Browse > Article

Additive Process Using Femto-second Laser for Manufacturing Three-dimensional Nano/Micro-structures  

Yang, Dong-Yol (Dept. of Mech, Eng., KAIST)
Lim, Tae-Woo (Dept. of Mech, Eng., KAIST)
Son, Yong (Dept. of Mech, Eng., KAIST)
Kong, Hong-Jin (Dept. of Phys., KAIST)
Lee, Kwang-Sup (Dept. of Polymer Sci. and Eng., Hannam University)
Kim, Dong-Pyo (Dept. of Fine Chemical Eng. and Chem., Chungnam National University)
Park, Sang-Hu (School of Mech. Eng., Pusan National University)
Publication Information
International Journal of Precision Engineering and Manufacturing / v.8, no.4, 2007 , pp. 63-69 More about this Journal
Abstract
The two-photon stereolithography (TPS) process is a promising technique for the fabrication of real three-dimensional (3D) nano/micro-structures via application of a femto-second laser, In TPS, when a near-infrared ultrashort-pulsed laser is closely focused onto a confined volume of photocurable resin, only the local area at the center of the focus is cured. Therefore, real 3D microstructures with resolution under the diffraction limit can be fabricated through a layer-by-layer accumulative technique, This process provides opportunities to develop neo-conceptive nano/micro devices in IT/BT industries, However, a number of issues, including development of effective fabrication methods, highly sensitive and functional materials, and neo-conceptive devices using TPS, must be addressed for the realization of industrial application of TPS. In this review article, we discuss our efforts related to TPS: effective fabrication methods, diverse two-photon curable materials for high functional devices, and applications.
Keywords
Two-photon stereolithography; Three-dimensional nano/micro structures;
Citations & Related Records
Times Cited By KSCI : 11  (Citation Analysis)
Times Cited By Web Of Science : 12  (Related Records In Web of Science)
연도 인용수 순위
1 Han, C. S., Seo, H. W., Lee, H. W., Kim, S. H. and Kwak, Y. K., 'Electrokinetic Deposition of Individual Carbon Nanotube onto an Electrode Gap,' Internationallournal of Precision Engineering and Manufacturing, Vol. 7, No. 1, pp. 42-46, 2006   과학기술학회마을
2 Takada, K., Sun, H. B. and Kawata, S., 'Improved spatial resolution and surface roughness in photopolymerization-based laser nanowriting,' Appl. Phys. Lett., Vol. 86, No. 7, pp. 071122, 2005
3 Seet, K. K., Mizeikis, V., Matsuo, S., Juodkazis, S. and Misawa, H., 'Three-dimensional spiral-architecture photonic crystals obtained by direct laser writing,' Advanced Materials, Vol. 17, No. 5, pp.541-545, 2005   DOI   ScienceOn
4 Lim, T. W., Park, S. H., Yang, D. Y., Kong, H. J. and Lee, K. S., 'Direct Single-Layered Fabrication of 3D Concavo-Convex Patterns in Nano-Stereolithography,' Applied Physics A, Vol. 84, No. 84, pp. 379-383, 2006   DOI   ScienceOn
5 Frolov, A. M., 'Two-stage strategy for high-precision variational calculations,' Physical review. A., Vol. 57, No. 4, pp. 2436-2439, 1998   DOI   ScienceOn
6 Liao, C. Y., Bouriauand, M., Baldeck, P. L., Leon, J. C., Masclet, C. and Chung, T. T., 'Two-dimensional Slicing Method to Speed up the Fabrication of Micro Objects Based on Two-photon Polymerization,' Appl. Phys. Lett., Vol. 91, No. 3, pp. 033108, 2007
7 Yang, H., Deschatelets, P., Brittain, S. T. and Whitesides, G. M., 'Fabrication of high performance ceramic microstructures from a polymeric precursor using soft lithography,' Advanced Materials., Vol. 13, No. 1, pp. 54-58, 2001   DOI   ScienceOn
8 Liew, L. A., Liu, Y., Luo, R., Cross, T., An, L., Bright, V. M., Dunn, M. L., Daily, J. W. and Raj, R., 'Fabrication of SiCN MEMS by photopolymerization of pre-ceramic polymer,' Sensors and Actuators A, Vol. 95, No. 2, pp. 120-134, 2002   DOI   ScienceOn
