• 제목/요약/키워드: Three-dimensional nano/micro structures

검색결과 20건 처리시간 0.03초

Additive Process Using Femto-second Laser for Manufacturing Three-dimensional Nano/Micro-structures

  • Yang, Dong-Yol;Lim, Tae-Woo;Son, Yong;Kong, Hong-Jin;Lee, Kwang-Sup;Kim, Dong-Pyo;Park, Sang-Hu
    • International Journal of Precision Engineering and Manufacturing
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    • 제8권4호
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    • pp.63-69
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    • 2007
  • The two-photon stereolithography (TPS) process is a promising technique for the fabrication of real three-dimensional (3D) nano/micro-structures via application of a femto-second laser, In TPS, when a near-infrared ultrashort-pulsed laser is closely focused onto a confined volume of photocurable resin, only the local area at the center of the focus is cured. Therefore, real 3D microstructures with resolution under the diffraction limit can be fabricated through a layer-by-layer accumulative technique, This process provides opportunities to develop neo-conceptive nano/micro devices in IT/BT industries, However, a number of issues, including development of effective fabrication methods, highly sensitive and functional materials, and neo-conceptive devices using TPS, must be addressed for the realization of industrial application of TPS. In this review article, we discuss our efforts related to TPS: effective fabrication methods, diverse two-photon curable materials for high functional devices, and applications.

3차원 마이크로 디바이스 개발을 위한 나노 스테레오리소그래피 공정 개발에 관한 연구 (Development of Nano-Stereolithography Process for Precise Fabrication of Three-Dimensional Micro-Devices)

  • 박상후;임태우;양동열;이신욱;공홍진;이광섭
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제55권1호
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    • pp.45-49
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    • 2006
  • A nano-stereolithography (NSL) process has been developed for the fabrication of three-dimensional (3D) micro-devices with high spatital resolution of approximately 100 nm. In the NSL process, a complicated 3D structure can be created by stacking layer-by-layer, so it does not require any sacrificial layer or any supporting structure. A laminated layer was fabricated by means of solidifying liquid-state monomers using two-photon absorption (TPA) which was induced by a femtosecond laser. When the fabrication of a 3D stacked structure was finished, unsolidified liquid resins were rinsed by ethanol to develop the fabricated structures; then, the polymerized structure was only left on the glass substrate. Through this work, several 3D microstructures such as a micro-channel, shell structures, and photonic crystals were fabricated to evaluate the possibility of the developed system.

이광자 흡수 광중합에 의한 3차원 마이크로 쉘 구조물 제작 (Fabrication of Three-Dimensional Micro-Shell Structures Using Two-Photon Polymerization)

  • 박상후;임태우;양동열
    • 대한기계학회논문집A
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    • 제29권7호
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    • pp.998-1004
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    • 2005
  • A nano-stereolithography (NSL) process has been developed for fabrication of 3D shell structures which can be applied to various nano/micro-fluidic devices. By the process, a complicated 3D shell structure on a scale of several microns can be fabricated using lamination of layers with a resolution of 150 nm in size, so it does not require the use of my sacrificial layer or any supporting structure. A layer was fabricated by means of solidifying liquid-state monomers using two-photon absorption (TPA) induced using a femtosecond laser processing. When the polymerization process is finished, unsolidified liquid state resins can be removed easily by dropping several droplets of ethanol fur developing the fabricated structure. Through this work, some 3D shell structures, which can be applied to various applications such as nano/micro-fluidic devices and MEMS system, were fabricated using the developed process.

