearer understanding on microelectronics manufacturing and realized the importance of manufacturing yield in practice.
Han, Seung San;Han, Ji Yun;Choi, Kil-Yeong;Im, Seung Soon;Kim, Yong Seok
Applied Chemistry for Engineering
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v.17
no.5
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pp.527-531
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2006
We have prepared organophilic inorganic particles and polyimide (PI) nanocomposite having excellent thermal stability and high dielectric constant that can be used for electronic application such as capacitor. We have chosen barium titanate (BT), a high dielectric constantmaterial and its surface was coated with nylon 6 to improve the affinity with PI. The FT-IR and TEM studies showed that the organophilic inorganic particle (BTN) has a polymer shell with thickness of 5 nm. We have suggested that it is possible to control the thickness of coating surface and also indicated the relationship between the ratio of inside and outside radius of BTN and the weight fraction of BT. The PI nanocomposite films based on poly(amic acid) and BTN were prepared by cyclodehydration reaction. The homogeneous dispersion of BTN in PI matrix was identified by using SEM. We have investigated the effect of BTN content on the coefficient of thermal stability, integral procedural decomposition temperature (IPDT), and dielectric constant of PI nanocomposite films.
Park, Mi-Jung;Lee, Taek-Soon;Kang, Meea;Han, Chi-Bok
Journal of Korean Society of Environmental Engineers
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v.38
no.6
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pp.291-298
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2016
Electrochemical water treatment process as a useful treatment method for the removal of non-degradable matter has been consistently studied for several decades. Key process of electrochemical water treatment are oxidation reaction from an anode and reduction from a cathode. In this study, the effect of pre-treatment methods in the insoluble electrode manufacturing process for the water treatment has been evaluated for the life time of electrode The results of this study showed that pre-treatment methods of a base metal such as surface roughness, clean method and interlayer formation influenced to life time of electrode when the same condition (catalyst electrode layer coating method and material system) was applied for pre-treatment methods. This study was conducted by using $IrO_2/Ti$ electrode In the test of sand-blasting process, an electrode manufactured by using sanding media of different sizes resulted in the most effective electrode life time when the size of alumina was used for $212{\sim}180{\mu}m$ praticle size (#80). The most effective method was considered using arc plasma in the additional roughness control and cleaning process, sputtering method to form Ta type interlayer formation process.
Park, Tae-Jun;Kong, Jong-Pan;Na, Hye-Sung;Kang, Chung-Yun;Uhm, Sang-Ho;Kim, Jeong-Kil;Woo, In-Su;Lee, Jong-Sub
Journal of Welding and Joining
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v.28
no.3
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pp.92-98
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2010
Ferritic stainless steels, which have relatively small thermal expansion coefficient and excellent corrosion resistance, are increasingly being used in vehicle manufacturing, in order to increase the lifetime of exhaust manifold parts. But, there are limits on use because of the problem related to cosmetic resistance, corrosions of condensation and high temperature salt etc. So, Aluminum-coated stainless steel instead of ferritic stainless steel are utilized in these parts due to the improved properties. In this investigation, Al-8wt% Si alloy coated 409L ferritic stainless steel was used as the base metal during Gas Tungsten Arc(GTA) welding. The effects of coated layer on the microstructure and hardness were investigated. Full penetration was obtained, when the welding current was higher than 90A and the welding speed was lower than 0.52m/min. Grain size was the largest in fusion zone and decreased from near HAZ to base metal. As welding speed increased, grain size of fusion zone decreased, and there was no big change in HAZ. Hardness had a peak value in the fusion zone and decreased from the bond line to the base metal. The highest hardness in the fusion zone resulted from the fine re-precipitation of the coarse TiN and Ti(C, N) existed in the base metal during melting and solidification process and the presence of fine $Al_2O_3$ and $SiO_2$ formed by the migration of the elements, Al and Si, from the melted coating layer into the fusion zone.
In this study, the optimization of active materials and the preparation of particulate adsorbents for the application of metal oxide-based adsorbents for the treatment of $H_2S$, an air pollutant and odorant, occurred in various industrial facilities were investigated. The adsorbents were prepared by using $TiO_2$, which has a high physicochemical stability and relatively high specific surface area among metal oxides and also by different kinds and contents of active materials. The correlation between the physicochemical property and adsorption performance of the adsorbents confirmed that the adsorbent containing KI, which is a typical alkali metal among the active metals, showed the highest adsorption performance. The relationship between the contents and the adsorption performance was non-proportional, but a volcano plot. From XRD, SEM and BET analyses, it was confirmed that the active material was exposed to the surface above a certain amount and also the adsorption performance was the best when the specific surface area and pore volume were $40{\sim}100m^2/g$ and $0.1{\sim}0.3cm^3/g$, respectively. For practical application, the adsorbent was granulated or coated on a ceramic support. It was also confirmed that the adsorbent showed high adsorption performance when the adsorbent was coated on the ceramic rather than that of the granulated support.
Journal of the Korean Recycled Construction Resources Institute
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v.8
no.4
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pp.483-489
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2020
Particulate matter is divided into PM10 (particle diameter of 10 ㎛ or less) and PM2.5 (particle diameter of 2.5 ㎛ or less), which are approximately 1/5 of the thickness of the hair. Due to its effect on the human body, lung disease, arteriosclerosis and heart It is known as a carcinogen that causes various diseases such as diseases. It is known that the main cause of such fine dust is nitrogen dioxide (NOx), which is emitted from automobiles in about 57.3% of urban roadsides. Therefore, in this study, as part of the development of functional construction materials to reduce NOx generated from road transport pollutants, comparative evaluation of NOx reduction performance was conducted according to the replacement rate of cement mortar in which cement was replaced with a porous material. In addition, the NOx reduction performance of cement mortar according to the photocatalyst application method and the number of applications was compared an d evaluated. As a result of the experiment, when activated ocher was substituted by 30%, it showed a reduction effect of about 32.7%, showing the best reduction performance.