9 Provin, C., Monneret, S., Gall, H. L. and Corbel, S., 'Three­dimensional ceramic microcomponents made using microstereo­lithography,' Advanced Materials, Vol. 15, No. 12, pp. 994-997, 2003   DOI   ScienceOn
10 Fukada, S. and Nishimura, K., 'Nanometric Positioning over a One-Millimeter Stroke Using a Flexure Guide and Electromagnetic Linear Motor,' Internationallournal of Precision Engineering and Manufacturing, Vol. 8, No. 2, pp. 49-53, 2007   과학기술학회마을
11 Kawata, S., Sun, H. B., Tanaka, T. and Takada, K., 'Finer features for functional microdevices,' Nature, Vol. 412, No. 16, pp. 697-­698, 2001   DOI
12 Adams, D. P., Mayer, T. M. and Swartzentruber, B. S., 'Nanometer-scale Lithography on Si(001) using Adsorbed H as an Atomic Layer Resist,' J. Vac. Sci. Tech. B, Vol. 14, No.3, pp. 1642-1649, 1996   DOI
13 Shin, B. S., Kim, J. G., Chang, W. S. and Whang, K. H., 'Rapid Manufacturing of 3D Micro-Products Using UV Laser Ablation and Phase-Change Filling,' International Journal of Precision Engineering and Manufacturing, Vol. 7, No. 3, pp. 56-59, 2006   과학기술학회마을
14 Yang, D. Y, Park, S. H., Lim, T. W., Kong, H.J., Yi, Sh. W., Yang, H. K. and Lee, K. S., 'Ultraprecise Microreproduction of a Three­Dimensional Artistic Sculpture by Multi path Scanning Method in Two-Photon Photopolymerization,' Appl. Phys. Lett., Vol. 90, No. 1, pp. 013113, 2007
15 Mizumoto, H., Yabuta, Y., Arii, S. and Tazoe, Y., 'A Dual-Mode Pico-Positioning System Using Active Aerostatic Coupling,' International Journal of Precision Engineering and Manufacturing, Vol. 8, No.2, pp. 32-37, 2007   과학기술학회마을
16 Bjorholm, J. E., 'EUV Lithography: The Successor to Optical Lithography,' Intel Tech. Journal Q3, pp. 1-8, 1998
17 Toader, O. and John, S., 'Proposed Square Spiral Microfabrication Architecture for Large Three-dimensional Photonic Band Gap Crystals,' Science, Vol. 292, No.1, pp. 1133-1135, 2001   DOI
18 Serbin, J., Egbert, A., Ostendorf, A., Chichkov, B. N., Houbertz, R., Domann, G., Schulz, J., Cronauer, C., Froehlich, L. and Popall, M., 'Femtosecond laser-induced two-photon polymerization of inorganic-organic hybrid materials for applications in photonics,' Optics Letters, Vol. 28, No.5, pp. 301-303, 2003   DOI   ScienceOn
19 Maruo, S., Nakamura, O. and Kawata, S., 'Three-dimensional microfabrication with two-photon-absorbed photopolymerization,' Optics Letters, Vol. 22, No. 2, pp. 132-134, 1997   DOI   ScienceOn
20 Stroock, A. D., Dertinger, S. K. W., Ajdari, A., Mezic, I., Stone, H. A. and Whitesides, G. M., 'Chaotic mixer for microchannels,' Science, Vol. 295, No. 25, pp. 647-651, 2002   DOI   ScienceOn
21 Jin, J. H., Misumi, I., Gonda, S. and Kurosawa, T., 'Pitch Measurement of 150 nm ID-grating Standards Using an Nano­Metrological Atomic Force Microscope,' International Journal of Precision Engineering and Manufacturing, Vol. 5, No.3, pp. 19­25, 2004
22 Doraiswamy, A., Jin, C., Narayan, R. J., Mageswaran, P., Mente, P., Modi, R., Auyeung, R., Chrisey, D. B., Ovsianikov, A. and Chichkov, B., 'Two Photon Polymerization of Organic-inorganic Hybrid Biomaterials for Microstructured Medical Devices,' Acta Biomaterialia, Vol. 2, No. 3, pp. 267-275, 2006   DOI   ScienceOn
23 Yoo, D. J., 'Filling Holes in Large Polygon Models Using an Implicit Surface Scheme and the Domain Decomposition Method,' International lournal of Precision Engineering and Manufacturing, Vol. 8, No. 1, pp. 3-10, 2007   과학기술학회마을
24 Park, S. H., Lim, T. W., Yang, D. Y., leong, J. H., Kim, K. D., Lee, K. S. and Kong, H. J., 'Effective Fabrication of Three­-Dimensional Nano/Microstructures in a single step Using Multilayered Stamp,' Appl. Phys. Lett., Vol. 8, No. 20, pp. 203105, 2006