On exact wave propagation analysis of triclinic material using three-dimensional bi-Helmholtz gradient plate model

  • Karami, Behrouz;Janghorban, Maziar;Tounsi, Abdelouahed
    • Structural Engineering and Mechanics
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    • 제69권5호
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    • pp.487-497
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    • 2019
  • Rapid advances in the engineering applications can bring further areas to provide the opportunity to manipulate anisotropic structures for direct productivity in design of micro/nano-structures. For the first time, magnetic affected wave characteristics of nanosize plates made of anisotropic material is investigated via the three-dimensional bi-Helmholtz nonlocal strain gradient theory. Three small scale parameters are used to predict the size-dependent behavior of the nanoplates more accurately. After owing governing equations of wave motion, an analytical approach based harmonic series is utilized to fine the wave frequency as well as phase velocity. It is observed that the small scale parameters, magnetic field and wave number have considerable influence on the wave characteristics of anisotropic nanoplates. Due to the lack of any study on the mechanics of three-dimensional bi-Helmholtz gradient plates made of anisotropic materials, it is hoped that the present exact model may be used as a benchmark for future works of such nanostructures.

Flow Visualization of Flowfield Structures around an Aerospike Nozzle using LIF and PSP

  • NIIMI Tomohide;MORI Hideo;TANIGUCHI Mashio
    • 한국가시화정보학회:학술대회논문집
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    • 한국가시화정보학회 2004년도 Proceedings of 2004 Korea-Japan Joint Seminar on Particle Image Velocimetry
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    • pp.75-80
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    • 2004
  • Aerospike nozzles have been expected to be used for an engine of a reusable space shuttle to respond to growing demand for rocket-launching and its cost reduction. In this study, the flow field structures in any cross sections around clustered linear aerospike nozzles are visualized and analyzed, using laser induced fluorescence (LIF) of nitrogen monoxide seeded in the carrier gas of nitrogen. Since flow field structures are affected mainly by pressure ratio, the clustered linear aerospike nozzle is set inside a vacuum chamber to carry out the experiments in the wide range of pressure ratios from 75 to 200. Flow fields are visualized in several cross-sections, demonstrating the complicated three-dimensional flow field structures. Pressure sensitive paint (PSP) of PtTFPP bound by poly- IBM -co-TFEM is also applied to measurement of the complicated pressure distribution on the spike surface, and to verification of contribution of a truncation plane to the thrust. Finally, to examine the effect of the sidewalls attached to the aerospike nozzle, the flow fields around the nozzle with the sidewalls are compared with those without sidewalls.

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나노스케일 3 차원 프린팅 시스템을 위한 정렬 알고리즘 (Alignment Algorithm for Nano-scale Three-dimensional Printing System)

  • 장기환;이현택;김충수;추원식;안성훈
    • 한국정밀공학회지
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    • 제31권12호
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    • pp.1101-1106
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    • 2014
  • Hybrid manufacturing technology has been advanced to overcome limitations due to traditional fabrication methods. To fabricate a micro/nano-scale structure, various manufacturing technologies such as lithography and etching were attempted. Since these manufacturing processes are limited by their materials, temperature and features, it is necessary to develop a new three-dimensional (3D) printing method. A novel nano-scale 3D printing system was developed consisting of the Nano-Particle Deposition System (NPDS) and the Focused Ion Beam (FIB) to overcome these limitations. By repeating deposition and machining processes, it was possible to fabricate micro/nano-scale 3D structures with various metals and ceramics. Since each process works in different chambers, a transfer process is required. In this research, nanoscale 3D printing system was briefly explained and an alignment algorithm for nano-scale 3D printing system was developed. Implementing the algorithm leads to an accepted error margin of 0.5% by compensating error in rotational, horizontal, and vertical axes.

이광자 광중합 공정을 이용한 3차원 미세구조물 제작기술 동향 (Recent Progress in the Nanoscale Additive Layer Manufacturing Process Using Two-Photon Polymerization for Fabrication of 3D Polymeric, Ceramic, and Metallic Structures)

  • 하철우;임태우;손용;박석희;박상후;양동열
    • 한국정밀공학회지
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    • 제33권4호
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    • pp.265-270
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    • 2016
  • Recently, many studies have been conducted on the nano-scale fabrication technology using twophoton- absorbed polymerization induced by a femtosecond laser. The nano-stereolithography process has many advantages as a technique for direct fabrication of true three-dimensional shapes in the range over several microns with sub-100 nm resolution, which might be difficult to obtain by using general nano/microscale fabrication technologies. Therefore, two-photon induced nano-stereolithography has been recently recognized as a promising candidate technology to fabricate arbitrary 3D structures with sub-100 nm resolution. Many research works for fabricating novel 3D nano/micro devices using the two-photon nano-stereolithography process, which can be utilized in the NT/BT/IT fields, are rapidly advancing.