Kim, Jiwoo;Kim, Myungjae;Kim, Hyokyeong;Park, Sohyun;Seo, Minkyeong;Kim, Jiwoong
Resources Recycling
/
v.31
no.1
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pp.46-55
/
2022
The recycling of coated cemented carbide scraps is becoming increasingly significant for the recovery of rare metals. However, coatings consisting of Group IV and V transition metal nitrides are one of the challenging factors in obtaining high-purity materials. We investigated the structural, elastic, and mechanical properties of Group IV and V transition-metal nitrides (TiN, VN, ZrN, NbN, HfN, and TaN) using first-principle calculations. Convergence tests were performed to obtain reliable calculated results. The equilibrium structures of the nitrides were in good agreement with those of a previous study, indicating the reliability of the data. Group IV transition metal nitrides show a higher covalent bonding nature. Thus, they exhibit a higher degree of brittleness than that of Group V transition metal nitrides. In contrast, Group V transition metal nitrides show weaker resistance to shear loading and more ductile behavior than Group IV transition metal nitrides because of the metallic bonds characterized by valence electron concentration. The results of the crystal orbital Hamilton population analysis showed good agreement with the shear resistance tendencies of all transition metal nitrides.
Gwanghwadang-Wonsam was designated as National Folklore Cultural Heritage No. 52 in 1979, it is in good condition. However, a problem is the attached a phoenix insignia badge that did not exist when it was designated recently. As it became known as the only purple Wonsam artifact with "phoenix insignia", raising the need for its conservation. In this regard, scientific analysis was required to correct misinformation about designated cultural assets and restore the original designated state by analyzing the history of the Gwanghwadang-Wonsam, other relics of the phoenix insignia and its making design patterns. An X-ray fluorescence analysis was used to confirm that the Phoenix insignia's metal threads were titanium-plated silver. Phoenix insignia using titanium-plated gold thread was not identified in Gwanghwadang-Wonsam photographs in 1986, and the TiN-type membrane plating method was used in various industries in the 1990s, which can be estimated to be attached in the early and mid-1990s. Especially, the scientific analysis results from the X-ray fluorescence analysis in this study provide key evidence for conservation processing. This study demonstrates the importance of investigating relics and similar artifacts in the conservation process of inherited relics and as a precedent for restoration that corrects misinformation about designated cultural properties.
Journal of the Korea Institute of Building Construction
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v.23
no.2
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pp.153-164
/
2023
The objective of this study is to examine the removal rate of air pollutants, specifically sulfur oxides (SOx) and nitrogen oxides(NOx), using concrete permeable blocks containing zeolite beads coated with materials capable of eliminating these pollutants. Titanium dioxide(TiO2) powder and coconut shell powder were utilized for the removal of SOx and NOx and were applied as coatings on the zeolite beads. Concrete permeable block specimens embedded with the coated zeolite beads were produced using an actual factory production line. Test results demonstrated that the concrete permeable block containing zeolite beads coated with coconut shell powder in the surface layer achieved SOx and NOx removal rates of 12.5% and 99%, respectively, exhibiting superior performance compared to other blocks. Additionally, the flexural strength and slip resistance were 5.3MPa and 65BPN or higher, respectively, satisfying the requirements specified in KS F 4419 and KS F 4561. Conversely, the permeability coefficient exhibited low permeability, with grades 2 and 3 before and after contaminant pollution, according to the standard for 'design, construction, and maintenance of pavement using permeable block'. In conclusion, incorporating zeolite beads coated with coconut shell powder in the surface layer enables simultaneous removal of SOx and NOx, irrespective of ultraviolet rays, while maintaining adequate flexural strength and slip resistance. However, the permeability is significantly reduced, necessitating further improvements.
For investigating NO reduction activity of an catalytic filter, the catalytic performance was measured under the presence of $SO_2$ and $H_2O$, respectively or simultaneously in the simulation gas composed of NO, $NH_3$, and air. The catalytic filter was prepared by coating $V_2O_5-WO_3/TiO_2$ catalyst on the pore surface of SiC filter element of which the superior performance for the particulate removal was well known. At the temperature below $260^{\circ}C$, the catalytic activities were enormously decreased under the presence of $SO_2$ and $H_2O$, respectively or simultaneously, compared with those under the cases of the absence of $SO_2$ and $H_2O$. However, the presence of $SO_2$ promoted the performance of the catalytic filter above $320^{\circ}C$ with showing the NO conversion better than 99.8% for the NO inlet concentration of 500 ppm and at the face velocity of 2 cm/s. In particular, the presence of water showed high NO conversion higher than 99% up to high temperature of $380^{\circ}C$. This effect of water was explained by the reason that it retarded the ammonia oxidation which is the main step into the formation of $N_2O$. The initial NO reduction activity of the catalytic filter maintained for the duration of 100 hours in the presence of $SO_2$ and $H_2O$. Therefore, it was concluded that the catalytic filter was promisingly useful for the industrial NOx reduction catalyst in order to treat the particulate and NO simultaneously.
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