25 Sung, I. H. and Kim, D. E., 'Fabrication of Micro/nano-Patterns Using MC-SPL(Mechano-Chemical Scanning Probe Lithography) Process,' International Journal of Precision Engineering and Manufacturing, Vol. 4, No. 5, pp. 22-26, 2003
26 Lee, H. W., Han, C. S., Lee, E. S., Chul, Y., Kim, J. H., Kim, S. H. and Kwak, Y. K., 'Direct Fabrication of the Scanning Probe Tip with Multi-Walled Carbon Nanotubes Using Dielectrophoresis,' International Journal of Precision Engineering and Manufacturing, Vol. 6, No. 2, pp. 50-54, 2005   과학기술학회마을
27 Joannopoulos, J. D., 'Self-assembly Lights up,' Nature, Vol. 414, No. 6861, pp. 257-258, 2001   DOI
28 Park, J. W., Ryu, S. H. and Chu, C. N., 'Pulsed Electrochemical Deposition for 3D Micro Structuring,' International Journal of Precision Engineering and Manufacturing, Vol. 6, No. 4, pp. 49­54, 2005
29 Song, C. K., Shin, Y. J. and Lee, H. S., 'Performance Assessment of an Ultraprecision Machine Tool Positioning System with a Friction Drive,' International lournal of Precision Engineering and Manufacturing, Vol. 6, No. 3, pp. 8-12, 2005
30 Pham, T. A., Kim, D. P., Lim, T. W., Park, S. H., Yang, D. Y. and Lee, K. S., 'Three-Dimensional SiCN Ceramic Microstructures via Nano-Stereolithography of Inorganic Polymer Photoresists,' Advanced Functional Materials, Vol. 16, No. 9, pp. 1235-1241, 2006   DOI   ScienceOn
31 Park, J. W., Lee, D. W., Kawasegi, N. and Morita, N., 'Nanoscale Fabrication in Aqueous Solution Using Tribo-Nanolithography,' lnternationallournal of Precision Engineering and Manufacturing, Vol. 7, No. 4, pp. 8-13, 2006   과학기술학회마을
32 Chou, S. Y., Krauss, P. R. and Renstrom, P. J., 'Nanoimprint Lithography,' J. Vac. Sci. Tech. B, Vol. 14, No.6, pp. 4129-4133, 1996   DOI   ScienceOn
33 Stilson, S., McClellan, A. and Devasia, S., 'High-speed solution switching using piezo-based micropositioning stages,' IEEE transactions on bio-medical engineering, Vol. 48, No.7, pp. 806-­814, 2001   DOI   ScienceOn
34 Henmi, N. and Tanaka, M., 'An Open-Loop Method for Point-to­Point Positiong of a Piezoelectric Actuator,' International Journal of Precision Engineering and Manufacturing, Vol. 8, No.2, pp. 9­13, 2007   과학기술학회마을
35 Martin, Y., Rishton, S. and Wickramasinghe, H. K., 'Optical Data Storage Read Out at 256 $Gbits/in^{2}$,' Applied Physics Letters, Vol. 71, No.1, pp. 1-3, 1997   DOI   ScienceOn
36 Park, S. H., Jeong, J. H., Choi, D. G., Kim, K. D., Altun, A. O., Lee, E. S., Yang, D. Y. and Lee, K. S., 'Adaptive Bonding Technique for Precise Assembly of Three-Dimensional Microstructures,' Applied Physics Letters, Vol. 90, No. 23, pp. 233109, 2007
37 Saito, Y., Gao, W. and Kiyono, S., 'A Single Lens Micro-Angle Sensor,' International Journal of Precision Engineering and Manufacturing, Vol. 8, No. 2, pp. 14-19, 2007   과학기술학회마을
38 Campbell, M., Sharp, D. N., Harrison, M. T., Denning, R. G. and Turberfield, A. J., 'Fabrication of Photonic Crystals for the Visible Spectrum by Holographic Lithography,' Nature, Vol. 404, No. 6773, pp. 53-56, 2000   DOI   ScienceOn
39 Lim, T. W., Park, S. H., Yang, D. Y., Pham, T. A., Lee, D. H., Kim, D. P., Chang, S. I. and Yoon, J. B., 'Fabrication of Three-­Dimensional SiC-Based Ceramic Micropatterns Using a Sequential Micromolding-and-Pyrolysis Process,' Microelectronic Engineeri-ng, Vol. 83, No. 11-12, pp. 2475-2481, 2006   DOI   ScienceOn
40 Teh, W. H., Durig, U., Salis, G., Harbers, R., Drechsler, U., Mahrt, R. F., Smith, C. G. and Guntherodt, H. J., 'SU-8 for real three-­dimensional subdifferaction-Iimit two-photon microfabrication,' Appl. Phys. Lett., Vol. 84, No. 20, pp. 4095-4097, 2004   DOI   ScienceOn