펨토초 레이저를 이용한 SUS304 의 마이크로 홈가공 (Micro-groove machining of SUS304 using by femto second laser)

  • 곽태수;오오모리 히토시
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2005년도 춘계학술대회 논문집
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    • pp.1179-1180
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    • 2005
  • 3D micro scaled shapes are fabricated with the method of direct writing and superposing grooving in ambient air using femto-second laser pulses and copper, aiming at establishing an industrially useful femto-second laser processing machine to be able to fabricate three dimensional micro-scale structures, especially micro scaled molds, and processing techniques. For the several advantages, there is no thermally influenced region around the area irradiated by the laser beam and surfaces irradiated laser beam are smooth and substances ablated to form are no attached on the surface of works and so on, the femto-second laser technology is anticipated for advanced micro/nano precision technology.

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다중조사 복셀 매트릭스 스캐닝법을 이용한 이광자 중합에 의한 마이크로 3차원 곡면형상 제작 (Fabrication of Three-Dimensional Curved Microstructures by Two-Photon Polymerization Employing Multi-Exposure Voxel Matrix Scanning Method)

  • 임태우;박상후;양동열;공홍진;이광섭
    • 폴리머
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    • 제29권4호
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    • pp.418-421
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    • 2005
  • 본 연구에서는 나노/마이크로 소자 및 MEMS 제작에 활용가능하고 또한 수십 마이크로미터 크기의 3차원 곡면을 가진 형상을 제작하기 유리한 이광자 광중합을 이용한 다중조사 복셀 매트릭스 스캐닝법(multi-exposure voxel matrix scanning method)에 의한 나노 복화공정을 개발하였다. 이 공정을 통하여는 높이에 따라 14가지의 색을 가진 등고선으로 표현된 3차원 자유곡면 형상을 적층방식이 아닌 단일 층으로 3차원으로 제작할 수 있다. 여기서 수광각도가 1.25인 집광렌즈를 사용하여 레이저의 조사시간에 따라 1.2 um에서 6.4 um까지 변하는 복셀의 높이 차이를 이용하여 3차원 곡면 제작이 가능하다. 본 연구의 유용성을 검토하기 위하여 몇 가지 3차원 곡면형상을 초미세 입체 패터닝 공정에서 사용하는 일반적인 적층방식을 사용하지 않고 단층으로 제작하여 시간을 단축하였다.

조직공학용 세포담체 제작을 위한 플라즈마-표면개질이 포함된 바이오프린팅 시스템 (A 3D bioprinting system and plasma-surface modification to fabricate tissue engineering scaffolds)

  • 김근형
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2017년도 춘계학술대회 논문집
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    • pp.3-23
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    • 2017
  • The achievement of tissue engineering can be highly depending on the capability to generate complicated, cell seeded three dimensional (3D) micro/nano-structures. So, various fabrication techniques that can be used to precisely design the architecture and topography of scaffolding materials will signify a key aspect of multi-functional tissue engineering. Previous methods for obtaining scaffolds based on top-down are often not satisfactory to produce complex micro/nano-structures due to the lack of control on scaffold architecture, porosity, and cellular interactions. However, a bioprinting method can be used to design sophisticated 3D tissue scaffolds that can be engineered to mimic the tissue architecture using computer aided approach. Also, in recent, the method has been modified and optimized to fabricate scaffolds using various natural biopolymers (collagen, alginate, and chitosan etc.). Variation of the topological structure and polymer concentration allowed tailoring the physical and biological properties of the scaffolds. In this presentation, the 3D bioprinting supplemented with a newly designed plasma treatment for attaining highly bioactive and functional scaffolds for tissue engineering applications will be introduced. Moreover, various in vivo and in vitro results will show that the fabricated scaffolds can carry out their structural and biological functionality.

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